SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TBDB Synapse Series coater + bonder + debonder.
Please click on the "Send More Details" button at the end of the TBDB Synapse Series description, if you'd like to get more details, photos and specifications of this coater + bonder + debonder, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TBDB Synapse Series coater + bonder + debonder is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||TBDB Synapse Series|
|Description:||coater + bonder + debonder|
Fully-automated Tokyo Electron Synapse-series adhesive coater, bonder and room temperature, mechanical debonder.
TEL Synapse V: coater
TEL Synapse V: bonder
TEL Synapse Z: debonder
TEL Synapse V: Coater Specifications
Adhesive dispense lines Two pump dispense lines and one N2
pressure dispense line
Adhesive delivery container type 1L bottle for pressure tank, 1L NOWPak for pump dispense
High viscosity adhesive line 0.3MPa (for up to 10,000cp)
Low viscosity adhesive line 0.2MPa (for up to 100cp)
20L pressure tanks:
2 containers switchable online
2 containers backup
Bevel rinse Two nozzles
Back rinse Two nozzles
EBR 0.7-35mm +/- 0.3mm
Spin speed 0-4000rpm +/- 1rpm
Dispense head control Programmable position including dynamic dispense
Atmosphere hotplate Up to 350C +/- 2%
hotplate Up to 350C +/- 2%
Cold plate 2 cooling plates control by process cooling water
10L drain tank for nozzle bath
10L drain tank for spin cup
TEL Synapse V: Bonder
Vacuum level 30Pa
Alignment X,Y: +/- 30µm; Theta +/- 0.02°
TEL Synapse Z: Debonder
Type Mechanical peel
Debond initiation Physical initiation
Force Up to ~50N
Wet clean station 3 solvent dispense lines (2 center, 1 edge)
20L pressure tanks:
2 containers switchable online (center)
2 containers backup
1 container edge dispense
Spin speed 0-1500rpm +/- 1rpm
Drain tank 10L
Wafer loading 300mm metal tape frames (7 wafers max)
Carrier unloading 300mm FOUP
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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