KLA Surfscan 6200 Wafer Surface particle Detection for Sale

-Still installed and shut down in the fab 
-Was Fully Operational and Running wafers Up until May 2025
-Set up for Open 6 inch wafer cassette loading 
-Can be inspected by appointment 
-Please refer to the attached photo, showing the tool in it's current condition, still inside the wafer fab.

Convertible to 8 inch wafer size: Yes

The Surfscan 6200 locates, sizes, and counts defects down to 0.09 μm at an 80% capture rate.

The instrument detects, counts, and sizes defects on semiconductor substrate materials.
The instrument uses laser beam scanning for detecting defect contamination and displays
scan results in color-coded wafer maps, histograms, and summaries.

Key features of the instrument are:
• Software applications use Microsoft Windows, allowing data to be presented in
easy-to-understand graphics.
• The instrument uses a single-puck wafer transport mechanism that minimizes
contamination from wafer handling. The standard cassette indexers can handle
wafers from 100 mm to 200 mm. Optional 2-in. and 3-in. configurations are
available.
• Each user can have a unique user name and access code. The system manager can
assign specific privileges to each user.
• Wafer summaries and maps can be stored in the Surfscan 6X00 database. Data in
the database can be reviewed, imported, exported, backed up, and restored. A query
language provides selection of specific database records.