SDI fabsurplus.com is pleased to announce the availability of the following listed used SPTS MXP Multiplex ICP ASE HR ICP ETCHER.
Please click on the "Get Quote" button at the end of the MXP Multiplex ICP ASE HR description, if you'd like to get a quotation, photos and specifications of this ICP ETCHER, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SPTS MXP Multiplex ICP ASE HR ICP ETCHER is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 112939 |
|---|---|
| Manufacturer: | SPTS |
| Model: | MXP Multiplex ICP ASE HR |
| Description: | ICP ETCHER |
| Version: | Inquire |
| Vintage: | 01.06.2003 |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | Inquire |
| Sales Price: | Inquire |
| Comments: | De-installed, warehoused. Can be inspected by appointment. Manufacturer Surface Tech Sys Model MXP Multiplex ICP ASE HR Wafer Size Range Minimum 50 mm Maximum 200 mm Set Size 150 mm Process Silicon Etch Bosch Process Loadlock Loadlock Yes/No YES Loadlock Pump Manufacturer & Model Edwards E2M40 High Vacuum Pump Pfeiffer MAG 2000 Roughing Pump Edwards IQMB250 & IQDP80 RF Generator Model ENI/ACG-3B and Advanced Energy RFG 3001 Number of Gas Inputs Four Gas Process Gases SF6, C4F8, O2, Ar Chillers Number of Chillers 1 Chiller #1Manufacturer/Model Huber/Unistat 140W Accessories ICP V2 - Balun coil Mechanical Clamp Helium Backside Cooling Carousel in MkIV MPX - 2 x 150mm wafers 3KW Source 300/30W platen E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2 Other Information Windows 2000 Bosch license Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase. CE Marked YES |
Get Quote |
The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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