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Veeco VCE IBE 350 Ion Beam Etch System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Veeco VCE IBE 350 Ion Beam Etch System.
Please click on the "Send More Details" button at the end of the VCE IBE 350 description, if you'd like to get more details, photos and specifications of this Ion Beam Etch System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Veeco VCE IBE 350 Ion Beam Etch System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Veeco VCE IBE 350 Equipment Details

SDI ID: 98863
Manufacturer: Veeco
Model: VCE IBE 350
Description: Ion Beam Etch System
Version: Inquire
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 500,000 USD
Comments:

Fully refurbished by Veeco, installed and qualified, then powered down after processing only 200 wafers: no chemicals used, clean system, as new.

Deinstalled. Warehoused. Can be inspected by appointment.

Factory Refurbished Ion Beam Etch C-1 System Includes:

Process Module: Nexus® Ion Beam Etch Module (IBE350)

Polished stainless steel chamber including:

One (1) set of chamber liners and shields Two service access doors :

* (1) Source door

* (1) Access door Shu_ered viewport

Control System and SoOware:

New Pen(um based MS Windows control system w/ GUI interface

Tested Power supplies

Tested mo(on control

New Uninterruptable power supply backup for computer control system

Tested System u(lity panel for air, water, N2 and He control

Tested AC power distribu(on system

Tested Distributed I/O architecture

Process Module Vacuum System

Refurbished turbo molecular pump with VAT isola(on valve.

Calibrated MFC

One tested mechanical dry pump

Refurbished Ion Source

Refurbished RIM-350 Source Quartz New Grids

Refurbished PBN

Refurbished Substrate Fixture

Std. Flowcool fixture with clamp, rota(on (3-10 RPM), (lt and theta sweep Backside substrate cooling system

with Veeco patented FlowcoolTM technology

One set new fixture tooling for substrate handling with 150mm tooling

Tested water cooled chiller and by-pass kit

New Mechanical source shu_er

Refurbished Brooks 4 or 5 Sided Front End

Cluster type, 4 or 5-sided central wafer handler

One (1) Tested Vacuum Casse_e Elevator (shared rough pump) Wafer Handler vacuum system:

* One (1) turbo high vac pump

Integrated Op(cal Endpoint Detec(on System

IBE Spares Produc(vity Kit (Shields, Liners and Source Consumables plus Level 1 Cri(cal Spares)

Rapid Start Wafer Program

SUB-TOTAL: C1 IBE SYSTEM

Spare Standard IBE 350 Grid

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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