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Lam Research 9600PTX Dry Etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam Research 9600PTX Dry Etch .
Please click on the "Send More Details" button at the end of the 9600PTX description, if you'd like to get more details, photos and specifications of this Dry Etch , and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam Research 9600PTX Dry Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Lam Research 9600PTX Equipment Details

SDI ID: 95243
Manufacturer: Lam Research
Model: 9600PTX
Description: Dry Etch
Version: 200 mm
Vintage: 01.01.1998
Quantity: 1
Sales Condition:
Lead Time: immediately
Sales Price: Inquire
Comments:

Alliance 9600PTX

2 Strip + 2 PTX

 

Hardware Configuration of LAM Alliance 9600 PTX

No.

Description

Configuration

Remark

1. System Configuration

 

 

1) Maker

LAM

 

 

2) Model

LAM Alliance 9600 PTX

 

 

3) Serial Number

-

 

 

4) Wafer Size

8 inch

 

 

5) Type of Loadlock

AGV Open Cassette

 

 

6) Number of Process Chamber

2 TCP 9600 PTX chamber & 2 Metal Microwave stripper chamber

 

 

7) TM

Alliance 6.0

 

 

8) User Interface

Monitor/Keyboard/Computer

 

 

9) Signal Tower

 

 

 

10) EMO

Push Button

 

 

11) Main Power

208VAC 40A 60Hz 3PH 5-Wire

 

 

 

 

 

2. Configuration of Transfer Chamber

 

 

1) VCE Type

LIP Seal type

 

 

2) Aligner

001-4130-03

 

 

3) Model of Transfer Robot

Megatran7 / Brooks

 

 

4) ARM Type

Dual Thin Blade

 

 

5) Serial No. of Transfer Robot

0611-12042

 

 

6) Parts No. of Rocker Valve

715-012208-001

 

 

7) TM Pressure Gauge

HPS Series 907/MSK

 

 

8) LL Pressure Gauge

HPS Series 907/MSK

 

 

9) Cooling Station

713-000435-001

 

 

10) Model of Turbo Pump

STP-H200C

 

 

 

 

 

3. Configuration of Etch Chamber

PM2

PM3

 

 

 

1) Model of Chamber

TCP 9600 PTX

TCP 9600 PTX

 

 

 

2) Year of Construction

1997

1997

 

 

 

3) Serial No. of Chamber

 

 

 

 

 

4) Model of Pressure Gauge

MSK E29B-23813(0.1torr)/625A11TDE(10torr)

 

 

 

5) Model of Throttle Gate Valve

VAT 65046-PH52-AFI1/0052

 

 

 

6) Model of Turbo Pump

STP-1301L

STP-H1303CV3

 

BOC Edwards

 

7) Model of Source RF Generator

RFDS 660-024637-006

RFDS 660-024637-006

 

 

 

8) Model of Bias RF Generator

RFG 1250 HLAO

RFG 1250 HLAO

`

 

 

 

 

 

 

4. Configuration of MW Chamber

PM1

PM4

 

 

 

1) Model of Chamber

Alliance Stripper

Alliance Stripper

 

 

 

2) Year of Construction

1997

1997

 

 

 

3) Serial No. of Chamber

Strip-54

Strip-55

 

 

 

4) Model of Pressure Gauge

 

 

 

 

 

5) Model of Throttle Gate Valve

VAT/64040-PE52-1009/0429

 

 

 

6) Model of Vaporizer

 

 

 

 

 

7) Model of MW Generator

Astex FI10021

Astex FI10021

 

 

 

8) configuration of MFC

O2 5000sccm

O2 5000sccm

 

 

 

 

N2 1000sccm

N2 1000sccm

 

 

 

 

 

 

 

 

 

 

 

 

5. Configuration of Gas Panel, Etch Chamber

 

 

 

 

 

1) Type of Gas Panel

8 channel

8 channel

 

 

 

2) No of Gas Channel

6 channel

6 channel

 

 

 

2) Model of MFC

Tylan 2950 Series

Tylan 2950 Series

 

 

 

3) Configuration of Gas

Ar 100sccm

Ar 100sccm

 

 

 

 

CHF3 100sccm

CHF3 100sccm

 

 

 

 

O2 200sccm

O2 200sccm

 

 

 

 

N2 50sccm

N2 50sccm

 

 

 

 

CL2 200sccm

CL2 200sccm

 

 

 

 

BCL3 200sccm

BCL3 200sccm

 

 

6. Configuration of AC Rack

 

1) Power

685-490962-052

 

 

 

208VAC 400A 50/60Hz 3PH 4-Wire

 

 

 

 

 

7. Remark

 

 

 

 

 

 

 

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