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Varian  E220 Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Varian  E220 Ion Implanter.
Please click on the "Send More Details" button at the end of the E220 description, if you'd like to get more details, photos and specifications of this Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Varian  E220 Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Varian  E220 Equipment Details

SDI ID: 99275
Manufacturer: Varian 
Model: E220
Description: Ion Implanter
Version: 150 mm
Vintage: 01.06.1998
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 490,000 USD
Comments:

SOLD AS IS.

REFURB COULD BE QUOTED AT AN EXTRA COST.

Deinstalled, warehoused.

Signal tower: Front panel

Platen type: M-clamp

Load lock: Left and right

 

Vacuum system:

Ion source chamber        

Beamline chamber        

End station chamber

 

Pumps:

Terminal:

Dry pump

Turbo pump

(3) Controllers

 

E/S Chambers:

Dry pump / Booster pump 

Cryo pump

L/L Turbo pump

 

Make / Model / Class

EDWARDS / QDP80 / Terminal dry

PFEIFFER / TPH 1600 / Source TMP

PFEIFFER / TCP 5000 / Source TMPC

PFEIFFER / TPH 510 / Resol TMP

PFEIFFER / TCP 310 / Resol TMPC

PFEIFFER / TPH 240 / Beamline TMP

PFEIFFER / TCP 121 / Beamline TMPC

CTI / 250F / Endstation C/P

CTI / - / Compressor

VARIAN / CTI100 / Load lock TMP    

VARIAN / CTI100 / Load lock TMPC    

EDWARDS / QMB 250 + QDP 40 / End station dry

 

Gases (HP Type):

AsH3: CGA 577    

PH3: CGA 578    

BF3: CGA 579

Ar (N2): CGA 580 

            

High voltage range:

Extraction power supply: 0 keV - 40 keV

Acceleration power supply: 0 keV - 180 keV

 

Power supplies:

Arc        

Vaporizer        

Source magnet        

Extraction        

Extraction suppression        

Analyzer magnet        

Mirror power supply 

Quadrupole magnet 1        

Quadrupole magnet 2        

Scan generator controller        

Mirror        

Dipole lens magnet        

Acceleration        

Acceleration suppression        

Scan trek power supply        

Isolation transformer assy        

Mirror readback assy: 60 kev         

Filament missing

 

Controllers:

Left arm servo 

Right arm servo 

Vacuum gauge        

Scan faraday        

Platen tilt servo 

Vert lift orienter        

Liner motor amp servo         

Orienter        

Left elevator        

Right elevator        

Dose integrator        

DI Temp monitor        

 

Options:

Beam reducer        

Decel        

Gas box type: HP    

Source type: Bernas

Faraday type: VARIAN 

 

Utilities:

Power supply: 208 VAC, 3-Phase, 5 Wires, 43.2 kVA, 120 FLA                

Air: 100 - 150 PSI    

N2: 40 - 150 PSI                

Cooling water: 60 - 150 PSI

Temperature range: 4°C - 21°C                

Please check pictures below for more information.

Categories:
Attachments: 14 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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