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Used and Pre-Owned ALD - Atomic Layer Deposition - Semiconductor Manufacturing Equipment for sale by fabsurplus.com

Please find below a list of used ALD (Atomic Layer Deposition) semiconductor manufacturing equipment for sale by fabsurplus.com . Click on any listed item of used ALD equipment to see further data.Atomic Layer Deposition (ALD) is a technique used in semiconductor device manufacturing to deposit high quality thin films of materials on semiconductor substrates. ALD recently became popular and has been used below the 45 nm node in semiconductor device manufacturing, due to it allows a very precise and uniform deposition of materials at an atomic scale, allowing advanced semiconductor devices with superior performance to be made. There are two types of ALD: Thermal ALD and Plasma Enhanced ALD. Thermal ALD is a binary process with two reactants A and B. The first reactant A is pumped into the ALD chamber. The wafer is processed and then the chemistries are purged. Then, reactant B undergoes the same step. In plasma-enhanced ALD, the reactions are plasma-based, a method used by low-temperature applications. ALD tools can be furnace/batch, single-wafer, and spatial-based.


SDI ID Manufacturer Model Description Version Vintage Q. ty Sales Conditions Lead Time
111499 Aixtron StrataGEM 200 ALD system with 2 process chambers for Hf02 / Al2O3, and TiN 200 mm 01.03.2010 1 as is where is immediately
108142 Applied Materials Olympia ALD 300 mm 1 as is where is
108381 ASM Eagle XP EmerALD ALD (Atomic Layer Deposition) 300 mm 1 as is where is
111352 ASM Eagle XP5 Plasma-enhanced ALD system with 2 chambers for SiO and SIN 300 mm 01.06.2010 1 immediately
109077 Picosun P1000 High Volume ALD system for batch coating of parts Up to 300 mm 01.06.2020 1 as is where is immediately


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