KLA-Tencor AIT 1 Patterned Wafer Defect Inspection Tool for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor AIT 1 Patterned Wafer Defect Inspection Tool.
Please click on the "Send More Details" button at the end of the AIT 1 description, if you'd like to get more details, photos and specifications of this Patterned Wafer Defect Inspection Tool, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor AIT 1 Patterned Wafer Defect Inspection Tool is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

KLA-Tencor AIT 1 Equipment Details

SDI ID: 99417
Manufacturer: KLA-Tencor
Model: AIT 1
Description: Patterned Wafer Defect Inspection Tool
Version: 150 mm-200 mm
Vintage: 01.12.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 75,000 USD
  • Manufactured in December, 1996
  • Three Illumination Channels
    • 3ea TROPEL Doublet Lenses
    • 2ea TROPEL 12X Anamorphic Telescopes
    • 1ea TROPEL Spatial Filter
    • 3ea BERTRAN PMT-10C N-3 High Voltage Power Supplies
  • Single Cassette Loading Platform for up to 200mm Wafers 
  • 200mm(dia.) Wafer Chuck for 150mm & 200mm Wafers
  • AEROTECH High Speed Air Bearing Stage
  • Uniphase 2214R-30SLQRT Argon Ion Laser
  • Uniphase 2144B-30SLQRT Laser Power Supply
  • Olympus Optical Microscope Including:
    • UMPlanFl 10X, 50X & 100X Bright/DarkField; MDPlan 150X Brightfield Objectives
    • Dolan-Jenner Fiber-Lite A-240P/A-240L 150W Fiber Optic Illumination Source
    • SONY Power HAD DXC 950 3CCD Color Camera
  • Equipe Technology ATM-107B Wafer Loading Robot with Dual End Effector
  • Equipe Technology PRE-201 Wafer Prealigner
  • Equipe Technology ESC-212 Robot Controller
  • System Control Computer Including:
    • IOMEGA jaz 1GB Backup Tape Drive, CD-ROM Drive, 3.5” FDD
  • 2ea External Air Cooling Modules
  • Electrical Input: 200-240V, 30A, 1 Ph., 50/60 Hz
  • This tool was maintained by factory trained engineers during its previous use. They decommissioned it, including the installation of a factory shipping kit, prior to crating. Installation is available.

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