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TEL Tokyo Electron TBDB Synapse Series coater + bonder + debonder for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TBDB Synapse Series coater + bonder + debonder.
Please click on the "Send More Details" button at the end of the TBDB Synapse Series description, if you'd like to get more details, photos and specifications of this coater + bonder + debonder, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TBDB Synapse Series coater + bonder + debonder is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron TBDB Synapse Series Equipment Details

SDI ID: 96075
Manufacturer: TEL Tokyo Electron
Model: TBDB Synapse Series
Description: coater + bonder + debonder
Version: 300 mm
Vintage: Inquire
Quantity: 1
Sales Condition: inquire
Lead Time: Inquire
Sales Price: Inquire
Comments:

Fully-automated Tokyo Electron Synapse-series adhesive coater, bonder and room temperature, mechanical debonder.

TEL Synapse V: coater

TEL Synapse V: bonder

TEL Synapse Z: debonder

TEL Synapse V: Coater Specifications

Adhesive dispense lines Two pump dispense lines and one N2

pressure dispense line

Adhesive delivery container type 1L bottle for pressure tank, 1L NOWPak for pump dispense

lines

High viscosity adhesive line 0.3MPa (for up to 10,000cp)

Low viscosity adhesive line 0.2MPa (for up to 100cp)

Solvent cabinet

20L pressure tanks:

2 containers switchable online

2 containers backup

Bevel rinse Two nozzles

Back rinse Two nozzles

EBR 0.7-35mm +/- 0.3mm

Spin speed 0-4000rpm +/- 1rpm

Dispense head control Programmable position including dynamic dispense

Atmosphere hotplate Up to 350C +/- 2%

N2

hotplate Up to 350C +/- 2%

Cold plate 2 cooling plates control by process cooling water

Drain tank

10L drain tank for nozzle bath

10L drain tank for spin cup

 

TEL Synapse V: Bonder

Pressure 49kN

Temperature 200°C

Vacuum level 30Pa

Alignment X,Y: +/- 30µm; Theta +/- 0.02°

 

TEL Synapse Z: Debonder

Type Mechanical peel

Debond initiation Physical initiation

Force Up to ~50N

Wet clean station 3 solvent dispense lines (2 center, 1 edge)

Solvent cabinet

20L pressure tanks:

2 containers switchable online (center)

2 containers backup

1 container edge dispense

Spin speed 0-1500rpm +/- 1rpm

Drain tank 10L

Wafer loading 300mm metal tape frames (7 wafers max)

Carrier unloading 300mm FOUP

 

 

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