Nikon NSR-2205EX14C DUV Stepper for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Nikon NSR-2205EX14C DUV Stepper.
Please click on the "Send More Details" button at the end of the NSR-2205EX14C description, if you'd like to get more details, photos and specifications of this DUV Stepper, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Nikon NSR-2205EX14C DUV Stepper is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Nikon NSR-2205EX14C Equipment Details

SDI ID: 95573
Manufacturer: Nikon
Model: NSR-2205EX14C
Description: DUV Stepper
Version: 200 MM
Vintage: Inquire
Quantity: 1
Sales Condition: inquire
Lead Time: 3 months
Sales Price: 1,600,000 USD

Full refurbished :
1. 200mm Notch wafer
2. Open cassette.
3. 1 year part warranty.(Not including Laser and consumable)
4. Including installation
5. Price: Ex works
6. Delivery: 3 months

Performance data:-

(Please refer to the raw lens data in the attached screen shots.).


1 Illumination Power 212.8 ㎽/㎠ ≥200 ㎽/㎠
2 Illumination uniformity 2.064 % Within ± 2.0%
3 Intergrated Exp Controller -0.139 ~ 0.345 % Within ± 1.0%
4 Wafer Holder Flatness Max-Min 1.48 Max-Min ≤ 3.0 ㎛
5 LEVELING X 1.182 ~ 2.426 μrad Within ± 4.8 μrad
Y -0.483 ~ 2.360 μrad
6 Reticle Blind X 0.6 ~ 0.7 mm 0.4 ~ 0.8 mm
Y 0.5 ~ 0.65 mm
7 Orthogonality (ORT0+90)/2 0.0085 μrad (0M+90M)/2≤0.48μrad
8 Stepping Accuracy (STEPALL) X(3σ) 17 nm 3σ ≤ 25nm
Y(3σ) 14 nm
9 Stepping Accuracy (BACKALL) X(3σ) 13 nm 3σ ≤ 25nm
Y(3σ) 15 nm
10 Reticle Rotation Abs 2 nm |M|+3σ ≤ 15nm
Rep 4 nm
11 Lens Distortion X(Min`Max) -12 ~ 25 nm Within ± 40nm
Y(Min`Max) -13 ~ 26 nm
12 Lens Fied Inclination TFD 0.182 Max-Min ≤ 0.25㎛
CUR -0.011 CUR ≤ 0.20㎛
UR - LL 0.006 UR-LL ≤ 0.15㎛
UL - LR -0.013 UL-LR ≤ 0.15㎛
AST -0.114 AST ≤ 0.20㎛
13 LSA Overlay X 39 nm |M|+3 ≤ 50nm
Y 39 nm
14 FIA Overlay X 44 nm |M|+3 ≤ 50nm
Y 43 nm
15 AF Factor Analysis Max - Min 0.126 3σ ≤ 0.2㎛
16 TTLFC2 Repeatability 37 3σ ≤ 50nm
17 FIA Repeatability X / Y (3σ) 14 / 19 nm 3σ ≤ 20nm
18 LSA Repeatability X / Y (3σ) 10 / 12 nm 3σ ≤ 20nm
19 VRA Repeatability X1/Y1/X2/Y2 (3σ) 3 / 4 / 5 / 3 nm 3σ ≤ 10nm



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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