VARIAN Viista Plad HVMS (Parts) Plasma Doping Ion Implanter for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used VARIAN Viista Plad HVMS (Parts) Plasma Doping Ion Implanter.
Please click on the "Get Quote" button at the end of the Viista Plad HVMS (Parts) description, if you'd like to get a quotation, photos and specifications of this Plasma Doping Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This VARIAN Viista Plad HVMS (Parts) Plasma Doping Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

VARIAN Viista Plad HVMS (Parts) Equipment Details

SDI ID:	111583
Manufacturer:	VARIAN
Model:	Viista Plad HVMS (Parts)
Description:	Plasma Doping Ion Implanter
Version:	300 mm
Vintage:	01.06.2016
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	-Vintage: Jun 2016 -A used Applied Varian Viista HVMS Plasma Doping Implanter system -Includes the EFEM (Wafer Fab interface) with 4 x FOUP ports and qty 2 identical HVMS chamber modules. -Professionally Deinstalled from the fab and crated. -Currently at the warehouse, where it can be inspected by appointment. -The shipping crates / barrier bags have been opened in order to take the photos attached. -The AMAT/Varian shipping kit/lockdown parts have been applied to the items before they were moved. The plasma doping (PLAD) tool from Applied Materials Varian Semiconductor Equipment consists of an inductively coupled RF ion source and a backside helium-cooled platen with a pulsed negative DC bias to which the wafer is electrostatically clamped. The VIISta HVMS is part of the Plasma Doping Platform of Varian (PLAD) and it is designed for p-type, n-type, and material modification solutions across device types. The following chemicals have been used with the system:- N2 Nitrogen Ar Argon H2 Hydrogen Xe Xenon 30% AsH3 /H2 NF3 IO2 Industrial liquid O2 He helium FC-3283 Fluorinert Parts included:- Item 1 Crated dimensions: 64 in x 115 in x 90 in (H) Applied Varian Viista Plad HVMS Synergy EFEM -Fitted with AMAT/Varian moving kit -Fitted with qty 4 of 300 mm FOUP -Operator interface on right side -Signal tower with Blue-Green-Amber-Red -Safety labels are in Chinese and English -Servo Power Supply -5V/24V Power supply module -Mains distribution units -KVM Switch module -Facility Module -Turbo pump power supply -Set of software DVDs -Robot -Prealigner Item 2 - Process Module 1 Crated Dimensions: 60 in x 64 in x 90 in (H) Applied Varian Viista HVMS Chamber assembly Including the following parts:- Including the following parts:- -Pfeiffer HiPace 1200C Chamber Turbo Pump -Verity end point detector -MKS baratrons -Single Shield Ring P/N E17485760 Rev C -E-Clamp P/N E11352860 Rev C -Universal AC Input A/D I/O Interface qty 16 -OES Computer Unit -Pulse Power Supply Driver Gen 2 Unit (Aux) -Pulse Power Supply Driver Gen 2 Unit (Main) -Process Module General Power Control Unit, 208V 3 Phase -Dual manometer Unit / gas Box Exhaust / Roughing Pump Exhaust -RTD backplane Temperature Monitor Unit -Customer I/F Assembly -RF generator Universal AC Input A/D I/O Interface -Universal AC Input Quad Serial Chassis assembly -Dose Controller Universal AC Input Assembly -MKS Spectrum MSP RF generator -Gas Box assembly Item 3 - Process Module 2 Crated Dimensions: 60 in x 64 in x 90 in (H) Applied Varian Viista HVMS Chamber assembly Including the following parts:- -Pfeiffer HiPace 1200C Chamber Turbo Pump -Verity end point detector -MKS baratrons -Single Shield Ring P/N E17485760 Rev C -E-Clamp P/N E11352860 Rev C -Universal AC Input A/D I/O Interface qty 16 -OES Computer Unit -Pulse Power Supply Driver Gen 2 Unit (Aux) -Pulse Power Supply Driver Gen 2 Unit (Main) -Process Module General Power Control Unit, 208V 3 Phase -Dual manometer Unit / gas Box Exhaust / Roughing Pump Exhaust -RTD backplane Temperature Monitor Unit -Customer I/F Assembly -RF generator Universal AC Input A/D I/O Interface -Universal AC Input Quad Serial Chassis assembly -Dose Controller Universal AC Input Assembly -MKS Spectrum MSP RF generator -Gas Box assembly
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VARIAN Viista Plad HVMS (Parts) Plasma Doping Ion Implanter for Sale

VARIAN Viista Plad HVMS (Parts) Equipment Details

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