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Novellus C2 SEQUEL Dual Express System CVD System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus C2 SEQUEL Dual Express System CVD System.
Please click on the "Send More Details" button at the end of the C2 SEQUEL Dual Express System description, if you'd like to get more details, photos and specifications of this CVD System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus C2 SEQUEL Dual Express System CVD System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Novellus C2 SEQUEL Dual Express System Equipment Details

SDI ID: 96999
Manufacturer: Novellus
Model: C2 SEQUEL Dual Express System
Description: CVD System
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 1,100,000 USD
Comments:

Novellus SEQUEL System Configuration

System Controller

Status

Model

Remark

System Controller

OK

P166/64M

 

Signal Tower Type

OK

 

Front Mounte

DLCM

Status

Model

Remark

Module

OK

 

 

Module Controller

OK

P166/64M

 

Cassette Transfer

OK

 

Shuttle Type

TM Robot

OK

Magnatran7

model:003-1600-25

Indexer Robot

OK

Indexer type II

Motor Type (Belt Type)

Animatics

OK

CDP2407-2

 

Arc Bar

OK

 

26 slot

Cassette mapping

OK

 

Auto mapping

10Torr Manometer

OK

750B11TCE2GK

MKS

Convectron

OK

275Mini-Convectron

Granville-Phillips

Throttle Valve Controller

OK

 

Tylan ACX3200

Slit Valve Type

OK

 

L/L VAT/CH# SMC

IOC

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

CVD1

Status

Model

Remark

Module

OK

 

 

RF Match Network

OK

MN3150274-004 B SE

Advanced Energy

View Port Left/Right

OK

 

 

RF Distribution

OK

 

 

Gas Distribution

OK

 

 

Mixbowl Type

OK

 

Not Heated

Shower Head

OK

 

6 shower head

Heater Block

OK

 

 

Process Chamber Ring

OK

 

 

MESC Flang

OK

 

 

Manometer, 1000Torr

OK

627A13TBC

MKS

Manometer, 10Torr

OK

627A11TBC

MKS

Switch, Vacuum, Atmosphere

OK

PV48W-14

UE

Switch, Vacuum, 15Torr

OK

E48W-H14

UE

End Point Detector

OK

VM3200

Intergrated dual wavelength EPD

IOC

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

Controller, Throttle Valve

OK

 

 

Interlock PCB, CVD

OK

02-123072-00RevA

 

Module Controller

OK

P166/64M

 

Water Flow Switch

OK

 

 

Gate Valve, Hi Vac, 4"

OK

 

Heated

Throttle Valve

OK

 

Heated

Spindle Mechanism

OK

 

Ferrofluidic -Bellows Type

Process Chamber 4-line type

OK

 

Vertical Type

Process Chamber exhaust type

OK

 

Vertical Type

Temperature Controller

OK

 

EUROTHERM

Hastings Gauge

OK

 

 

RF Generator &

Included Generator rack

OK

PDX 1400 MF GEN

AE,27-028379-00 F/R C

OK

RFG5500

AE,27-115617-00 F/R A

ILDS(only TEOS)

LFC

NOT

 

 

NOT

 

 

MFC(Aera)

OK

FC-7800CD, 1SLM

SiH4

OK

FC-7800CD, 5SLM

N2

OK

FC-7800CD, 10SLM

He

OK

FC-7800CD, 10SLM

NH3

OK

FC-7800CD, 20SLM

O2

OK

FC-7800CD, 5SLM

C2F6

OK

FC-7800CD, 20SLM

N2O

OK

FC-7800CD, 10SLM

N2

CVD2

Status

Model

Remark

Module

OK

 

 

RF Match Network

OK

MN3150274-004 B SE

Advanced Energy

View Port Left/Right

OK

 

 

RF Distribution

OK

 

 

Gas Distribution

OK

 

 

Mixbowl Type

OK

 

Temperature setting type

Shower Head

OK

 

6 shower head

Heater Block

OK

 

 

Process Chamber Ring

OK

 

 

MESC Flang

OK

 

 

Manometer, 1000Torr

OK

627A13TBC

MKS

Manometer, 10Torr

OK

627A11TBC

MKS

Switch, Vacuum, Atmosphere

OK

PV48W-14

UE

Switch, Vacuum, 15Torr

OK

E48W-H14

UE

End Point Detector

OK

VM3200

Intergrated dual wavelength EPD

IOC

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

OK

27-10157-00

Ver4.1

Controller, Throttle Valve

OK

 

 

Interlock PCB, CVD

OK

02-123072-00RevA

 

Module Controller

OK

P166/64M

 

Water Flow Switch

OK

 

 

Gate Valve, Hi Vac, 4"

OK

 

Heated

Throttle Valve

OK

 

Heated

Spindle Mechanism

OK

 

Ferrofluidic -Bellows Type

Process Chamber 4-line type

OK

 

Vertical Type

Process Chamber exhaust type

OK

 

Vertical Type

Temperature Controller

OK

 

EUROTHERM

Hastings Gauge

OK

 

 

RF Generator &

OK

PDX 1400 MF GEN

AE,27-028379-00 F/R C

Included Generator rack

OK

RFG5500

AE,27-115617-00 F/R A

ILDS(only TEOS)

 

 

 

LFC

 

 

 

MFC(Aera)

OK

FC-7800CD, 1SLM

SiH4

OK

FC-7800CD, 5SLM

N2

OK

FC-7800CD, 10SLM

He

OK

FC-7800CD, 10SLM

NH3

OK

FC-7800CD, 20SLM

O2

OK

FC-7800CD, 5SLM

C2F6

OK

FC-7800CD, 20SLM

N2O

OK

FC-7800CD, 10SLM

N2

SSD

Status

Model

Remark

MSSD

OK

01-132945-00

Included UPS

1)AC208V 3Phase 5 Wire 50HZ 1000KVA

OK

 

 

2)AC208V(CVCF) 1Phase UPS 50HZ 20A

OK

 

 

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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