Varian  E220 Ion Implanter for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Varian  E220 Ion Implanter.
Please click on the "Send More Details" button at the end of the E220 description, if you'd like to get more details, photos and specifications of this Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Varian  E220 Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Varian  E220 Equipment Details

SDI ID: 99275
Manufacturer: Varian 
Model: E220
Description: Ion Implanter
Version: 150 mm
Vintage: 01.06.1998
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 490,000 USD



Deinstalled, warehoused.

Signal tower: Front panel

Platen type: M-clamp

Load lock: Left and right


Vacuum system:

Ion source chamber        

Beamline chamber        

End station chamber




Dry pump

Turbo pump

(3) Controllers


E/S Chambers:

Dry pump / Booster pump 

Cryo pump

L/L Turbo pump


Make / Model / Class

EDWARDS / QDP80 / Terminal dry

PFEIFFER / TPH 1600 / Source TMP

PFEIFFER / TCP 5000 / Source TMPC

PFEIFFER / TPH 510 / Resol TMP


PFEIFFER / TPH 240 / Beamline TMP

PFEIFFER / TCP 121 / Beamline TMPC

CTI / 250F / Endstation C/P

CTI / - / Compressor

VARIAN / CTI100 / Load lock TMP    

VARIAN / CTI100 / Load lock TMPC    

EDWARDS / QMB 250 + QDP 40 / End station dry


Gases (HP Type):

AsH3: CGA 577    

PH3: CGA 578    

BF3: CGA 579

Ar (N2): CGA 580 


High voltage range:

Extraction power supply: 0 keV - 40 keV

Acceleration power supply: 0 keV - 180 keV


Power supplies:



Source magnet        


Extraction suppression        

Analyzer magnet        

Mirror power supply 

Quadrupole magnet 1        

Quadrupole magnet 2        

Scan generator controller        


Dipole lens magnet        


Acceleration suppression        

Scan trek power supply        

Isolation transformer assy        

Mirror readback assy: 60 kev         

Filament missing



Left arm servo 

Right arm servo 

Vacuum gauge        

Scan faraday        

Platen tilt servo 

Vert lift orienter        

Liner motor amp servo         


Left elevator        

Right elevator        

Dose integrator        

DI Temp monitor        



Beam reducer        


Gas box type: HP    

Source type: Bernas

Faraday type: VARIAN 



Power supply: 208 VAC, 3-Phase, 5 Wires, 43.2 kVA, 120 FLA                

Air: 100 - 150 PSI    

N2: 40 - 150 PSI                

Cooling water: 60 - 150 PSI

Temperature range: 4°C - 21°C                

Please check pictures below for more information.

Attachments: 14 Files
Send Me More Details about this item.

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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