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Plasmatherm Unaxis 790 ICP Plasma Etch System for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Plasmatherm Unaxis 790 ICP Plasma Etch System. This Plasmatherm Unaxis 790 ICP Plasma Etch System is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this ICP Plasma Etch System and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Plasmatherm Unaxis 790 Equipment Details

SDI ID: 93643
Manufacturer: Plasmatherm Unaxis
Model: 790
Description: ICP Plasma Etch System
Version:
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time:
Sales Price (each): Inquire
Comments:
ICP Plasma Etch System. Inductively coupled plasma etching system for high etch rates and control over selectivity and damage. PC controller with graphical user interface. 9.5 in. bottom electrode, ceramic clamp currently for 2 in. wafer. Chamber pumped via turbo pump with rough pump. RF Generators: RFPP5S 500W, 13.56 MHz and RFPP10M 1000W, 2 MHz. Six MFC mass flow gas controllers. Previous Gases used: CL2, SF6, N2, CF4, AR, BCL3.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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