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6 inch and 8 inch Partial Wafer Fab Line for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used 6 inch and 8 inch Partial Wafer Fab Line.
Please click on the "Send More Details" button at the end of the Partial description, if you'd like to get more details, photos and specifications of this Wafer Fab Line, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This 6 inch and 8 inch Partial Wafer Fab Line is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


6 inch and 8 inch Partial Equipment Details

SDI ID: 99279
Manufacturer: 6 inch and 8 inch
Model: Partial
Description: Wafer Fab Line
Version: 150 mm / 200 MM
Vintage: 01.06.1995
Quantity: 104
Sales Condition: inquire
Lead Time: immediately
Sales Price (each): Inquire
Comments:

-Partial 6 inch and 8 inch line for sale
-All equipments are still installed, but shut down in the cleanroom.
-Inspection is possible  by appointment
-Total 104 line items for sale
-Equipment list: Please refer to the attached excel spreadsheets, also in HTML shown below.

200 mm equipment list:-

 

List # Manufacturer Model Description Qty Version
54 KLA-Tencor 2350 Wafer Inspection 1 200 mm
55 KLA-Tencor 2139 Wafer Inspection 1 200 mm
56 KLA-Tencor AIT-Fusion Wafer Inspection 1 200 mm
57 KLA-Tencor KLA-SCD100 Wafer Inspection 1 200 mm
58 Sumitomo KC-200A Carrier Washer 1 200 mm
59 Sumitomo KC-200A Carrier Washer 1 200 mm
60 DNS VPC-811 Wet Cleaning system 1 200 mm
61 JET US Washing US Washing 1 200 mm
62 SEMITOOL D-SST/AL chestnut Wet cleaning 1 200 mm
63 Canon FPA-5000ES2 KrF scanner 1 200 mm
64 TEL Tokyo Electron ACT-8 KrF photo track 1 200 mm
65 DNS SK 2000 Single block track, Top-ARC 1 200 mm
66 Nikon NSR-S205C KrF scanner 1 200 mm
67 TEL Tokyo Electron ACT-8 ArF photoresist track 1 200 mm
68 Canon FPA-6000AS4 ArF scanner 1 200 mm
69 Sumitomo LEX High energy implanter 1 200 mm
70 AG Associates Heatpulse 8108 RTP 1 200 mm
71 TEL Tokyo Electron Alpha 8S LP-TEOS Vertical Furnace 1 200 mm
72 Applied Materials CENTURA-CxZ CVD System 1 200 mm
73 Ebara EPO 113 CMP System 1 200 mm
74 Ebara Bevel CMP Bevel CMP System 1 200 mm
75 KLA-Tencor OPTI Optiprobe 1 200 mm
76 Ulvac ENTRON 5T PVD System 1 200 mm
77 LAM SABRE Electro-chemical deposition 1 200 mm
78 Applied Materials ENDURA-HP PVD System 1 200 mm
79 Applied Materials ENDURA-HP PVD System 1 200 mm
80 Applied Materials CENTURA-WxZ Tungsten CVD 1 200 mm
81 TEL Tokyo Electron Alpha 8 SE LP-FTP(Cu Anneal) 1 200 mm
82 TEL Tokyo Electron Alpha 8 SE LP-FTP(Cu Anneal) 1 200 mm
83 TEL Tokyo Electron Alpha 8 SE LP-FTP(Sinter) 1 200 mm
84 ?? ?? Wafer sorter 1 200 mm
85 KLA-Tencor P2 Profilometer 1 200 mm
86 IRVINE OPTICAL CO SCS2000 Wafer sorter 1 200 mm
87 Topcon WM-1500 Inspection 1 200 mm
88 ?? ?? Wafer sorter 1 200 mm
89 Applied Materials CENTURA-DxZ CVD System 1 200 mm
90 Canon FPA-5000ES3 KrF scanner 1 200 mm
91 ?? Cup washing(RC300-2) ?? 1 200 mm
92 Nikon AMI-3000 Wafer inspection system 1 200 mm
93 Nikon AMI-3000 Wafer inspection system 1 200 mm
94 Nikon AMI-3000 Wafer inspection system 1 200 mm
95 LAM RST-201 (SP201) Wafer backside cleaning 1 200 mm
96 TEL Tokyo Electron Alpha 8 SE Vertical Furnace 1 200 mm
97 TEL Tokyo Electron Alpha 8 SE Vertical Furnace 1 200 mm
98 TEL Tokyo Electron Alpha 8 SW Vertical Furnace 1 200 mm
99 TEL Tokyo Electron Alpha 8 SW Vertical Furnace 1 200 mm
100   chips-200   1 200 mm
101   chips-200   1 200 mm
102   chips-200   1 200 mm
103 Applied Materials SEM-Vision Cd SEM 1 200 mm
104 Applied Materials SEM-Vision CD SEM 1 200 mm
105 TEL Tokyo Electron TRIAS-SPA CVD System 1 200 mm
106 TEL Tokyo Electron Alpha 8S LHP FTP-SIN 1 200 mm
107 TEL Tokyo Electron Alpha 8S LHP FTP-SIN 1 200 mm
108 LAM RST-201 Wafer backside cleaning 1 200 mm
109 ADVANTEST T6575 Test System 1 200 mm

 

150 mm equipment list:-

 

List # Manufacturer Model Description Qty Version
5 Ulvac ZX1000A W-CVD SELECTIVE 1 150 mm
6 TEL Tokyo Electron TE-5000S Dry Etcher 1 150 mm
7 Shibaura CDE-73H Dry Etcher 1 150 mm
8 Shibaura CDE-74AH Dry Etcher 1 150 mm
9 Applied Materials P-5010 Dry Etcher 1 150 mm
10 Topcon MI-3080 Wafer Inspection 1 150 mm
11 ?? 1300HZ-S OVEN 1 150 mm
12 ?? ?? UV IRRADIATION MACHINE 1 150 mm
13 Applied Materials P-5000 CVD 1 150 mm
14 Applied Materials P-5000 CVD (D-TEOS) 1 150 mm
15 SEMITOOL ST-47 SRD 1 150 mm
16 Canon MPA-600FA Mask Aligner 1 150 mm
17 Ushio UMA-1002-HC UV IRRADIATION MACHINE 1 150 mm
18 TEL Tokyo Electron Mark-2 CLEAN TRACK 1 150 mm
19 Mattson ASPEN ASHER 1 150 mm
20 Ulvac CERAUS Z-1200 PVD 1 150 mm
21 Ulvac CERAUS Z-1101 PVD 1 150 mm
22 Ulvac CERAUS Z-1300 PVD 1 150 mm
23 TEL Tokyo Electron UNITY-65DM Dry Etcher 1 150 mm
24 TEL Tokyo Electron UNITY-64DM Dry Etcher 1 150 mm
25 TEL Tokyo Electron VCF-610S Vertical LP-CVD Furnace 1 150 mm
26 ?? ?? Reticle cleaner 1 150 mm
27 KLA-Tencor Alphastep 500 Wafer measurement 1 150 mm
28 ?? ?? Wafer Inspection System 1 150 mm
29 Ebara EPO-113 CMP 1 150 mm
30 TEL Tokyo Electron TE-5000S Dry Etcher 1 150 mm
31 ?? ?? Transfer device 1 150 mm
32 ?? ?? Transfer device 1 150 mm
33 ?? 1300HZ-S OVEN 1 150 mm
35 Topcon MI-3080 Wafer Inspection 1 150 mm
36 ?? ?? Spin Dryer 1 150 mm
37 Nikon NSR-1755 G7A G-line stepper 1 150 mm
38 Nikon NSR-1755 I7A i-line stepper 1 150 mm
39 TEL Tokyo Electron Mark-5z CLEAN TRACK 1 150 mm
40 Nikon NSR-2005 I11D i-line stepper 1 150 mm
41 Topcon MI-3080 Wafer Inspection 1 150 mm
42 Nikon NSR-2005 I10C i-line stepper 1 150 mm
43 Ebara UFP-2000 Auto plating system 1 150 mm
44 Ebara UFP-2000 Auto plating system 1 150 mm
45 Ulvac MCH-9000 PVD system 1 150 mm
46 Ulvac MCH-9000 PVD system 1 150 mm
47 Kokusai Vi-1000W HEIGHT/WIDTH MEASURING INSTRUMENT 1 150 mm
48 Kokusai Vi-1000WA HEIGHT/WIDTH MEASURING INSTRUMENT 1 150 mm
49 ?? ?? ?? 1 150 mm
50 SEMITOOL ?? ?? 1 150 mm
51 SEMITOOL ?? ?? 1 150 mm
52 SEMITOOL ?? ?? 1 150 mm

 

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