Please find below a list of Used ashing and stripping Equipment for sale by fabsurplus.com - Click on any listed item of Ashing and Stripping Equipment to see further data. In modern semiconductor device production, following the polysilicon etch process, the substrate typically undergoes a plasma ashing step to remove the photoresist (light sensitive coating) from the etched wafer. Using a plasma source, a monatomic (single atom) substance known as a reactive species is generated. Oxygen or fluorine are the most common reactive species. Other gases used can be N2/H2 where the H2 portion is 2%. The reactive species combine with the photoresist making ash which is then removed with a vacuum pump.
SDI ID | Manufacturer | Model | Description | Version | Vintage | Q. ty | Sales Conditions | Lead Time | |
---|---|---|---|---|---|---|---|---|---|
108724 | Alcan Tech/Canon | MAS-8000 | Microwave Ashing System | 200 mm | 1 | as is where is | immediately | ||
91345 | AXCELIS | INTEGRA | ES plasma dry strip system | 300 mm | 1 | as is where is | |||
103517 | AXCELIS | ES3 | Plasma Asher | 300 mm | 1 | as is where is | |||
106639 | AXCELIS | INTEGRA-RS | DRY STRIP | 300 mm | 01.06.2012 | 1 | as is where is | ||
108700 | Axcelis | Fusion ES3 | Asher | 300 MM | 01.02.2001 | 1 | as is where is | immediately | |
108905 | Axcelis | RapidCure 320FC | RPC | 300 mm | 01.12.2005 | 1 | as is where is | immediately | |
111676 | Axcelis | RapidStrip 210ES | Stripper/Asher | 200mm | 1 | as is where is | |||
112130 | Axcelis | Integra | Asher | 300 mm | 01.06.2012 | 1 | as is where is | ||
113034 | AXCELIS | INTEGRA | ES Plasma Dry Strip System | 300 mm | 01.06.2012 | 1 | as is where is | ||
113036 | AXCELIS | INTEGRA-RS | ES Plasma Dry Strip System | 300 mm | 01.06.2012 | 1 | as is where is | ||
113037 | AXCELIS | Fusion 200 MCU | Asher | 200 mm | 1 | as is where is | |||
114251 | Axcelis | RapidStrip 210ES | Stripper/Asher | 200 mm | 0 | as is where is | immediately | ||
113310 | Branson | IPC3000 | an automated etcher/asher equipment | 01.08.2012 | 1 | as is where is | immediately | ||
91348 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 31.05.1998 | 1 | as is where is | |||
91349 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 1 | as is where is | ||||
91351 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 31.05.1998 | 1 | as is where is | |||
113060 | GASONICS | IRIDIA 4800 DL | Stripper / Asher | 200 mm | 01.06.1998 | 1 | as is where is | ||
113061 | GASONICS | IRIDIA 4800 DL | Stripper / Asher | 200 mm | 01.06.1998 | 1 | as is where is | ||
113062 | GASONICS | IRIDIA 4800 DL | Stripper / Asher | 200 mm | 01.06.1998 | 1 | as is where is | ||
113494 | Gasonics | L3300 | Asher | 150 mm | 01.06.1992 | 1 | as is where is | ||
113495 | Gasonics | L3300 | Asher | 150 mm | 01.06.1991 | 1 | as is where is | ||
113496 | Gasonics | L3300 | Asher | 150 mm | 01.06.1992 | 1 | as is where is | ||
113497 | Gasonics | L3300 | Asher | 150 mm | 01.06.1994 | 1 | as is where is | ||
113498 | Gasonics | L3300 | Asher | 150 mm | 01.06.1992 | 1 | as is where is | ||
113499 | Gasonics | L3300 | Asher | 150 mm | 01.06.1992 | 1 | as is where is | ||
113500 | Gasonics | L3510 | Asher | 150 mm | 01.06.1993 | 1 | as is where is | ||
113501 | Gasonics | L3510 | Asher | 150 mm | 01.06.1997 | 1 | as is where is | ||
113502 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113503 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113504 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113505 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113506 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113507 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113508 | Gasonics | L3510 | Asher | 150 mm | 01.06.1995 | 1 | as is where is | ||
113509 | Gasonics | L3510 | Asher | 200 mm | 01.06.1996 | 1 | as is where is | ||
113510 | Gasonics | L3510 | Asher | 150 mm | 01.06.1993 | 1 | as is where is | ||
112224 | Kokusai | RAM-8500ZX | Asher | 200 mm | 01.06.1996 | 1 | as is where is | ||
114130 | Kokusai | Lambda-300LE | Stripper/Asher | 300 mm | 1 | as is where is | |||
114131 | Kokusai | Lambda-300N | Stripper/Asher | 300 mm | 1 | as is where is | |||
113972 | March | PX1000 | Plasma Asher | 300 mm | 1 | inquire | |||
113973 | March | PX500 | Plasma Asher | 150 mm | 1 | inquire | |||
111827 | Matrix | Bobcat 208 | Stripper/Asher | 200mm | 1 | as is where is | |||
113861 | Matrix | 105 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1994 | 1 | as is where is | ||
113862 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1995 | 1 | as is where is | ||
113863 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1995 | 1 | as is where is | ||
113864 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1996 | 1 | as is where is | ||
113865 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1997 | 1 | as is where is | ||
113866 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1997 | 1 | as is where is | ||
113867 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1997 | 1 | as is where is | ||
113868 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1999 | 1 | as is where is | ||
113869 | Matrix | 205 | Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1999 | 1 | as is where is | ||
111830 | Mattson | Aspen III | Stripper/Asher | 300mm | 1 | as is where is | |||
111831 | Mattson | Aspen III | Stripper/Asher | 300mm | 1 | as is where is | |||
111832 | Mattson | Aspen III | Stripper/Asher | 300mm | 1 | as is where is | |||
111833 | Mattson | Aspen III ICP | Stripper/Asher | 300mm | 1 | as is where is | |||
111834 | Mattson | Aspen III ICP | Stripper/Asher | 300mm | 1 | as is where is | |||
111835 | Mattson | Aspen III ICPHT | Stripper/Asher | 300mm | 8 | as is where is | |||
112235 | Mattson | Aspen 2 | Stripper/Asher | 200 mm | 01.06.1994 | 1 | as is where is | ||
112236 | Mattson | Aspen 3 | Stripper/Asher | 300 mm | 01.06.2009 | 1 | as is where is | ||
114140 | Mattson | Suprema | Stripper/Asher | 1 | as is where is | ||||
90146 | NOVELLUS | GAMMA 2100 | asher / PR STRIP | 30.11.2002 | 1 | as is where is | immediately | ||
112266 | Novellus | Gamma2130 | Asher | 300 mm | 01.06.2005 | 1 | as is where is | ||
113983 | Plasmatherm | Odyssey | Asher | 1 | inquire | ||||
91356 | PSC | DES-220-456AVL | ASHER | 200 mm | 1 | as is where is | immediately | ||
98833 | PSK | SUPRA3 | Asher Dry Strip | 300 mm | 31.10.2006 | 1 | as is where is | ||
103548 | PSK | SUPRA3 | Dry Strip | 300 mm | 31.05.2006 | 1 | as is where is | ||
106297 | PSK | SUPRA 3 | Asher - Stripper | 300 mm | 01.06.2013 | 1 | as is where is | immediately | |
108584 | PSK | TERA21 | Asher | 300 mm | 01.05.2006 | 1 | as is where is | immediately | |
108586 | PSK | DAS 2000 | Asher | 200 mm | 01.05.2004 | 1 | as is where is | immediately | |
109564 | PSK | SUPRA III | PHOTORESIST STRIP | 300 mm | 01.05.2006 | 1 | as is where is | immediately | |
112278 | PSK | Supra III | Asher | 300 mm | 01.06.2005 | 1 | as is where is | ||
112279 | PSK | Supra IV | Asher | 300 mm | 01.06.2008 | 1 | as is where is | ||
113119 | PSK | SUPRA IV | Dry strip | 300 mm | 01.06.2007 | 1 | as is where is | ||
113124 | PSK | SUPRA IV | Dry Strip | 300 mm | 1 | as is where is | |||
113125 | PSK | SUPRA IV | Dry Strip | 300 mm | 01.06.2007 | 1 | as is where is | ||
113126 | PSK | SUPRA V | Dry Strip | 300 mm | 01.06.2010 | 1 | as is where is | ||
113127 | PSK | SUPRA3 | Dry Strip | 300 mm | 01.06.2006 | 1 | as is where is | ||
114152 | PSK | Supra IV | Stripper/Asher | 300 mm | 1 | as is where is | |||
114153 | PSK | Supra IV | Stripper/Asher | 300 mm | 1 | as is where is | |||
114154 | PSK | Supra IV | Stripper/Asher | 300 mm | 1 | as is where is | |||
114155 | PSK | SURPA N - Chamber Only | Stripper/Asher | 300 mm | 1 | as is where is | |||
114156 | PSK | SURPA N - Chamber Only | Stripper/Asher | 300 mm | 1 | as is where is | |||
112294 | Shibaura | ICE/μASH300 | Asher | 300 mm | 01.06.2003 | 1 | as is where is | ||
113933 | Tegal | T915 | DRY ETCH Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1994 | 1 | as is where is | ||
113934 | Tegal | T915 | DRY ETCH Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1994 | 1 | as is where is | ||
113935 | Tegal | T915 | DRY ETCH Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1994 | 1 | as is where is | ||
113936 | Tegal | T915 | DRY ETCH Dry Etch Asher \ Photo Resist Strip Stripper | 150 mm | 01.06.1994 | 1 | as is where is | ||
113993 | Tepla | 300 | 300 Plasma Asher | 150 mm | 1 | inquire | |||
113994 | Tepla | 300 | 300 Plasma Asher | 150 mm | 1 | inquire | |||
113995 | Tepla | 300 | 300 Plasma Asher | 150 mm | 1 | inquire | |||
113996 | Tepla | 300 | 300 Plasma Asher | 150 mm | 1 | inquire | |||
113997 | Tepla | 300 | SemiAuto Plasma Asher | 150 mm | 1 | inquire | |||
113998 | Tepla | 600 | Plasma Asher (RF) | 150 mm | 1 | inquire | |||
113999 | Tepla | 300PC | Plasma Asher | 150 mm | 1 | inquire | |||
109604 | Ulvac | Enviro | Downstream Microwave Asher | 1 | inquire |