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Nissin Exceed 2000 Medium Current Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Nissin Exceed 2000 Medium Current Ion Implanter.
Please click on the "Get Quote" button at the end of the Exceed 2000 description, if you'd like to get a quotation, photos and specifications of this Medium Current Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Nissin Exceed 2000 Medium Current Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Nissin Exceed 2000 Equipment Details

SDI ID: 93833
Manufacturer: Nissin
Model: Exceed 2000
Description: Medium Current Ion Implanter
Version: 3, 4 and 5 inch
Vintage: 01.05.1997
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:
1. System Summary
Manufacturer NISSIN Vintage May-97
Model EXCEED2000 Serial Number  
Process Medium Current Imp. Inspection Date 2018/8/10
Inspector  
System Demotions 3000W X 6325D X 2500H cm
2. General Information SYSTEM SHUTDOWN, CONDITION VERY GOOD & CLEAN
2.1 Wafer Size 3inch(76mm) / 4inch(100mm)  
2.2 Process # E95-3005  
2.3 Energy Range 10-200KV  
2.4 Cassette Stages 4  
2.5 Loadlock 2 LEFT and RIGHT  
2.6 Orienters 2 (Auto-Flat/Notch Find)  
2.7 Software Main:OS Dos / Process: Windows XP Japanese  
2.8 Log-In Password -  
       
3. System Vacuum
3.1 Ion Source Chamber N/A  
3.2 Beamline Chamber N/A  
3.3 End Station Chamber N/A  
3.4      
     
  3.4.2 SYSTEM Drypumps, Turbo pumps, and Cryo pumps,  
  Class Maker Model    
3.5 DRY PUMPS        
Load /Lock (DP-4) Alcatel Drytel 34C 450L/Sec  
Target Chamber(DP-3) Alcatel Drytel 31 450L/Sec  
F.E.M (DP-2) Kashiyama SD 90V III 1500L/Sec  
S.A.M/Ion Source(DP-1 Kashiyama SD 90V III 1500L/Sec  
TURBO PUMPS        
Load/lock (TP 4 & 5) Shimadzu TMP51G 55L/Sec  
F.E.M (TP-3) Shimadzu TMP1002 800L/Sec  
S.A.M (TP-1 & 2) Shimadzu TMP1002 800L/Sec  
CRYO PUMPS        

 

 

  Target Chamber (CP-2 Cryotec-12L V208SC612GN 4000L/Sec  
Collimator (CP-1) Cryotec-12L V208SC612GN 4000L/Sec  
         
Compressor Daikin U110CW    
4. Utilities
4.1 Power 208VAC, 3phase, 3wires, 65KVA  
4.2 Air 100 ~ 150PSI  
4.3 N2 40 ~ 150PSI  
4.4 Cooling Water 60 ~ 150PSI, Temp:4~21℃  
5. Process Gas
5.1 SIF4 (0.35L) 200Kev SI+ 200uA-20uA SI++ 20uA-5uA 5E12  
5.2 Ar (0.35L) 200Kev 1000uA 5E12  
5.3      
5.4      
6. High Voltage Range
6.1 Extraction Power Supply 0 keV ~ 70keV  
6.2 Acceleration Power Supply 0 keV ~ 180keV  
7. Power Supplies (Assembly)_Power check
7.1 Arc YES    
7.2 Filament YES    
7.3 SAM YES    
7.4 ACC YES    
7.5 DEC YES    
7.6 FOCUS YES    
7.7 TRIM- Q YES    
7.8 FEM YES    
7.9 COLUMN YES    
7.10 BSM DC/AMP YES    
7.11 FARADAY SUPPRESSION YES    
7.12 ISO TX 160KV YES    
7.13 HV Stack 160KV YES    

 

 

8.1 BSM Controllers YES  
8.2 FEM Controllers YES  
8.3 P/C Controllers YES  
8.4 SAM Controllers YES  
8.5 W/C,WFC Controllers YES  
8.6 V/C Controllers YES  
8.7 I/C Controllers YES  
8.8 O/F Controllers YES  
8.9 TQ Controllers YES  
8.10 T/C Controllers YES  
8.11 I/G Controllers YES  
8.12 T/P Controllers YES  

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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