SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus Gasonics PEP Iridia DL Plasma Asher.
Please click on the "Send More Details" button at the end of the PEP Iridia DL description, if you'd like to get more details, photos and specifications of this Plasma Asher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus Gasonics PEP Iridia DL Plasma Asher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||PEP Iridia DL|
|Sales Condition:||as is where is|
Plasma Asher. The Novellus PEP Iridia integrates production proven technologies to offer high-throughput implant strip and post-etch clean process solutions. Iridia’s Directional Downstream Plasma source is comprised of a directional RF source paired with a versatile, downstream microwave source. The integrated lamp module with state-of-the-art, closed-loop wafer temperature control enables multi-temperature processing in a single chamber. Designed for aggressive fluorine and reducing chemistries, the Iridia offers unsurpassed flexibility in handling your production needs, including high dose implant strip (HDIS), Front End of Line (FEOL) cleans, and post-etch cleans for aluminum and copper interconnects. Was fully functional when deinstalled. Will be fully tested at time of sale. Through-the-Wall Installation. Wafer Handler: PEP 4800DL(H). Build Configuration: 95-0526. Dual Cooling Stations. Kensington DUAL MULTI-LINK Robot. Controller Model 4000C, s/n 97-396-96. Controller: IBM 7587 w/CD-ROM. 208VAC, 60Hz, 3Phase WYE, 30A. Left Module: PEP4800DL (L). Build Configuration: 51-2035. Astex Microwave Generator. ENI ACG-5XL RF Generator. Process Controller: IBM 7587. Gas Configuration: CF4, N2, 4 percent H2/N2, O2, CF4, N2. Right Module: PEP-4800DL (R). Build Configuration: 51-2036. Astex Microwave Generator. ENI ACG-5XL RF Generator. Process Controller: IBM 7587. Gas Configuration: CF4, CF4, N2, CDA, N2, O2, 4 percent H2/N2. Does not include vacuum pumps or water chiller. Sold As Is.
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