fabsurplus.com




Edwards Neptune Scrubber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Edwards Neptune Scrubber. This Edwards Neptune Scrubber is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this Scrubber and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Edwards Neptune Equipment Details

SDI ID: 95441
Manufacturer: Edwards
Model: Neptune
Description: Scrubber
Version: Facilities
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time:
Sales Price (each): Inquire
Comments:

Mechanical Data

 

Mechanical Data

Edwards Neptune

Mass

·        Abatement module, dry

·        Abatement module, with water

·        WESP module, dry

·        WESP module, with water

 

1400 kg

1568 kg

700 kg

820 kg

 

Maximum operating tilt angle

Handling

Each module must not be laid on its side, or be

inverted

Topple angle

>10°

Secondary containment water capacity

Abatement module

WESP module

 

0.2 m3

0.14 m3

Gas Flow Data

Process gas

Chemical symbol

Total maximum continuous process gas flow rate (slm) *

LEL (%)

Bypass N2 dilution flow (slm) §

TLV

(ppm)

25% TLV

(ppm)

Acetylene

C2H2

Contact Edwards

-

-

-

-

Ammonia

NH3

60.0

16.0

423

25

6.25

Arsine

AsH3

Prohibited

-

-

-

-

Boron trichloride

BCl3

Contact Edwards

-

-

-

-

Boron trifluoride

BF3

Contact Edwards

-

-

-

-

 

Carbon monoxide

 

CO

Contact Edwards

 

-

 

-

 

-

 

-

Carbon tetrafluoride

CF4

Contact Edwards

-

-

-

-

Chlorine

Cl2

Prohibited

-

-

-

-

Chlorine trifluoride

ClF3

Prohibited

-

-

-

-

Diborane

B2H6

5.0

0.8

709

0.1

0.025

 

Dichlorosilane (DCS)

SiCl2H2

Contact Edwards

 

-

 

-

 

-

 

-

Difluoromethane

CH2F2

Contact Edwards

-

-

-

-

Fluorine

F2

90.0

n/a

n/a

1

0.25

Fluoromethane

CH3F

Contact Edwards

-

-

-

-

Germane

GeH4

Contact Edwards

-

-

-

-

Germanium tetrachloride

GeCl4

Prohibited

-

-

-

-

Helium

He

100

n/a

n/a

n/a

n/a

Hexachlorodisilane

Si2Cl6

Contact Edwards

-

-

-

-

Hexafluoroethane

C2F6

Contact Edwards

-

-

-

-

Hydrogen

H2

450.0 # Ø ¤

4.1

4928 Ø

4100 **

1025

Hydrogen bromide

HBr

Contact Edwards

-

-

-

-

Hydrogen chloride

HCl

Prohibited

-

-

-

-

 

Hydrogen fluoride

 

HF

Contact Edwards

 

-

 

-

 

-

 

-

Methane

CH4

40.0

5.0

776

5000 §§

1250

Nitrogen trifluoride

NF3

60.0 ‡‡ ††

n/a

n/a

10

2.5

Nitrous oxide

N2O

60.0 ††

n/a

n/a

50

12.5

Octafluorocyclonepentene

C5F8

Contact Edwards

n/a

-

-

-

Octofluorocyclobutane

C4F8

Contact Edwards

n/a

-

-

-

Oxygen

O2

Contact Edwards

-

-

-

-

 

Ozone

O3

Contact Edwards

 

-

 

-

 

-

 

-

Perfluorobutadiene

C4F6

Contact Edwards

n/a

-

-

-

Perfluoropropane

C3F8

Contact Edwards

n/a

-

-

-

Phosphine

PH3

3.0

1.8

1156

0.3

0.075

Propene

C3H6

Contact Edwards

-

-

-

-

Silane

SiH4

40.0 ## ØØ

1.4

2202 ØØ

5

1.25

Silicon tetrachlororide

SiCl4

Prohibited

-

-

-

-

Silicon tetrafluoride

SiF4

Contact Edwards

-

-

-

-

Sulfur hexafluoride

SF6

Contact Edwards

-

-

-

-

Tetraethylorthosilicate (TEOS)

Si(O(C2H5))4

Contact Edwards

-

-

-

-

Titanium tetrachloride

TiCl4

Prohibited

-

-

-

-

Trichlorosilane (TCS)

SiCl3H

Contact Edwards

-

-

-

-

 

Trifluoromethane

CHF3

Contact Edwards

 

n/a

 

-

 

-

 

-

Trimethyl borate (TMB)

B(OCH3)3

2.0 slm (4 g min-1)

n/a

n/a

2

0.5

Trimethyl phosphate (TMOP)

OP(OCH3)3

Contact Edwards

-

-

-

-

Trimethyl phosphite (TMP)

P(OCH3)3

0.72 slm (4 g min-1)

n/a

n/a

2

0.5

Tungsten hexafluoride

WF6

Contact Edwards

n/a

-

-

-

Xenon difluoride

XeF2

Contact Edwards

-

-

-

-

Categories:
Attachments: 11 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us





View all FAB Facilities Equipment for sale

Search for Edwards items for sale

Search for Neptune items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form