Fluoroware HTC 8010 Wafer Box Washer for Sale

-Still installed in the fab 
-The tool was running production, and was shut down in May 2025.
-Set up for Open 6 inch wafer cassette loading
-Can load up to 8 inch cassettes for cleaning.
-Can be inspected by appointment 
The HTC 8010 is an automated, batch mode, surfactant-based peripheral cleaning system. The machine utilizes a pressurized DI water/non-ionic surfactant solution to effectively remove particulate contamination from semiconductor wafer carriers and storage boxes, as well as reticle packages, chip trays, memory disk carriers and shippers, and most other reusable handling products.
This spray cleaning process is followed by a combination air knife/high temperature convection drying process to achieve consistent performance and high throughputs.
Stainless Steel Dual Action Peripheral Cleaning System.
Overall process area Dimensions 40" x 40" x 20".
System has either a external DI Hot water hater or the 7 gal DI Water passivated steel reservoir.
7 gal DI Water passivated steel reservoir.
2 gal surfactant solution (75:1 DI water/surfactant) reservoir.
500 cfm Hot Air Blower

DRY IN / DRY OUT
Cassette types: 150 mm and 200 mm

Control system Electrical: 200-230 VAC /50-60HZ/ 1PH
Heater control system electrical: 380 VAC / 3PH / 50-60HZ

Cleaning Chemicals
Detergent + DIW
Drying method: hot air flow, temp range 35-70 C