LAM Novellus C1 TF BPSG - SACVD BPSG for Sale

-Still installed in the fab 
-Was running wafers until recently
-Set up for Open 6 inch wafer cassette loading 
-Can be inspected by appointment
-Has been decontaminated and is now shut down.

Novellus concept one
3-Process type: PECVD For : USG / PSG / BPSG
4-Wafer Type: 150 MM With flat
5-Tool info
Showerheads: x6 200mm showerheads
Heater block: 6 stations with notch p/n 19-00154-01
Cooling station: double with process cooling water
Electrical data: 208vac 3 phase

6-RF System
HF RF Generator: AE RFG 5500
LF RF Generator: AE PDX 1400
RF Matching unit: Trazar AMU 2-1V

7-Chamber configuration
Temperature: 400 deg c
Cooling system: Process cooling water
Gate valve: VAT F14-110787/38 Heated
Throttle valve: Heated

8-Gas Box configuration 
Gas A1 N2       MFC N2 5 SLM
Gas A2 SIH4     MFC N2 1 SLM
Gas A3 PH3      MFC N2 2 SLM
Gas A4 B2H6     MFC N2 2 SLM
Gas B1 N2       MFC N2 10 SLM
Gas B2 N2O      MFC N2 20 SLM
Gas B3 C2F6      MFC N2 10 SLM
Gas B4 O2       MFC N2 3 SLM

9-Wafer transport configuration
Wafer size: 150 mm
Notch / Orientation flat Aligner: No
Nomber of slots: 25
SMIF: No
No. of cassettes: 3
Wafer detecting on arm: Yes
Fork type / material: Ceramic spindle

10-System controller
System Controller Type: Pentium 2 PC
Software version: 5.015

Convertible to 8 inch wafer size: Yes