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LAM Research Rainbow 4520 ENV Oxide Etcher for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM Research Rainbow 4520 ENV Oxide Etcher.
Please click on the "Send More Details" button at the end of the Rainbow 4520 ENV description, if you'd like to get more details, photos and specifications of this Oxide Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM Research Rainbow 4520 ENV Oxide Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM Research Rainbow 4520 ENV Equipment Details

SDI ID: 99056
Manufacturer: LAM Research
Model: Rainbow 4520 ENV
Description: Oxide Etcher
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 190,000 USD
Comments:

Process : Oxide Etch

Water Size : 200 mm

Clamp or ESC : Clamp

Please check pictures below for more information.

Power on video available on request.

Description

Model

Process

Vintage

Serial Number

RainBow 4520

Oxide Etch

 

 

Wafer Size

Clamp or ESC

Softwafe

 

200mm

Clamp

Envision 1.4.6

 

System Configration

  Dimension

Unit Name

W × D x H(mm)

Main Body

1120

X

2010

X

1750

RF unit

560

X

860

X

1100

 Gas Supply

Gas Name

Range

Connection size

Unit

He

1SLM

1/4" VAC male

 

 

MainBody Gas Box

O2

20 sccm

1/4" VAC male

N2

100 sccm

1/4" VAC male

Ar

1 SLM

1/4" VAC male

CF4

400 sccm

1/4" VAC male

CHF3

100 sccm

1/4" VAC male

  Power

Name

Description

Unit

 

Power (AC)

Φ3, 208V, 5wire, 150A, 50/60 Hz

Power Box

Φ3, 208V, 5wire, 30A, 50/60 Hz

Main Body

Φ3, 208V, 5wire, 30A, 50/60 Hz

RF Unit

   PCW

Name

Connection size

Q'ty

Unit

 

PCW

3/8" SWG Male

4EA

Main Body

3/8" SWG Male

2EA

RF Unit

Vacuum

Name

Connection size

Q'ty

Unit

 

VAC

ISO 80

1EA

Main Body(CHAMBER)

NW-60

1EA

Main Body(L/L)

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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