SDI fabsurplus.com is pleased to announce the availability of the following listed used Axcelis NV-GSD-200E High Current Implanter, 80 kv.
Please click on the "Get Quote" button at the end of the NV-GSD-200E description, if you'd like to get a quotation, photos and specifications of this High Current Implanter, 80 kv, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Axcelis NV-GSD-200E High Current Implanter, 80 kv is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 116433 |
|---|---|
| Manufacturer: | Axcelis |
| Model: | NV-GSD-200E |
| Description: | High Current Implanter, 80 kv |
| Version: | 200 mm |
| Vintage: | 01.06.2000 |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | Inquire |
| Sales Price: | Inquire |
| Comments: | CE-Conformity: Yes Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!! Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Seiko STP A2203 fully refurbed included!! Terminal-Rough-Pump: without (Edwards Config) Endstation Rough-Pump: without (Edwards Config) Wafersize: 200mm Disk-Type: Si-coated Disk fully refurbed included!! Wafer-Cooling: no Disk-Chiller included ! Gasbox: 5-String, 4x Toxic-Low-Pressure String1: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 String3: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 String4: SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 String5: Argon Carriergas; MFC Brooks GF120 10sccm-N2 Disk-Drive: Direct-Drive Dose-Type: Regular Source-Type: ELS4 IHC-Source without Vaporizer Hghvoltage-Transformer: Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation SUN Solaris AXI 3HE Second-Workstation without Software-Version: 6.13.5.1 (no license included) Network: 24port 100MB Ethernet with Cisco Router-Kit Cell-Controller: V6 Type Condition tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024 Availability Immediately. Clean-Room Table on frontside not included Original Lower Machine Front Panels not included (below the Table) Endstation Flowhood not included Disk-Chiller not included modified Plasma-Gun Power-Supply installed If required, tool can be inspected on site |
Get Quote |
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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