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Kokusai Quixace II ALD High-k Vertical LPCVD Furnace for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Kokusai Quixace II ALD High-k Vertical LPCVD Furnace.
Please click on the "Send More Details" button at the end of the Quixace II ALD High-k description, if you'd like to get more details, photos and specifications of this Vertical LPCVD Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Kokusai Quixace II ALD High-k Vertical LPCVD Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Kokusai Quixace II ALD High-k Equipment Details

SDI ID: 97660
Manufacturer: Kokusai
Model: Quixace II ALD High-k
Description: Vertical LPCVD Furnace
Version: 300 mm
Vintage: 01.02.2011
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 350,000 USD
Comments:

-Low Pressure process
-4 color signal tower
-Model: DJ-1206VN-DF

Process: NITR
Furnace Unit
Cartridge Heater:D4EX30445-RHC-2
T/C for Heater Control:D4EX15442
T/C for Sub Heater Control:D4EX30655
T/C for Over temperature Protection:D4EX15442
5-P T/C for Cascade Control:D4EX22994-L Type
5-P T/C for Profile Control:OPTION
1-P T/C for Profile Control:D4EX21001-OPTION


Clean Unit

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)


Controller

Main Controller(OU):D4EX35757(CX5000)

Main Operation Unit:TM150-HKT02

Sub Operation Unit:KDSC-2005SUBDISP

Process Module Controller:D4EX43195(PMC5000)

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02


Drive Mechanisms

I/O Shutter

AGV/PGV/OHT Stage

FOUP Loader

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer:Lift Transfer

Variable Wafer Pitch Converter

Boat Elevator

Boat Changer

Furnace Port Shutter

Boat Rotation

Broken Wafer Detector:OPTION

Wafer Transfer Crash Detector:OPTION

Tweezer Pitch check mechanism:OPTION


Gas System

Gas Unit(IGS):SiH2Cl2, NH3, NF3

Tape Heater for gas pipe:SiH2Cl2 Line


Exhaust System

Dry Pump& Mechanical Booster Pump:IH1800-HTX-Made by EDWARDS/Prepared By

User

Diaphragm Sensor (1000Torr):631C13T8FH,Made by MKS

Diaphragm Sensor (2Torr):631C02T8FH,Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA,Made by MKS

ATM SENSOR:"PA830 102G(SENSOR)

, PZ200(DISPLAY)"-"Made by COPAL

Main Valve:VEC-R-V80B0W2-400H,Made by CKD

Exhaust Piping

Exhaust Dilution Line

Reactor Tube Press Leak Line

Back Ground Line:SiH2Cl2, NH3, NF3

Jacket Heater for exhaust pipe:D4EX32782,Made by MKS

Seal Cap Heater :SH-13049-02,Made by SHINWA VANES

Inlet Flange heater:D7EF78958,Made by TOKYO GIKEN

Inlet Port heater:ESH-12965-02,

ESH-12966-01,Made by SHINWA VANES

Cold Trap


Safety

Light Curtain System:SL-C52H, Made by KEYENCE

Gas Detector (NH3 Indicator/Detector):GD-K71D-R(NH3/75PPM), Made by Riken Keiki

Gas Detector (NF3 Indicator/Detector):GD-K77DG(NF3/30PPM), Made by Riken Keiki

Gas Detector

(SIH2CL2 Indicator/Detector): GD-K71D-R

(SIH2CL2/15PPM), Made by Riken Keiki


Other

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMS-HB1-Z, Made by HOKUYO

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER-Made by TOAMEC


N2 Purge Load Lock System

O2 Monitor / Detector:TF-21D201(RX-105063-A),Made by Energy Support

FOUP Opener N2 Purge SYSTEM, Made by Hitachi Kokusai

Loading Area MFC:HM5143B20AR, Made by Tokyo Keiso

Loading Area N2 Purge Line- Made by Hitachi Kokusai

FOUP Opener N2 Purge Line- Made by Hitachi Kokusai



Missing/Damaged Parts List:

None

Categories:
Attachments: 5 Files
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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