TEL Tokyo Electron TELINDY PLUS-I-M1 ALD Batch furnace for SiN process for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELINDY PLUS-I-M1 ALD Batch furnace for SiN process.
Please click on the "Get Quote" button at the end of the TELINDY PLUS-I-M1 description, if you'd like to get a quotation, photos and specifications of this ALD Batch furnace for SiN process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELINDY PLUS-I-M1 ALD Batch furnace for SiN process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

TEL Tokyo Electron TELINDY PLUS-I-M1 Equipment Details

SDI ID:

116484

Manufacturer:

TEL Tokyo Electron

Model:

TELINDY PLUS-I-M1

Description:

ALD Batch furnace for SiN process

Version:

300 MM

Vintage:

01.07.2020

Quantity:

Sales Condition:

as is where is

Lead Time:

immediately

Sales Price:

Inquire

Comments:

-Recently de-installed.
-Can be inspected at the warehouse by appointment.
-The furnace was purchased for a research project, but was only installed, and subsequently, was never used in production.
-125 wafer batch load size
-FTPS(TM) responsive heater type with rapid heating and cooling
-Electrical requirements: 3 Phase, 3 wire, 400 VAC, 50/60 Hz 155.8 kVA
Full Load current: 246.1 A
Amp rating of largest load: 204 A
Machine Main breaker rating: 300 A
AIC of main breaker 45 kA
SCCR 5 kA
CE Safety Marked
Complete machine incl Scrubber and new process kit

Process acceptance data:-

No	Check Item	Description	Test condition	Metrology method	Acceptance specification
1	Particle(0.08u,SP2) (550C, Thickness 200A)	Particle (Total/Area)	Production run Top site		<50 adders(0.08u,base on PM cycle 0.4um) <10 adders（1.00um） =><10 adders (0.08u) Total, within 6 month< 5 adders（1.00um) Area, within 6 month
2	Particle(0.08u,SP2) (550C, Thickness 200A)	Particle (Total/Area)	Production run Center site		<50 adders(0.08u,base on PM cycle 0.4um) <10 adders（1.00um） =><10 adders (0.08u) Total, within 6 month< 5 adders（1.00um) Area, within 6 month
3	Particle(0.08u,SP2) (550C, Thickness 200A)	Particle (Total/Area)	Production run BTM site		<50 adders(0.08u,base on PM cycle 04um) <10 adders（1.00um）
4	Thickness performance	Thickness_Mean	Production run Top site	see below	Target+/-1%
5	Thickness performance	Thickness_Mean	Production run Center site		Target+/-1%
6	Thickness performance	Thickness_Mean	Production run BTM site		Target+/-1%
7	Thickness U% performance	Thickness uniformity(WiW/WtW/RtR）	Production run Top site		WiW/WtW/RtR < 2.0% →WiW1.5%, WtoW,RtoR 1.0%
8	Thickness U% performance	Thickness uniformity(WiW/WtW/RtR）	Production run Center site		WiW/WtW/RtR < 2.0% →WiW1.5%, WtoW,RtoR 1.0%
9	Thickness U% performance	Thickness uniformity(WiW/WtW/RtR）	Production run BTM site		WiW/WtW/RtR < 2.0% →WiW1.5%, WtoW,RtoR 1.0%

Metrology Method:
1. Thickness measurement 49 sites
3mm wafer edge exclusion
2. Continuous 3 Run, 5 monitor wafers/ batch.
3. Thickness Uniformity (WiW/WtW/RtR)
calculated via the formula (Max- Min)/(2*Average)x100 (%)

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Attachments: 4 Files

Filename:
process-specification.xlsx
Size: 6290 bytes
Download

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TEL Tokyo Electron TELINDY PLUS-I-M1 ALD Batch furnace for SiN process for Sale

TEL Tokyo Electron TELINDY PLUS-I-M1 Equipment Details

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