EATON / AXCELIS Nova NV 6200A Medium Current Implanter for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used EATON / AXCELIS Nova NV 6200A Medium Current Implanter.
Please click on the "Send More Details" button at the end of the Nova NV 6200A description, if you'd like to get more details, photos and specifications of this Medium Current Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This EATON / AXCELIS Nova NV 6200A Medium Current Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

EATON / AXCELIS Nova NV 6200A Equipment Details

SDI ID: 96662
Manufacturer: EATON / AXCELIS
Model: Nova NV 6200A
Description: Medium Current Implanter
Version: 150 MM
Vintage: Inquire
Quantity: 2
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 230,000 USD

An Automated Medium Current Ion Implantation System
Was de-installed from working condition in March 2019.
Includes the Following Items:
Automation Hardware,
Industrialized Controller
Touch Screen
Extensive Fiber Optic Communications
Low Particulate Wafer Handling System
Laminar Flow Hood
Wafer Flat Orientation
Programmable Wafer Tilt (0-60)
Liquid-Cooled Single Wafer Platens for 6"
Source Vacuum System consisting of 2400 LIS Diffusion Pump with Water Cooled Baffle and Corrosion Resistant Roughing Pump with Integral Filtration System
Beamline and End Station Vacuum System Containing CTI-Cryotorr 8, Cryogenic Pumps (3 total) Complete with Autoregeneration Systems.
Dual Feed Vaporizer Source, Gas Handling System for One (1) Inert and Three (3) Toxic Gases (SDS for Boron)
AutoFlood Electron Flood
Beam Filter for Double Charged Ions
Emergency Shut-Off System

Attachments: 7 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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