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Nikon NSR-2005i11D I-line Stepper for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Nikon NSR-2005i11D I-line Stepper.
Please click on the "Get Quote" button at the end of the NSR-2005i11D description, if you'd like to get a quotation, photos and specifications of this I-line Stepper, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Nikon NSR-2005i11D I-line Stepper is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Nikon NSR-2005i11D Equipment Details

SDI ID: 113889
Manufacturer: Nikon
Model: NSR-2005i11D
Description: I-line Stepper
Version: 150 mm
Vintage: 01.06.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

NIKON NSR-2005i11D
Step-and-Repeat Exposure System
150 mm wafers with major flat wafer

Resolution≦ 350 nm
NA: 0.63
Exposure light source: i-line (365 nm wavelength)
Reduction ratio: 1:5
Exposure field: 22 mm square to 17.9 (H) × 25.2 (V) mm
Alignment accuracy: (EGA, |M| + 3σ)≦ 70 nm
Alignment system: LSA (standard), FIA (optional), LIA (optional)

-Still installed in the fab 
-Was running wafers until May 2025.
-Still connected to power and facilities
-In idle mode
-Set up for Open 6 inch wafer cassette loading 
-Can be inspected by appointment
-No known missing or defective parts
-See attached photos for details

Control system: VAX Station

Modules
Operation Panel OPD
Retical Loader R.L.
Wafer Loader W.L.
Enviroment Chamber
Lens Controller L.C.

Support equpment
AC power distribution system
Electricity Box
Link to wafer track: Link from Left Side

Get Quote



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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