Nikon NSR-2005i12D I-line Stepper for Sale

-Still installed in the fab 
-The stepper is in warm shutdown, with maintained facility and electricity supplies, with the environmental chamber switched on( in idle mode) 
-Set up for Open 6 inch wafer cassette loading 
-Can be inspected by appointment 
-5 inch reticle size

Performance Specification:

1. Resolution: 0.35μm or less
High resolution, positive resist film of 1.0μm thickness

2. Focus Calibration Repeatability: Within 100nm (3σ)
20 measurements

3. Lens Distortion (including magnification error): Within ± 40nm
37 points / chip

4. Magnification Control: Within ± 15nm
3 measurements of Initial, Heat (180min.) and Cool (240min.)

5. Maximum Exposure Area: Within 31.11mm dia.
22.0mm x 22.0mm to
17.96mm x 25.2mm
(hor.) X (vert.)

6. Reticle Blind Setting Accuracy: + 0.4 to + 0.8mm (on reticle)

7. Exposure Power: 800 mW/cm2 or more 
Measured after a new lamp is installed

8. Integrated Exposure Stability (including integrated exposure matching): 
Within ± 1.0% (50 mJ/cm2 or more)
Within ± 0.5% (at 100mJ/cm2)

9. Illumination Uniformity
Within ± 1.0%
Inside exposure area 5 measurements

-This equipment has a European CE Safety mark certification.