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Anelva ILC 1015i Sputter / PVD system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Anelva ILC 1015i Sputter / PVD system.
Please click on the "Send More Details" button at the end of the ILC 1015i description, if you'd like to get more details, photos and specifications of this Sputter / PVD system, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Anelva ILC 1015i Sputter / PVD system is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Anelva ILC 1015i Equipment Details

SDI ID: 93864
Manufacturer: Anelva
Model: ILC 1015i
Description: Sputter / PVD system
Version: 150 mm
Vintage: 01.06.1992
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 95,000 USD
Comments:

*Current condition:  Installed in fab clean room.

*Available date:       at the earliest,  Early May  (can be moved out after 5/7)

*Visual inspection:   can be arranged upon request.

 

Specification:-

1 Autoloader
Φ 150 mm, 25 w. cassette, 4 set position
2 Load lock chamber
25 w.
 
Rough exhaust air: dry pump
3 Buffer chamber
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
4 Cleaning chamber
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
Etching electrode: Φ 180 mm
gas: Ar (Max 200 sccm)
RF power supply: PRF-065B
5 Separation chamber
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
6 Sputtering chamber (R)
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
Introduced gas: Ar (Max 200 sccm), N 2 (Max 200 sccm)
Φ 12 "S - PMC with shutter
DC power supply: PDC-157
With substrate heating mechanism
Ti target, with SUS shield
6 Sputtering chamber (C)
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
Introduced gas: Ar (Max 200 sccm)
Φ 12 "S - PMC with shutter
DC power supply: PDC-307
With substrate heating mechanism
Al - Cu target, with SUS shield
6 Sputtering chamber (L)
Main exhaust: Cryopump (CAP-80MK2)
Cryopump thermometer: MCT-110A
Introduced gas: Ar (Max 200 sccm), N 2 (Max 200 sccm)
Φ 12 "S - PMC with shutter
DC power supply: PDC-157
With substrate heating mechanism
Ti target, with SUS shield
7 Cryocompressor
CRC-874 2 units
8 Dry pump
missing
9 Programming panel (P150)
missing
10 2 manual boxes
11 PC data logger
12UPS: Sanken Electric SAU 302
13 Quadrupole mass spectrometer: AQA - 100 MPX
* Analytical tube is attached to SP-R, C, L
14 Multiplexer MPX - 100
15 Operation PC
Windows

Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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