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Applied Materials Centura 5200 WxZ WCVD 4 chamber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura 5200 WxZ WCVD 4 chamber.
Please click on the "Send More Details" button at the end of the Centura 5200 WxZ description, if you'd like to get more details, photos and specifications of this WCVD 4 chamber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura 5200 WxZ WCVD 4 chamber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Centura 5200 WxZ Equipment Details

SDI ID: 97006
Manufacturer: Applied Materials
Model: Centura 5200 WxZ
Description: WCVD 4 chamber
Version: 200 mm
Vintage: 01.06.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 750,000 USD
Comments:

-deinstalled
-warehoused
-being sold "as is"
-there are a few missing parts as shown in the photos.
-the missing parts are shown also in a list below.
Wafer size: 200 mm
Wafer shape: JMF (Flat)
SMIF IF: No
MF Facilities: Bottom
System Power: 208V / 320A
CHA: WxZ, Process: W Plug
CHB: WxZ, Process: W Plug
CHC: WxZ, Process: W Plug
CHD: WxZ, Process: W Plug
CHE: Multi-slot cooldown
CHF: Orienter
Buffer Robot type: HP
Buffer robot Blade: Metal
S/W Revision: Missing
Hard Drive Type: Missing
Loadlock slit valve o-rings: Viton
Wafer Out of Cassette Sensor: Installed
Cassette Present Sensor: Installed
Umbilical Cables Length: Controller to Mainframe: 60 feet
Wafer Sensor: Standard
EMOs: Push Button
GEM Interface: Yes
Loadlock Type: Narrow Body
CRT: 2
OTF: Yes
Signal Tower: 2
Common service lift: None
SBC Board Version: V452
EMO switch Locations: EMO Rack / Gen Rack/ Main Frame
Pump Controller I/F: Yes
EMO Switch qty: 5 ea
Heater Controller: Yes, 4 ea
Circuit Breaker: Installed in AC Rack
CRT Monitor: qty 2
Light Pen: Qty 2
Transformer: 1K/3K/5KVA
Gas Panel: Seriplex
Laminar Flow Hood: Yes
Buffer Chamber Purge: N2 500 sccm
Buffer Chamber Convectron: Installed
TC Gauge: YES

Remote AC Rack Configuration
VME
1. Synergy SBC V452 qty 1
2. Radisys AMAT 486 PCB (CPU) qty 1
3. SEI PCB (Encoder) qty 1
4. Analog I/O PCB CHA/B/C/D/MF qty 6
5. Digital I/O PCB CHA/B/C/D/MF qty 5
6. M/F Stepper PCB qty 3
7. OMS PCB Missing
8. VGA PCB qty 1
9. Serial Isolator PCB qty 1
10. TC Gauge PCB qty 1
11. FDD Missing
12. HDD Missing
13. Chamber Interlock PCB qty 5
14. M/F Interlock PCB qty 1
15. L/L Interlock PCB qty 1
16. Seriplex Bus PCB qty 1
17. Convectron Gauge PCB qty 1
18. Center Finder PCB: qty 1

Cables Configuration
1. 0140-36171 qty 1
2. 0140-36170 qty 1
3. 0140-36168 qty 4
4. 0140-36112 qty 1
5. 0140-36173 qty 1
6. 0140-36169 qty 1
7. 0150-36511 qty 1
8. 0150-36515 qty 1
9. 0150-36521 qty 1
10. 0150-36510 qty 1
11. 0150-76186 qty 6
12. 0150-10506 qty 2
13. 0150-36509 qty 1
14. 0150-20075 qty 1

Missing Parts List
1. 15VDC POWER SUPPLY QTY 1
2. HDD
3. FDD
4. OMS PCB
5. LLA LED fast wafer mapping
6. LLA LED fast wafer mapping mount
7. LLB LED fast wafer mapping
8. LLB LED fast wafer mapping mount
9. LLA Detector left fast mapping
10. LLB Detector right fast mapping
11. Cover wafer map LED fast wafer qty 2
12. LLA Diff pump flex hose
13. LLA Cassette guide 1
14. LLA Cassette guide 1

Process Chamber Configuration
CHA
Type: WxZ
RF Match Box
RF Generator 1 ATP 15B
Capacitance manometer 1 1 Torr
Capacitance manometer 2 500 Torr
TC Gauge: Teledyne
Isolation V/V Clamp Type (Nor-Cal)
Throttle V/V Type: AMAT 0015-09077
Slit V/V type: AMAT

Process Kit

Pumping Plate: YES
Chuck Plate: CPR
TC iNERFACE: Installed with HTR
Wafer Lift base plate: YES
Wfer Lift Pin: Ceramic
Lift Bellows: YES
Slit Window: YES
Lid Hinge: YES
Isolator: YES
Gas Manifold: YES
Coolant Manifold: YES

Heater Lift Assy: 5 phase motor
Wafer Lift Assy: YES

Gas I/F Type: Seriflex
Solenoid V/V Module: YES
Transducer: YES
Gas Fitting Type: VCR
Air V/V Maker: Fujikin / Swagelok
Exhaust Switch: YES

MFC Configuration
#1 UNIT 8161 N2 5000 sccm
#2 STEC H2 5000 sccm
#3 SAM SiH4 200 sccm
#4 SAM WF6 300 sccm
#5 STEC WF6 200 sccm
#6 STEC NF3 1000 sccm
#7 STEC Ar 3000 sccm
#8 STEC Ar 5000 sccm
#9 STEC H2 2000 sccm


CHB
Type: WxZ
RF Match Box
RF Generator 1 ATP 15B
Capacitance manometer 1 1 Torr
Capacitance manometer 2 500 Torr
TC Gauge: Teledyne
Isolation V/V Clamp Type (Nor-Cal)
Throttle V/V Type: AMAT 0015-09077
Slit V/V type: AMAT

Process Kit

Pumping Plate: YES
Chuck Plate: CPR
TC iNERFACE: Installed with HTR
Wafer Lift base plate: YES
Wfer Lift Pin: Ceramic
Lift Bellows: YES
Slit Window: YES
Lid Hinge: YES
Isolator: YES
Gas Manifold: YES
Coolant Manifold: YES

Heater Lift Assy: 5 phase motor
Wafer Lift Assy: YES

Gas I/F Type: Seriflex
Solenoid V/V Module: YES
Transducer: YES
Gas Fitting Type: VCR
Air V/V Maker: Fujikin / Swagelok
Exhaust Switch: YES

MFC Configuration
#1 STEC N2 5000 sccm
#2 UNIT 8160 H2 5000 sccm
#3 SAM SiH4 200 sccm
#4 SAM WF6 300 sccm
#5 STEC WF6 200 sccm
#6 STEC NF3 1000 sccm
#7 STEC Ar 3000 sccm
#8 UNIT 8160 Ar 3000 sccm
#9 UNIT 8161 H2 3000 sccm

CHC
Type: WxZ
RF Match Box
RF Generator 1 ATP 15B
Capacitance manometer 1 1 Torr
Capacitance manometer 2 500 Torr
TC Gauge: Teledyne
Isolation V/V Clamp Type (Nor-Cal)
Throttle V/V Type: AMAT 0015-09077
Slit V/V type: AMAT

Process Kit

Pumping Plate: YES
Chuck Plate: CPR
TC iNERFACE: Installed with HTR
Wafer Lift base plate: YES
Wfer Lift Pin: Ceramic
Lift Bellows: YES
Slit Window: YES
Lid Hinge: YES
Isolator: YES
Gas Manifold: YES
Coolant Manifold: YES

Heater Lift Assy: 5 phase motor
Wafer Lift Assy: YES

Gas I/F Type: Seriflex
Solenoid V/V Module: YES
Transducer: YES
Gas Fitting Type: VCR
Air V/V Maker: Fujikin / Swagelok
Exhaust Switch: YES

MFC Configuration
#1 STEC N2 5000 sccm
#2 STEC H2 5000 sccm
#3 SAM SiH4 200 sccm
#4 SAM WF6 300 sccm
#5 STEC WF6 200 sccm
#6 STEC NF3 1000 sccm
#7 STEC Ar 3000 sccm
#8 STEC Ar 2000 sccm
#9 STEC H2 5000 sccm

CHD
Type: WxZ
RF Match Box
RF Generator 1 ATP 15B
Capacitance manometer 1 1 Torr
Capacitance manometer 2 500 Torr
TC Gauge: Teledyne
Isolation V/V Clamp Type (Nor-Cal)
Throttle V/V Type: AMAT 0015-09077
Slit V/V type: AMAT

Process Kit

Pumping Plate: YES
Chuck Plate: CPR
TC iNERFACE: Installed with HTR
Wafer Lift base plate: YES
Wfer Lift Pin: Ceramic
Lift Bellows: YES
Slit Window: YES
Lid Hinge: YES
Isolator: YES
Gas Manifold: YES
Coolant Manifold: YES

Heater Lift Assy: 5 phase motor
Wafer Lift Assy: YES

Gas I/F Type: Seriflex
Solenoid V/V Module: YES
Transducer: YES
Gas Fitting Type: VCR
Air V/V Maker: Fujikin / Swagelok
Exhaust Switch: YES

MFC Configuration
#1 UNIT 8161 N2 5000 sccm
#2 UNIT 8160 H2 5000 sccm
#3 SAM SiH4 200 sccm
#4 SAM WF6 300 sccm
#5 STEC WF6 200 sccm
#6 STEC NF3 1000 sccm
#7 STEC Ar 3000 sccm
#8 STEC Ar 2000 sccm
#9 STEC H2 3000 sccm

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Attachments: 45 Files
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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