fabsurplus.com




TEL Tokyo Electron TELFORMULA ALD High-K Vertical LPCVD Furnace for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELFORMULA ALD High-K Vertical LPCVD Furnace.
Please click on the "Send More Details" button at the end of the TELFORMULA ALD High-K description, if you'd like to get more details, photos and specifications of this Vertical LPCVD Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELFORMULA ALD High-K Vertical LPCVD Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron TELFORMULA ALD High-K Equipment Details

SDI ID: 96933
Manufacturer: TEL Tokyo Electron
Model: TELFORMULA ALD High-K
Description: Vertical LPCVD Furnace
Version: 300 mm
Vintage: 01.06.2015
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 90,000 USD
Comments:

General Specification:

Safety Specification: SEMI S2-0703

Heater Model: Mid-Temp. VCM-50-012L

Compatible with Atmoshpheric Process: None

Maximum Operating Temperature (C): 300

ART Control: Yes

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 50

Software Version (WAVES): Ver.2.12 R008

Seismic Isolation Configuration: None

 

Furnace:

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: 20m

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarbon: Yes

Chemical PreFilter-Location: FNC Top

Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris / A300

Carrier Stage Capacity: 10

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3

Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

Electric Fan Exhaust Facility Connection: Not Installed

Air Intake Point: Top

Gas Spec, Gas Distribution System

IGS Type: IGS 1.125"W-Seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend (Less than 90deg)

IGS Final Filter: PALL

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC / Digital

IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111

IGS Press. Transducer: Nagano

"Liquid Source Vapor System Maker / Model: For TMA HORIBA STEC / LSC-F530

For ZAC HORIBA STEC / TL-2014"

Auto-Refill System- TMA: Air Lequide / CANDI

Auto Refill System- ZAC: Air Lequide / CANDI

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: OP-500H-RE1

Ozone Delivery System Provider: Provided by customer

Water Vapor Generator (WVG): None

Injector O-ring material: DU353 

Gas Spec, Gas Facilities

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

Exhaust Specification

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

"Main Valve: CKD / Valve: VEC-VH8-X0110

 Controller: VYX-0279-CONT"

Pump Maker/Model: EDWARDS / iXH1820

Pump Provided by: Provided by customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EDWARDS /TPU(Zenith)

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: None

Pump-FNC Vacuum Piping Provide: Customer

Exhaust Pressure Control (AP): N/A

Exhaust Pressure Controller (AP) Maker / Model: N/A

Exhaust Box: Wide Type (1200mmW)

Heating construction for Facility Exhaust: Between Pump and Abatement System

Heating construction for Facility Exhaust provided by: Customer

Exhaust O-ring material: DU353

Power Specification, Power dist System

Voltage 3phase: 400VAC & 200VAC(for Ozonizer)

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

Control Power UPS provided by: None

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A

Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

Other power requirement: None

FNC - Power Box: 30m

FNC - RCU: 30m

Power Box - RCU: 30m

Power Box - Pump Unit: 30m

Power Box - Refill System: 30m

Power Box - WVG CTRL Unit (if used): N/A

Power Box - Abatement System (if used): N/A

Gas Detector Box - FNC (if used): N/A

Gas Detector Box - Power Box (if used): N/A

Option Box - FNC (if used): N/A

Option Box - Power Box (if used): N/A

Interface Specification, Factory Automation System

Host Communications: Comply with GJG

Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)

Ingenio: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

Load Port Operation: Lower + Upper

PIO I/F Location: FNC Top

PIO Provided by: TEL

PIO Maker/Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Lower L/P: Read

CIDRW Upper L/P: Read

CIDRW FIMS: Read/Write

CIDRW Maker/Model: HOKUYO DMS-HB1-Z series

CIDRW Provided by: Customer

CIDRW Tag Orientation: Vertical

EEC (Equipment Engineering Cap: None 

Customized Management Signals: PT/Water

Interface Specification, User Interface

Signal Tower Model: LCE Series

Signal Tower Colors: Red / Blue / Yellow / Green

Signal Tower Location: Front for 10 Stocker (Left)

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Light Curtain: None

Indicator Type: HOKUYO DMS-HB1-Z series

Operator Switch: Operator Access / White Cover with Orange Light

Pressure Display Unit: MPa / Torr

Cabinet Exh Pressure Display: Pa

Warning Label: Chinese/English

Special Label: None 

Categories:
Attachments: 8 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us




Due to heavy demand from our many customers,
SDI-Fabsurplus has decided to better serve an elite selection of our regular customers by offering a Subscription Fee service,
providing a premium level of service in which our customers can opt-in to gain immediate access
and regular weekly updates to the most valuable information about semiconductor equipment available in the worldwide market,
together with prioritised support directly from our sales team via phone, website and e-mail.



View all FAB CVD Furnaces for sale

Search for TEL Tokyo Electron items for sale

Search for TELFORMULA ALD High-K items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form