SDI fabsurplus.com is pleased to announce the availability of the following listed used Alcatel AMS 4200 Advanced Multi chamber ICP Plasma Etching System / Bosch Process.
Please click on the "Get Quote" button at the end of the AMS 4200 description, if you'd like to get a quotation, photos and specifications of this Advanced Multi chamber ICP Plasma Etching System / Bosch Process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Alcatel AMS 4200 Advanced Multi chamber ICP Plasma Etching System / Bosch Process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Advanced Multi chamber ICP Plasma Etching System / Bosch Process|
|Version:||150 mm and 200 mm|
|Sales Condition:||as is all rebuilt|
Alcatel Model AMS 4200
Advanced Multi chamber ICP Plasma Etching System
Mfg Date: 09 / 2007
150mm configuration (prepared for 200mm)
Process Chamber 1:
Silicon Oxide (RGV Dielectric) Etch Process Module
High pressure RIE source reactor
Substrate Holder with mechanical clamping chuck for 150mm
BIAS 600W LF
Reactor Pump: Adixen RVP 2033C2 on DN40 throttle valve
Gas Lines: CF4, O2, CHF3, He
Process Chamber 2:
Silicon Etch Process Module
High Density, low pressure ICP plasma source
Cryo temperature process
Cryogenic Substrate Holder with mechanical clamping chuck for 150mm
Source: 3kW RF & Auto Matching Network
Laser View Port Adapter
Pumping line to pump down the substrate holder
He backside cooling
BIAS 300W RF
LN2 controlled cooling
Deware LN2 Tank
Reactor pump: PM ADP 122
Maglev Turbo Pump: ATH 1600M
DN200 heated throttle
Gas Lines: SF6, O2, O2
BROOKS MX 600 platform with MAG 7 robot
6 sided platform: 2x Process modules, 2x Cassette Modules, 2x free
2 Cassette Modules BROOKS VCE6
End Point Dedection
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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