TEL TOKYO ELECTRON Lithius Pro Z-i Multi Block (Resist Coater/Developer) for Sale

-Currently Installed in the factory, and Running Production

-This system will be made available for removal in June 2026

CONFIGURATION:-

·        CAR
·        COT
o  With MACRD Pump
o  Drain – Direct Drain
·        BCT
o  With MACRD Pump
o  Drain - Direct Drain
·        ITC
o  With MACRD Pump
o  Drain - Direct Drain
o  CCSS
·        DEV: PTD
o  DEV Nozzle: MGP
o  Rinse Nozzle: ADR Nozzles
o  FIRM Nozzle
o  CCSS
·        DEV: NTD
o  NTD Nozzle: IDN Nozzle
o  CCSS
·        PIR
o  IDR Nozzle
·        BST2
·        WISD
·        WISeCAM
·        Incoming WISC
·        Chemical Supply
·        IFB -ASML TWINSCAN
·        On Line -GJG
·        Chemical Auto Supply (COT,DEV)
·        T&H Controller : Customer Provided
·        Chemical Filter: Customer Provided
·        Smart Bypass
·        Individual EV
·        Ingenio GL License: OEM support/Buyer
·        Parameter Upload
·        Dispense Line Monitor
·        SAFETY Spec
·        Defect Item (IFF-R/IR/SCS)
·        AFF-R
·        PR Usage Monitoring
·        Double Containment Piping
·        Fixation Bracket
·        Essential Common Spec
·        AC Power Box EFEM Power Option
·        RAC, SMM
·        RF-ID (ICHOR), RCS, PR Usage Monitoring
·        Source Parameter FDC Upload
·        PCS2 Pump, HP AMC Valve, SPO
·        Bevel Rinse
·        BST2 Defense System 2.0
·        BST2 Shower Bath
·        WEE N2 Purge FDC Upload
·        P Chamber N2 Purge Miss-Connection Detection