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TEL Tokyo Electron TRIAS High K Metal CVD and ALD system, NiOx, HfOx process for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TRIAS High K Metal CVD and ALD system, NiOx, HfOx process.
Please click on the "Get Quote" button at the end of the TRIAS description, if you'd like to get a quotation, photos and specifications of this High K Metal CVD and ALD system, NiOx, HfOx process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TRIAS High K Metal CVD and ALD system, NiOx, HfOx process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron TRIAS Equipment Details

SDI ID: 108695
Manufacturer: TEL Tokyo Electron
Model: TRIAS
Description: High K Metal CVD and ALD system, NiOx, HfOx process
Version: 300 MM
Vintage: 01.06.2010
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

TEL Trias XXXHi-K CVD
Weight: 3252 KG
Power I/P: 190-220 VAC 50/60 hz 3 phase 140 A
CE marked
-professionally deinstalled and currently warehoused as per attached photos
-Can be inspected by appointment at the warehouse

CVD System, 12” <45nm process Vintage 2010
2 Chambers: CVD & ALD
Process: NiOx, HfOx
Trias cluster: 2 Loadports
LM: Front end
Main power distribution (MPD)
Transfer module, TM

EX reactor, PM2:
Plasma capability: No
Includes: Ozonizer & H20 Box
2 Touch screens ozonizer

High-k CVD reactor PM4:Thermal based
deposition Transformer box (Hi-K) option elec box:

Manuals & Spare parts included
Machine is in absolute as good as new condition ex R&D facility

PM2: Hafnium Nickel Titanium Vanadium
PM4: Hafnium Nickel Titanium Ruthenium Strontium

-icludes a full set of manuals

-process chamber temperature range: 200C up to 500C

-Vacuum level in the chamber is limited by the capacity of the dry pumps attached. The original dry pump attached to this tool (Not included) was an Edwards iXH1820


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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