fabsurplus.com




LAM / SEZ DV-Prime Single Wafer Wet Processing for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM / SEZ DV-Prime Single Wafer Wet Processing.
Please click on the "Send More Details" button at the end of the DV-Prime description, if you'd like to get more details, photos and specifications of this Single Wafer Wet Processing, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM / SEZ DV-Prime Single Wafer Wet Processing is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM / SEZ DV-Prime Equipment Details

SDI ID: 96906
Manufacturer: LAM / SEZ
Model: DV-Prime
Description: Single Wafer Wet Processing
Version: 300 mm
Vintage: 01.06.2012
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 1,780,000 USD
Comments:

DV-PRIME SYSTEM
Equipment Platform: DV-Prime Standard
Wafer Size: 300mm
Are Left/Right Sides Same: No
Process Module Left Section: LS
Process Module Right Section: LS
Packaging Standard Packaging SEMI E137

DV-PRIME PROCESS SECTION LEFT
Chemistries for DVP: DHF NSR

LS Process Module Options
**Chemical Assignment** .
Medium Level 3 dHF
Medium Dispenser Double Side
Filter Preparation No Preparation
Mix System None (premixed)
Medium Level 2 Customized Chemistry
Medium Level 2 details DNH40H AND DI:TMAH
Medium Dispenser Double Side
Dispense Mode Drain & Recirculation
Medium Level 1 dHF
Medium Dispenser Double Side
Dispense Mode Drain & Recirculation
**Process Features** .
Dry Step N2 Dry
Active Jet V5.2 with DIW (simultaneous)
CO2 Injection DI/CO2 Water
Additional Features Automatic Clean
Emergency Rinse, Analog Exhaust Monitoring

**Process Module** .
Chuck Drive Unit Double Side
Chuck Type DS Conductive Chuck PCTFE
Chuck Spin Speed 300-2000rpm
Process Chamber Exhaust Triple Exhaust Air-Vent
Exhaust Switch Level 3 Yes
Exhaust Connector Exhaust Down
Drain Selection Level 3 Facility & Cabinet 1

dHF Chemistry Options
**Chemical Cabinet_1** .
Medium Tank PVDF 40l
Mix System Mix System NSR
Temperature Control 6 kW Inline Heater with Cooler
Filter Preparation Chemlock Filter Housing
Filter Type Intercept HPM 0.05
Process Pump High Flow & Viscosity
Chemistry Options Medium Sample Port
Drain Pump Low Temperature
Cabinet Drain PVDF Drain

Customized Chemistry Options
**Chemical Cabinet_2** .
Medium Tank PFA 40l
Mix System Mix System NSR
Chemical Analyzer External Analyzer Interface
Temperature Control 2x6 kW Inline Heater
Filter Preparation Quick Change CoreVent
Filter Type QuickChangeCoreVent ATM 0.05
Process Pump Pump with Exhaust Ventilation
Chemistry Options Medium Sample Port
Drain Pump Low Temperature
Cabinet Drain PP Drain

DV-PRIME PROCESS SECTION RIGHT
Chemistries for DVP: DHF NSR

LS Process Module Options
**Chemical Assignment** .
Medium Level 3 dHF
Medium Dispenser Double Side
Filter Preparation No Preparation
Mix System None (premixed)
Medium Level 2 Customized Chemistry
Medium Level 2 details DI:NH4OH,SC1
Medium Dispenser Double Side
Dispense Mode Drain & Recirculation
Medium Level 1 dHF
Medium Dispenser Double Side
Dispense Mode Drain & Recirculation
**Process Features** .
Dry Step N2 Dry
Active Jet V5.2 with DIW (simultaneous)
CO2 Injection DI/CO2 Water
Additional Features: Automatic Clean Emergency Rinse Analog Exhaust Monitoring

**Process Module** .
Chuck Drive Unit Double Side
Chuck Type DS Conductive Chuck PCTFE
Chuck Spin Speed 300-2000rpm
Process Chamber Exhaust Triple Exhaust Air-Vent
Exhaust Switch Level 3 Yes
Exhaust Connector Exhaust Down
Drain Selection Level 3 Facility & Cabinet 1

dHF Chemistry Options
**Chemical Cabinet_1** .
Medium Tank PVDF 40l
Mix System Mix System NSR
Temperature Control 6 kW Inline Heater with Cooler
Filter Preparation Chemlock Filter Housing
Filter Type Intercept HPM 0.05
Process Pump High Flow & Viscosity
Chemistry Options Medium Sample Port
Drain Pump Low Temperature
Cabinet Drain PVDF Drain

Customized Chemistry Options
**Chemical Cabinet_2** .
Medium Tank PFA 40l
Mix System Mix System NSR
Chemical Analyzer External Analyzer Interface
Temperature Control 18 kW Inline Heater
Filter Preparation Quick Change CoreVent
Filter Type QuickChangeCoreVent ATM 0.05
Process Pump Pump with Exhaust Ventilation
Chemistry Options Medium Sample Port
Drain Pump Low Temperature
Cabinet Drain PP Drain

Non-Standard Requests (NSR)
SCR140913 FRPP corpus material
SCR140177 Hot DI module
SCR132272 KFPI fire supression system
SCR140446 Drain switch in top level
SCR140447 PSL2 DNH4OH and DI:TMAH (ICHC 2 left for DNH4OH 14:1 to 18:1, 65 C, DI:TMAH 5:1 to 20:1 75-80 C with analyzer and DI and NH4OH spiking)
SCR140448 PSR2 DNH4OH and SC1 (ICHC 2 right for DNH4OH 14:1 to 18:1 65 C, SC1 1:4:130 and 2:3:100, 65 C with analyzer and spiking for DI and NH4OH)
SCR140449 CHC-F DHF 100:1-1200:1 (CHC F for DHF 100:1 to 1200:1 21-25 C for right side top level with anlyzer and capative leak sensor (same floor), double contaiment box)
SCR140661 Implement ASD3+ 0,145 l/min
SCR140662 DHF over ASD3 and AJ arm need
SCR140663 DHF89:10-121:10 29 C ICHC1L (DHF 89:10 to 121:10 at 29 C in ICHC 1 left with analyzer )
SCR140664 DHF5:1-50:1 21-29 C ICHC1R (DHF 5:1 to 50:1 ICHC 1 right 21 to 29 C with analyzer for 5:1 to 20:1)
SCR140665 1:1cut out template&facilitysh (1:1 cut out template and customized facility data sheet for MU and external modules)
SCR140666 Preparation for ASD AT retrofit

DV-PRIME SYSTEM PLATFORM
Number of Loadports & Robots 3 Loadports with 1 Robot
Loadport Type TDK
Carrier ID Reader RF Reader
E84 I/O for OHT Yes
Software Options SEMI E116 OHT Loading in Upper Position
CO2 Generator 2-50 /cm
DI Water Supply 1x8PM - Booster Pump+Press Reg
DIW Filtration System Chemlock Intercept
Power Distribution Box PDB 400V CE
Power Requirements 120 kVA
Transformer 208V-400V
Installation Material PDB Cable Kit 30 Meter
Platform Doors Doors With Windows
System Lighting White Light
Add. Leak Detection Capacitive Sensors (4pcs)
Accessories Service Laptop
Video System Video Display & Recording

DV-PRIME EXTERNAL MODULES
**CBM-B** .
Quantity None (House Supply)
**Chemical Analyzer** .
Analyzer Cabinet No

DV-PRIME SOFTWARE
Medium Exchanger Top-Up Function
Automatic Bath-Exchange

Categories:
Attachments: 5 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us





View all FAB Wet Cleaning and Process Equipment for sale

Search for LAM / SEZ items for sale

Search for DV-Prime items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form