SDI fabsurplus.com is pleased to announce the availability of the following listed used Veeco VCE IBE 350 Ion Beam Etch System.
Please click on the "Send More Details" button at the end of the VCE IBE 350 description, if you'd like to get more details, photos and specifications of this Ion Beam Etch System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Veeco VCE IBE 350 Ion Beam Etch System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||VCE IBE 350|
|Description:||Ion Beam Etch System|
|Sales Condition:||as is where is|
|Sales Price:||500,000 USD|
Fully refurbished by Veeco, installed and qualified, then powered down after processing only 200 wafers: no chemicals used, clean system, as new.
Deinstalled. Warehoused. Can be inspected by appointment.
Factory Refurbished Ion Beam Etch C-1 System Includes:
Process Module: Nexus® Ion Beam Etch Module (IBE350)
Polished stainless steel chamber including:
One (1) set of chamber liners and shields Two service access doors :
* (1) Source door
* (1) Access door Shu_ered viewport
Control System and SoOware:
New Pen(um based MS Windows control system w/ GUI interface
Tested Power supplies
Tested mo(on control
New Uninterruptable power supply backup for computer control system
Tested System u(lity panel for air, water, N2 and He control
Tested AC power distribu(on system
Tested Distributed I/O architecture
Process Module Vacuum System
Refurbished turbo molecular pump with VAT isola(on valve.
One tested mechanical dry pump
Refurbished Ion Source
Refurbished RIM-350 Source Quartz New Grids
Refurbished Substrate Fixture
Std. Flowcool fixture with clamp, rota(on (3-10 RPM), (lt and theta sweep Backside substrate cooling system
with Veeco patented FlowcoolTM technology
One set new fixture tooling for substrate handling with 150mm tooling
Tested water cooled chiller and by-pass kit
New Mechanical source shu_er
Refurbished Brooks 4 or 5 Sided Front End
Cluster type, 4 or 5-sided central wafer handler
One (1) Tested Vacuum Casse_e Elevator (shared rough pump) Wafer Handler vacuum system:
* One (1) turbo high vac pump
Integrated Op(cal Endpoint Detec(on System
IBE Spares Produc(vity Kit (Shields, Liners and Source Consumables plus Level 1 Cri(cal Spares)
Rapid Start Wafer Program
SUB-TOTAL: C1 IBE SYSTEM
Spare Standard IBE 350 Grid
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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