NIKON NSR-S204B KrF Scanner, 248 nm for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used NIKON NSR-S204B KrF Scanner, 248 nm.
Please click on the "Get Quote" button at the end of the NSR-S204B description, if you'd like to get a quotation, photos and specifications of this KrF Scanner, 248 nm, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This NIKON NSR-S204B KrF Scanner, 248 nm is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

NIKON NSR-S204B Equipment Details

SDI ID: 99290
Manufacturer: NIKON
Model: NSR-S204B
Description: KrF Scanner, 248 nm
Version: 200 mm
Vintage: 31.12.2001
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire

-Completely Refurbished

-Includes a power-up demo at our refurbishment centre

-Can be inspected by appointment
Manufacturer's performance specifications:-
Resolution ≦ 150 nm
NA 0.68
Exposure light source KrF excimer laser (248 nm wavelength)
Reduction ratio 1:4
Exposure field 25 × 33 mm
Alignment accuracy
(EGA, |M| + 3σ) ≦ 35 nm

Tool-specific configuration:-

1. Machine model: NSR-S204B
2. Electric source NEMA BOX ForCVCF
3. Chamber Type: ASAHI
Production date: 2000.05
Model: N5Z-A
4. Set Temperature: Chamber 23 Celcius LLTC 23 Celcius
5. Computer Type: DMCC
6. MCSV Ver. S3.50C OCSV S3.50A
7. ROM Versions:
8. HP Laser type:5517DN
9. Laser type: Gigaphoton G20K2-1 KrF 248 nm (REFURBISHMENT OF LASER NOT INCLUDED)
10. Reticle Microscope: Fixed Type
11. Wafer type: Silicon, 6 inch
12. Wafer Stage type: Air Stage
13. Wafer chuck type: Pin Chuck
15. OF Detector Type: Nikon Original
16. Wafer Loader Type: Type 3 OF
17. Wafer Carrier table position: Right / Extra
18. In-Line setup: Yes, Left In Line.
19. Reticle size: 6 inch
20. Alignment setup: FIA: Yes LIA: No
21. Reticle library type: Nikon Type
22. Reticle library size: Main 10 slot, Ext Lib. 10 slots
23. PPD/PD Setup: PPD: Yes, PD: No
24. Rack Position: Right
25. Other Comments: NO MISSING PARTS


Get Quote

Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us

View all FAB Litho Exposure for sale

Search for NIKON items for sale

Search for NSR-S204B items for sale

Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America

SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news

We'd love to get your feedback about our website and our services!
Fill in the Feedback Form