SDI fabsurplus.com is pleased to announce the availability of the following listed used STS (SPTS) Multiplex ICP Deep Reactive Ion Etcher.
Please click on the "Send More Details" button at the end of the Multiplex ICP description, if you'd like to get more details, photos and specifications of this Deep Reactive Ion Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This STS (SPTS) Multiplex ICP Deep Reactive Ion Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Deep Reactive Ion Etcher|
|Sales Condition:||as is where is|
|Sales Price:||130,000 USD|
Full working order at shutdown.
Deep Silicon Etch Process Package
SOI Trench Etch Package
Gasline: Valve‐MFC‐Filter (VCR) (Qty. 4x units included)
ICP 240BF Source (ASE‐exc.PSU and Matching Unit)
Electrode Temperature Control (+5 to +40deg C) Multiplex ICP SC160M Process Chamber (MESC)
Mechanical Wafer Clamp Electrode(tripod) with He Backside Cooling
300/30W (13.56MHz) RF Supply and Matching Unit
1kW (13.56MHz) RF Supply and Matching Unit
Chamber parts for 1x150mm substrate (Mechanical Clamping)
Turbo Pump: Leybold MAG900CT Dry Pump: Edwards iQDP80 (M)
Process Chamber: ICP V2 unified ISO250 (inc. insulation spacers) SR with 160 adaptor
Chamber Externals: ICP V2 (inc. Edwards D146 penning gauge + MKS 51A & SMC ZSE6B
pressure switches + Edwards 655 100mT cap. man. gauge + NW16 bypass pump line)
Chamber Insulation Jackets: None
Lower Electrode: ICP WTC Tripod Lift
Electrode Temp Monitoring: None
Substrate Clamping/ Platen: ICP WTC Tripod 150mm Lower RF Enclosure/ MU:ICP V2 WTC H/F + L/F (SOI)
Electrode Lift Stops: 96mm (136mm electrode spacing)
HBC Assy: ICP V2 (inc.Tylan CDLD 10T cap. man gauge + Tylan FC2901 50sccm He cal. MFC)
HBC Delay Unit: None
Upper Electrode: With aperture mounting
Upper Electrode Aperture: None Upper Electrode Source: ICP Balun
Upper RF Enclosure/ MU:Balun 1kW (high cool)
Chamber Lid: ICP Heated
Electrode Switching: None
RF Generators: Upper: ENI ACG10B 1kW (13.56MHz) +Lower: ENI ACG3B 300/30W
(13.56MHz) +LF5+pulse gen+switchgunit
APC/ Hivac Valve: VAT Series 65 DN160 + PM7
Turbo Pump:Leybold MAG900CT (DN200 ‐ inc.Norcal NW40 foreline valve + MKS 750B 10T
cap. man. + purge PS305259)
Bypass Pumping: Automatic NW16
Heated Foreline: ICP
Pumping Line: NW40 (1m)
Backing Pump: Edwards iQDP80(M)
Pump Acoustic Panels:None
Backing Pump Interface:Edwards iQDP80 (STSCR287)
Pump N2 Trip Level (l/min):See gas schematics
Lower Electrode Cooling: Affinity RWA‐012J
Chamber Heating:Watlow 4x 700W cartridge heaters
Upper Electrode Cooling: None
Platen Chiller Temp Monitoring: Proteus flowswitch only
Chiller Transformers: None
Stacking Frame: None
Gasbox: Mini ‐ 4 line (inc. 1x PFC1 module)
Solid Source: None
Vapour/ Liquid Delivery Unit: None
Low Temp. Gas Interlock: None
End Point Detector: None
End Point Detector Options: None
Chamber Lid Lift: None
Chamber Cover Panels: ICP V2
Process Computer: None Computer Monitor:None
E‐Rack Electronics Modules: ICP V2 (HCL1 +DIW +HCU3 +HCU5 +VAC3Y +2x AMC1
Warning Labels: English
Substrate Lift Type: Tripod
Platen Type: Domed
Electrode Shield: Alumina, Round
Clamp Type: Standard WTC
G12, G15 & G16 gaslines have Inlet Valve
G15 & G16 gaslines have Bypass & Purge line including Purge Valve
G16 & G18 gaslines have NOValve Hardware Interlock
(S) denoted 'Switched' Gasline, (SP) denotes 'Spare' Gasline
Carousel Vacuum Loadlock
Carousel Loadlock Parts for 2x 150mm Substrates
Rotary Pump: Edwards E2M40F (Fomblin)
Loadlock: MMPlexMkIV ‐ R/H (standard ‐ inc. SMC XLD softpump valve + Edwards APG
pirani gauge + MKS 51A pressure switch)
Loadlock Cable Kit:
Loadlock Spatula: MMPlex carousel variable 2x 150mm
Loadlock Pallet: None
Loadlock Adaptor: MMPlex Carousel (inc. wafer sense laser & SMAC actuator)
MACs Robot: None MACs Spatula: None Wafer Aligner: None
Rectangular Gate Valve: VAT DN46 x 236
Thermal Break Kit: For VAT DN46 x 236 gate valve
Compressed Air Backup: V2 high pressure vent Turbo Pump: None (Norcal NW40 angle valve)
Backing Pump:Edwards E2M40F 208V 60Hz
Backing Pump Interface: Edwards E2M40F (ST8111‐035)
Pump N2 Trip Level (l/min): See Gas Schematics
N2 Bleed: Yes
Pumping Line: ISO40 (1m)
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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