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Novellus SPEED C2 Concept Two CVD-System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus SPEED C2 Concept Two CVD-System.
Please click on the "Send More Details" button at the end of the SPEED C2 Concept Two description, if you'd like to get more details, photos and specifications of this CVD-System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus SPEED C2 Concept Two CVD-System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Novellus SPEED C2 Concept Two Equipment Details

SDI ID: 97002
Manufacturer: Novellus
Model: SPEED C2 Concept Two
Description: CVD-System
Version: 200 mm
Vintage: 01.06.1998
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Novellus SPEED - General Information

Manufacturer

Model

Serial No.

Vintage

Load port type

Wafer size

Novellus

SPEED

-

1998

None

200mm

System Information

System Controller

Software version

SECS/GEM

Transfer module

-DLCM

-Transfer chamber

-Transfer robot

Process chamber module

-Process chamber

Module Controller

System monitor display

Signal tower

None

N/Confirm

N/Confirm

 

Yes

Yes

None

 

3

None

Yes

None

DLCM

Model

Type

Cassette Transfer

Cassette Mapping

Animatics

ARC Bar

Pressure Gauge

Convectron Gauge

Throttle Valve Controller

Slit Valve

IOC version

C2-DLCM-S

Concept two

Rotze

None

Yes

None

10 Torr Manometer MKS 629B-15894

Granville-Phillips

None

None

Ver4.1 (27-10157-00)

Transfer Chamber Module

Robot type

Indexer Type

None

Type-2

Process Chamber Module

Chamber

Module controller

Process Chamber 4-line type

Process Chamber exhaust type

Spindle Mechanism

Water flow switch

Water temp. controller

RF Match Network

RF Fix Matcher

RF Generator

-HF

-LF

Dome

ESC

ESC flange

Gas Ring

Viewport

Interlock PCB

IOC

End Point Detector

Gate valve

Throttle valve

Throttle valve

Pressure gauge

-10 Torr Manometer

-1000 Torr Manometer

Switch

-Atmosphere

-10 Torr

Hastings Gauge

Ch.A, B, C

Yes (P100)

Vertical type

Vertical type

Ferrofluidic – Bellows type

Yes

Yes (MTM500)

None

None

 

AE RFG5500

COMDEL CLF5000

6 Showerhead

Notch

None

Yes (Nanofill 2)

Yes (Left / Right)

Yes

None

None

Yes (VAT)

None

None

 

MKS

None

 

UE

MKS

None

Gas Box

Manual valve

Pressure gauge

Regulator

Filter

Joint type

ILDS

LFC

MFC type

Gas line (gas name, MFC size)

-Ch.A, B, C

Line

Line

Line

Line

Line

Line

N/Confirm

N/Confirm

N/Confirm

N/Confirm

VCR

None

None

STEC SEC 7440

 

(sccm)

SiH4 200

He 1000

H2 2000

O2

Ar 500

NF3 1000

Pumps Type

LL

TC

Ch.A

Ch.B

Ch.C

None

None

None

None

None

Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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