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Hitachi S8840 CD SEM for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Hitachi S8840 CD SEM.
Please click on the "Send More Details" button at the end of the S8840 description, if you'd like to get more details, photos and specifications of this CD SEM, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Hitachi S8840 CD SEM is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Hitachi S8840 Equipment Details

SDI ID: 93854
Manufacturer: Hitachi
Model: S8840
Description: CD SEM
Version: 200 MM
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 250,000 USD
Comments:

-CD Measurement SEM
-The tool can be demonstrated with initialization
-CD measuring size: 130-160nm, consistently
-Version 11.7 S/W or newer
-SECS/GEM Communication Interface
-Accelerating voltage, 500V to 1300V, 10V steps
-Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V
-3 Stage Electromagnetic Lens System
Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum system
-2-Stage Deflection Scan Coil
-Astigmatism correction via an 8-pole electromagnetic coil
-Magnification = 1000x to >150000x
-Field control method; Continuously on for sample decharging, at all voltages
-Wafer imaging ability; Entire surface of 8” wafer
-Depth of focus: >= 1.0mm at 80000x magnification
-Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding voltage),
-Optical Microscope System: Image is Monochrome, using CCD camera, Magnification is 110x, Wafer imaging X & Y coverage from 5 – 195mm, notch down

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Attachments: 2 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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