fabsurplus.com




8 inch Partial Wafer Fab Line for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used 8 inch Partial Wafer Fab Line.
Please click on the "Send More Details" button at the end of the Partial description, if you'd like to get more details, photos and specifications of this Wafer Fab Line, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This 8 inch Partial Wafer Fab Line is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


8 inch Partial Equipment Details

SDI ID: 101332
Manufacturer: 8 inch
Model: Partial
Description: Wafer Fab Line
Version: 200 mm
Vintage: 01.06.2001
Quantity: 290
Sales Condition: as is where is
Lead Time: Inquire
Sales Price (each): Inquire
Comments:

-Partial 8 inch line for sale
-Equipment is still installed and still running wafers in production.

-Subject to negotiation, it is expected that tools will be available for removal from the line in 2021
-Inspection is possible by appointment
-Total 290 line items for sale

See attched list in excel and here below.

Price: Please submit best offers

SDI_ID    Manufacturer    Model    Description    Qty    Vintage    Comments
101328    Accretech    UF200    Prober    1    01.07.2002    Still installed and running in the cleanroom.
101329    Accretech    UF200    Prober    1    01.03.2001    Still installed and running in the cleanroom.
101330    Accretech    UF200    Prober    1    01.06.2003    Still installed and running in the cleanroom.
101331    Accretech    UF200    Prober    1    01.06.2003    Still installed and running in the cleanroom.
101162    ADE    9300    Ultrascan wafer inspection system    1    01.01.2001    Still installed and running in the cleanroom.
101048    ANELVA    I-4100SV II SR    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE, 1ch Ashing:
101049    ANELVA    I-4100SV II SR    Dry Etch Co-SiN    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE, 1ch Ashing:
101050    ANELVA    I-4100SV II SR    Dry Etch Poly    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE: 1ch Ashing:
101051    ANELVA    ILD-4100SR    Dry Etch Sidewall    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE, 1ch Ashing:
101052    ANELVA    ILD-4100SR    Dry Etch Sidewall    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE, 1ch Ashing:
101053    ANELVA    ILD-4100SR    Dry Etch SiN    1    01.03.2001    Still installed and running in the cleanroom, 2ch RIE, 1ch Ashing:
101054    Applied Materials    Centura Gigafill    BPSG - SACVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101055    Applied Materials    Centura Gigafill    BPSG - SACVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101056    Applied Materials    Centura HDP    Dry Etch    1    01.05.1996    shut down in the cleanroom, 2ch:SiO2 D/E CH-A/B
101057    Applied Materials    Centura SA-NSG DxZ    SA-NSG(NondopedSilicateGlass) - CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101058    Applied Materials    Centura SA-NSG DxZ    SA-NSG(NondopedSilicateGlass) - CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101059    Applied Materials    Centura Tectra    TiN- CVD    1    01.03.2001    Still installed and running in the cleanroom, 1ch PC, 1ch Ti, 1ch TiN:
101060    Applied Materials    Centura Tectra    TiN- CVD    1    01.03.2001    Still installed and running in the cleanroom, 1ch PC, 1ch Ti, 1ch TiN:
101061    Applied Materials    Centura WxZ    W Tungsten - CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch WxZ: 1ch Orienter: 1ch  cool:
101062    Applied Materials    Centura WxZ    W Tungsten - CVD    1    01.04.2009    Still installed and running in the cleanroom, 2ch WxZ: 1ch Orienter: 1ch  cool:
101063    Applied Materials    Endura    Metal PVD Co    1    01.04.2001    Still installed and running in the cleanroom, 2ch PC, 2ch Co, 1ch Ti:
101064    Applied Materials    Endura    Metal PVD Al    1    01.04.2001    Still installed and running in the cleanroom, 2ch PC, 2ch Al, 2ch Ti:
101065    Applied Materials    Endura    TiN - PVD    1    01.04.2001    Still installed and running in the cleanroom, 2ch PC, 1ch W, 2ch Ti:
101066    Applied Materials    Endura    TiN- CVD    1    01.01.1997    Still installed and running in the cleanroom, 3ch
101067    Applied Materials    Endura    Metal PVD Al    1    01.04.2001    Still installed and running in the cleanroom, 2ch PC, 2ch Al, 1ch Ti:
101068    Applied Materials    Mirra Mesa    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 3 platen, 4 head, scrubber
101069    Applied Materials    Mirra Mesa    CMP W (Tungsten)    1    01.04.2001    Still installed and running in the cleanroom, 3 platen, 4 head, scrubber
101070    Applied Materials    Mirra Mesa    CMP W (Tungsten)    1    01.04.2001    Still installed and running in the cleanroom, 3 platen, 4 head, scrubber
101071    Applied Materials    Mirra Mesa    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 3 platen, 4 head, scrubber
101072    Applied Materials    Radiance Centura    RTA (Rapid thermal anneal)    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101073    Applied Materials    Radiance Centura    RTA (Rapid thermal anneal)    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101074    Applied Materials    SEM Vision cX    SEM Vision (Scanning Electron Microscope)    1    01.01.2001    Still installed and running in the cleanroom.
101075    Applied Materials    Ultima HDP-CVD Centura    FSG (Fluorinated Silicate Glass) - HDP CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101076    Applied Materials    Ultima HDP-CVD Centura    NSG(NondopedSilicateGlass) - HDP CVD    1    01.03.2001    Still installed and running in the cleanroom, 2ch
101077    Applied Materials    Ultima HDP-CVD Centura    NSG(NondopedSilicateGlass) - HDP CVD    1    01.03.2001    Still installed and running in the cleanroom, 2ch
101078    Applied Materials    Ultima HDP-CVD Centura    NSG(NondopedSilicateGlass) - HDP CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101079    Applied Materials    Ultima HDP-CVD Centura    FSG (Fluorinated Silicate Glass) - HDP CVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101080    Applied Materials    XE Plus Centura    RTP (Rapid thermal processing)    1    01.04.2001    Still installed and running in the cleanroom, 3ch
101081    Applied Materials    XE Plus Centura    RTP (Rapid thermal processing)    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101082    Applied Materials    XE Plus Centura    RTO (Rapid thermal oxidation)    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101083    Applied Materials    XE Plus Centura    RTO (Rapid thermal oxidation)    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101091    ASM    EAGLE-10 Trident-3RC    CVD ARL (Anti-Reflective Layer)    1    01.01.2003    Still installed and running in the cleanroom, 3ch
101092    ASM    EAGLE-10 Trident-3RC    CVD ARL (Anti-Reflective Layer)    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101093    ASM    EAGLE-10 Trident-3RC    CVD ARL (Anti-Reflective Layer)    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101094    ASM    EAGLE-10 Trident-3RC    CVD ARL (Anti-Reflective Layer)    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101095    ASM    EAGLE-10 Trident-3RC    TEOS - SACVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101096    ASM    EAGLE-10 Trident-3RC    CVD ARL (Anti-Reflective Layer)    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101097    ASM    EAGLE-10 Trident-3RC    TEOS - SACVD    1    01.03.2001    Still installed and running in the cleanroom, 3ch
101098    AXCELIS    200PCU    UV-BAKE    1    01.05.2001    Still installed and running in the cleanroom, 1ch
98502    Canon    APT-5800    AP CVD    1       
98503    Canon    APT-5800    AP CVD    1       
98504    Canon    APT-5800    AP CVD    1       
98505    Canon    APT-5800    AP CVD    1       
101099    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.01.2001    Still installed and running in the cleanroom.
101100    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.01.2001    Still installed and running in the cleanroom.
101101    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.01.2001    Still installed and running in the cleanroom.
101102    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.01.2001    Still installed and running in the cleanroom.
101103    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.02.2001    Still installed and running in the cleanroom.
101104    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.02.2001    Still installed and running in the cleanroom.
101105    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.03.2001    Still installed and running in the cleanroom.
101106    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.04.2001    Still installed and running in the cleanroom.
101107    Canon    FPA-3000 EX6    248 nm DUV Lithography Exposure System    1    01.12.2002    Still installed and running in the cleanroom.
101108    Canon    FPA-3000 i5    I-line stepper    1    01.01.2001    Still installed and running in the cleanroom.
101109    Canon    FPA-3000 i5    I-line stepper    1    01.01.2001    Still installed and running in the cleanroom.
101110    Canon    FPA-3000 i5    I-line stepper    1    01.01.2001    Still installed and running in the cleanroom.
101111    Canon    FPA-3000 i5    I-line stepper    1    01.02.2001    Still installed and running in the cleanroom.
101112    Canon    FPA-3000 i5    I-line stepper    1    01.03.2001    Still installed and running in the cleanroom.
101113    Canon    FPA-3000 i5    I-line stepper    1    01.04.2001    Still installed and running in the cleanroom.
101114    Canon    FPA-3000 i5    I-line stepper    1    01.04.2001    Still installed and running in the cleanroom.
101115    Canon    FPA-3000 i5    I-line stepper    1    01.04.2001    Still installed and running in the cleanroom.
101116    Canon    FPA-3000 i5    I-line stepper    1    01.10.2002    Still installed and running in the cleanroom.
101117    Canon    FPA-3000 i5+    I-line stepper    1    01.02.2001    Still installed and running in the cleanroom.
101118    Canon    STEAM pulse    RTA (Rapid thermal anneal)    1    01.04.2001    Still installed and running in the cleanroom, 1ch
101121    DAN    SR20    WET Etch Oxide    1    01.05.2008    Still installed and running in the cleanroom, 1ch HF 1ch APM 1ch QDR 1ch  F/R S/D
101122    DNS    CV-3000    C-V measurement    1    01.01.2001    Still installed and running in the cleanroom.
101123    DNS    FC-821L    WET Clean    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101124    DNS    FC-821L    WET Etch Silicon \ Poly    1    01.04.2001    Still installed andshut down in the cleanroom, 2ch
101125    DNS    FC-821L    WET Etch Silicon \ Poly    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101126    DNS    FC-821L    WET Etch Silicon    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101127    DNS    FC-821L    WET Etch Silicon \ Poly    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101128    DNS    FC-821L    WET Etch Silicon \ Poly    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101129    DNS    FC-821L    WET Etch Silicon \ Poly    1    01.02.2003    Still installed and running in the cleanroom, 2ch
101130    DNS    FC-821L    WET Clean    1    01.02.2003    Still installed and running in the cleanroom, 2ch
101131    DNS    MP-2000    WET Etch Silicon    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101132    DNS    MP-2000    WET Etch Silicon    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101133    DNS    MP-2000    WET Etch Metal    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101134    DNS    SC-80BW-AV    Photo Coater (Stand Alone)    1    01.01.2001    Still installed and running in the cleanroom.
101135    DNS    SC-80BW-AV    Photo Coater (Stand Alone)    1    01.12.2002    Still installed and running in the cleanroom.
101136    DNS    SK-80BW-AVQ    Photo Track    1    01.03.2001    Still installed and running in the cleanroom.
101137    DNS    SS-W80-AR    WET Clean Scrubber    1    01.04.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101138    DNS    SS-W80-AR    WET Clean Scrubber    1    01.04.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101139    DNS    SS-W80-AR    WET Clean Scrubber    1    01.02.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101140    DNS    SS-W80-AR    WET Clean Scrubber    1    01.04.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101141    DNS    SS-W80-AR    WET Clean Scrubber    1    01.04.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101142    DNS    SS-W80-AR    WET Clean Scrubber    1    01.04.2001    Still installed and running in the cleanroom, 2ch Surface wet 2ch Back wet  No oven
101143    DNS    WS-820L    WET Etch Nitride    1    01.04.2001    Still installed and running in the cleanroom, 2ch
101084    FSI    Excalibur ISR    Wafer Surface Cleaning System    1    01.08.1994    Still installed and running in the cleanroom, 1ch:HF
101085    FSI    MERCURY    WET Resist Strip    1    01.01.1996    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101086    FSI    MERCURY    WET Resist Strip    1    01.07.1997    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101087    FSI    MERCURY    WET Resist Strip    1    01.04.2001    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101088    FSI    MERCURY    WET Resist Strip    1    01.04.2001    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101089    FSI    MERCURY    WET Resist Strip    1    01.03.2003    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101090    FSI    MERCURY    WET Resist Strip    1    01.03.2003    Still installed and running in the cleanroom, 1ch Bath×1(MAX4 casette)
101144    GSI    Sigma Clean    Wafer ID laser marker    1    01.01.2001    Still installed and running in the cleanroom.
101145    Hitachi    M612A    Dry Etch Amorphous-Si    1    01.03.2001    Still installed and running in the cleanroom, 2ch EC, 2ch AC:
101146    Hitachi    RS-3000    Defect Review Scanning Electron Microscope    1    01.04.2001    Still installed and running in the cleanroom.
101147    Hitachi    S-4700    SEM    1    01.01.2001    Still installed and running in the cleanroom.
101148    Hitachi    S-5000    SEM    1    01.01.2001    Still installed and running in the cleanroom.
101149    Hitachi    S-9220    CD SEM    1    01.12.2000    Still installed and running in the cleanroom.
101150    Hitachi    S-9220    CD SEM    1    01.12.2000    Still installed and running in the cleanroom.
101151    Hitachi    S-9220    CD SEM    1    01.12.2000    Still installed and running in the cleanroom.
101152    Hitachi    S-9220    CD SEM    1    01.01.2001    Still installed and running in the cleanroom.
101153    Hitachi    S-9220    CD SEM    1    01.01.2001    Still installed and running in the cleanroom.
101154    Hitachi    S-9220    CD SEM    1    01.01.2001    Still installed and running in the cleanroom.
101155    Hitachi    S-9220    CD SEM    1    01.10.2002    Still installed and running in the cleanroom.
101156    Hitachi    S-9220    CD SEM    1    01.10.2002    Still installed and running in the cleanroom.
98506    Hitachi    WA200    SEM    1       
101157    KEYSIGHT    4072A    Tester    1    01.02.2001    Still installed and running in the cleanroom.
101158    KEYSIGHT    4072A    Tester    1    01.07.2001    Still installed and running in the cleanroom.
101159    KEYSIGHT    4072A    Tester    1    01.09.2001    Still installed and running in the cleanroom.
101160    KEYSIGHT    4072A    Tester    1    01.06.2003    Still installed and running in the cleanroom.
101161    KEYSIGHT    4072A    Tester    1    01.06.2003    Still installed and running in the cleanroom.
101163    KLA-Tencor    AIT II Fusion    Defect inspection Dark field    1    01.12.2000    Still installed and running in the cleanroom.
101164    KLA-Tencor    ASET-F5x    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101165    KLA-Tencor    ASET-F5x    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101166    KLA-Tencor    eS20    Defect Inspect - Micro inspection    1    01.12.2000    Still installed in the cleanroom. Shut Down.
101167    KLA-Tencor    FLX5400    Stress Measurement    1    01.01.2001    Still installed and running in the cleanroom.
101168    KLA-Tencor    FLX5400    Stress Measurement    1    01.01.2001    Still installed and running in the cleanroom.
101169    KLA-Tencor    2139    Defect ins. (Bright Field)    1    01.01.2001    Still installed and running in the cleanroom.
101170    KLA-Tencor    2139    Defect ins. (Bright Field)    1    01.02.2001    Still installed and running in the cleanroom.
101171    KLA-Tencor    5300    Alignment measurement \ Overlay    1    01.01.2001    Still installed and running in the cleanroom.
101172    KLA-Tencor    5300    Alignment measurement \ Overlay    1    01.01.2001    Still installed and running in the cleanroom.
101173    KLA-Tencor    5300    Alignment measurement \ Overlay    1    01.02.2001    Still installed and running in the cleanroom.
101174    KLA-Tencor    Optiprobe 3290/3290 DUV    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101175    KLA-Tencor    Optiprobe 3290/3290 DUV    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101176    KLA-Tencor    Optiprobe 3290/3290 DUV    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101177    KLA-Tencor    Optiprobe 5240AE    Thickness Measurement    1    01.12.2000    Still installed and running in the cleanroom.
101178    KLA-Tencor    Optiprobe 5240AE    Thickness Measurement    1    01.01.2001    Still installed and running in the cleanroom.
101179    KLA-Tencor    P-11    Surface profiler (Step height measurement)    1    01.01.2001    Still installed and running in the cleanroom.
101180    KLA-Tencor    P-11    Surface profiler (Step height measurement)    1    01.01.2001    Still installed and running in the cleanroom.
101181    KLA-Tencor    RS75    Sheet resistance    1    01.12.2000    Still installed and running in the cleanroom.
101182    KLA-Tencor    RS75    Sheet resistance    1    01.12.2000    Still installed and running in the cleanroom.
101183    KLA-Tencor    RS75    Sheet resistance    1    01.12.2000    Still installed and running in the cleanroom.
101184    KLA-Tencor    RS75    Sheet resistance    1    01.02.2001    Still installed and running in the cleanroom.
101185    KLA-Tencor    SL3UV-URSA    Reticle Defect inspection    1    01.03.2001    Still installed and running in the cleanroom.
101186    KLA-Tencor    Surfscan SP1-TBI    Particles measurement (laser)    1    01.02.2001    Still installed and running in the cleanroom.
101187    KLA-Tencor    Surfscan SP1-TBI    Particles measurement (laser)    1    01.12.2000    Still installed and running in the cleanroom.
101188    KLA-Tencor    Surfscan SP1-TBI    Particles measurement (laser)    1    01.12.2000    Still installed and running in the cleanroom.
101189    KLA-Tencor    Therma-Wave TP500    Implant dose amount inspection    1    01.12.2000    Deinstalled, warehoused, not working condition.
101190    KOKUSAI    DJ-807    Vertical Furnace    1        deinstalled from working condition, in storage. 2ch:HSG M1/M2
101191    KOKUSAI    DJ-807C    Vertical Furnace    1    01.08.2000    Still installed and running in the cleanroom, 2ch:HSG M1/M2
101192    KOKUSAI    DJ-823V    HTO (High Temperature Oxide)    1    01.12.2002    Still installed and running in the cleanroom, Furnace (Batch of 75wfr)
101193    KOKUSAI    DJ-823V    LPCVD Poly-Si    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101194    KOKUSAI    DJ-823V    LPCVD Poly-Si    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101195    KOKUSAI    DJ-823V    LPCVD Poly-Si    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101196    KOKUSAI    DJ-823V    LPCVD Si-Nitride    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101197    KOKUSAI    DJ-823V    LPCVD W    1    01.12.2002    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101198    KOKUSAI    DJ-823V-8BL    LPCVD W    1    01.08.1995    Still installed and running in the cleanroom, Batch of 100wfr
101199    KOKUSAI    DJ-823V-8BL3    LPCVD W    1    01.12.2002    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101200    KOKUSAI    DJ-835V    LPCVD Poly-Si    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101201    KOKUSAI    DJ-853V-8BL    HTO (High Temperature Oxide)    1    01.07.2004    Still installed and running in the cleanroom, Furnace (Batch of 75wfr)
101202    LAM Research    Alliance 9100PTX    Dry Etch Poly-Si    1    01.11.2000    deinstalled from working condition, in the warehouse, 2ch:Via/CW PM1/2
101203    LAM Research    Alliance 9400DFM    Dry Etch Silicon (STI)    1    01.03.2001    Still installed and running in the cleanroom, 2ch DFM, 1ch Ashing:
101204    LAM Research    Alliance 9400DFM    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch DFM, 1ch Ashing:
101205    LAM Research    Alliance 9400PTX    Dry Etch Poly-Si    1    01.03.2001    Still installed and running in the cleanroom, 2ch PTX:
101206    LAM Research    Alliance 9400PTX    Dry Etch Antireflective film    1    01.03.2001    Still installed and running in the cleanroom, 2ch PTX:
101207    LAM Research    Alliance 9600PTX    Dry Etch Metal AL    1    01.03.2001    Still installed and running in the cleanroom, 2ch 9600DPT, 2ch MWS:
101208    LAM Research    CONCEPT TWO    Plasma Silicon Nitride (SiN) - CVD    1    01.03.2001    Still installed and running in the cleanroom, 2M
101209    LAM Research    CONCEPT TWO    Plasma Silicon Nitride (SiN) - CVD    1    01.03.2001    Still installed and running in the cleanroom, 2M
101210    LAM Research    CONCEPT TWO    Plasma Silicon Nitride (SiN) - CVD    1    01.03.2001    Still installed and running in the cleanroom, 2M
101211    LAM Research    Concept-Two Inova    Metal PVD Cu    1    01.04.2001    Still installed and running in the cleanroom, 2ch HCM Ta(N)PVD: 1ch HCM Cu  PVD: 1ch Etch:
101212    LAM Research    Concept-Two Inova    Metal PVD Cu    1    01.04.2001    Still installed and running in the cleanroom, 2ch HCM Ta(N)PVD: 1ch HCM Cu  PVD: 1ch Etch:
101213    LAM Research    Concept-Two Inova    Metal PVD Cu    1    01.01.2003    Still installed and running in the cleanroom, 2ch HCM Ta(N)PVD: 1ch HCM Cu  PVD: 1ch Etch:
101214    LAM Research    Sabre XT    Copper Plating    1    01.04.2001    Still installed and running in the cleanroom, 3cell
101215    LAM Research    Sabre XT    Copper Plating    1    01.04.2003    Still installed and running in the cleanroom, 3sell
101216    LAM Research    TERES    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101217    LAM Research    TERES    CMP Cupper    1        Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101218    LAM Research    TERES    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101219    LAM Research    TERES    CMP Cupper    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101220    LAM Research    TERES    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101221    LAM Research    TERES    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101222    LAM Research    TERES    CMP Cupper    1    01.04.2001    Shut down, in the cleanroom, 2 belt: L,R, 4 head
101223    LAM Research    TERES    CMP Cupper    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101224    LAM Research    TERES    CMP Oxide    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101225    LAM Research    TERES    CMP Cupper    1    01.04.2001    Still installed and running in the cleanroom, 2 belt: L,R, 4 head
101120    Leo Giken    LTA-1000EP    Carrier Lifetime Measurement    1    01.01.2001    Still installed and running in the cleanroom.
98508    Nanometrics    M6100    Film Thickness Measurement    1       
101226    Nikon    NSR-2205EX14D    248 nm DUV Lithography Exposure System    1    01.06.2005    Still installed and running in the cleanroom.
101227    Nissin    EXCEED 2000A    Medium Current Implant    1    01.04.2001    Still installed and running in the cleanroom.
101228    Nissin    EXCEED 2000A    Medium Current Implant    1    01.04.2001    Still installed and running in the cleanroom.
101229    Nissin    EXCEED 2000A    Medium Current Implant    1    01.12.2002    Still installed and running in the cleanroom.
101230    Nissin    EXCEED 2000A    Medium Current Implant    1    01.12.2004    Still installed and running in the cleanroom.
101231    Nissin    EXCEED2000A    Medium Current Implant    1    01.06.2005    Still installed and running in the cleanroom.
101233    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.12.2000    Still installed and running in the cleanroom.
101234    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.12.2000    Still installed and running in the cleanroom.
101235    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.12.2000    Still installed and running in the cleanroom.
101236    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.01.2001    Still installed and running in the cleanroom.
101237    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.01.2001    Still installed and running in the cleanroom.
101238    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.01.2001    Still installed and running in the cleanroom.
101239    Olympus    AL2100    Optical ins (Visual Microscope)    1    01.01.2001    Still installed and running in the cleanroom.
101240    Rigaku    3640    XRD    1    01.12.2000    Still installed and running in the cleanroom.
101241    Rigaku    3640    XRD    1    01.12.2000    Still installed and running in the cleanroom.
101242    SEIKO    SMI2200    Focused Ion Beam (FIB) system    1    01.02.2001    Still installed and running in the cleanroom.
101232    Semitool    SST-100TG    Batch Spray Solvent    1        Still installed and running in the cleanroom, 2ch:Polymer CP-1/2
101243    Semitool    Spectrum 504    Polymer clean Via & Metal    1        Still installed and running in the cleanroom, 2 Modules x 2 Chambers
101244    SEN    NV-GSD-HE    High Energy Implant    1    01.04.2001    Still installed and running in the cleanroom.
101245    SEN    NV-GSD-LE    High Current Implant    1    01.04.2001    Still installed and running in the cleanroom.
101246    SEN    NV-GSD-LE    High Current Implant    1    01.04.2001    Still installed and running in the cleanroom.
101247    SEN    NV-GSD-LE    High Current Implant    1    01.01.2003    Still installed and running in the cleanroom.
101248    SEN    NV-GSD-LE    High Current Implant    1    01.12.2004    Still installed and running in the cleanroom.
101249    SEZ    SEZ203    WET Etch Silicon \ Poly    1    01.04.2001    Still installed and running in the cleanroom.
101250    SEZ    SEZ203    WET Etch Oxide    1    01.04.2001    Still installed and running in the cleanroom.
101251    SEZ    SEZ203    WET Etch Oxide    1    01.04.2001    Still installed and running in the cleanroom.
101252    SEZ    SEZ203    WET Etch Oxide    1    01.12.2002    Still installed and running in the cleanroom.
101253    SEZ    SEZ203    WET Etch Oxide    1    01.12.2002    Still installed and running in the cleanroom.
101254    SEZ    SEZ203    WET Etch Oxide    1    01.02.2006    Still installed and running in the cleanroom.
101255    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.02.2001    Still installed and running in the cleanroom, 2ch
101256    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.12.2002    Still installed and running in the cleanroom, 2ch
101257    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.12.2000    Still installed and running in the cleanroom, 2ch
101258    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.12.2000    Still installed and running in the cleanroom, 2ch
101259    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.01.2001    Still installed and running in the cleanroom, 2ch
101260    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.01.2001    Still installed and running in the cleanroom, 2ch
101261    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.07.2002    Still installed and running in the cleanroom, 2ch
101262    SHIBAURA    ICE 200    Asher \ Photo Resist Strip    1    01.07.2002    Still installed and running in the cleanroom, 2ch
101263    SHIBAURA    μASH8100    Asher \ Photo Resist Strip    1    01.10.2000    Still installed and running in the cleanroom, 2ch
101264    SHIBAURA    μASH8100    Asher \ Photo Resist Strip    1    01.10.2000    Still installed and running in the cleanroom, 2ch
101265    SHIBAURA    μASH8100    Asher \ Photo Resist Strip    1    01.11.2000    Still installed and running in the cleanroom, 2ch
101266    SHIBAURA    μASH8100    Asher \ Photo Resist Strip    1    01.11.2000    Still installed and running in the cleanroom, 2ch
101267    SHIBAURA    μASH8100    Asher \ Photo Resist Strip    1    01.01.2001    Still installed and running in the cleanroom, 2ch
101268    SPEED FAM    CMP-2    Cmp polisher system    1        Still installed and running in the cleanroom, 2head/1platen X2, has some  missing parts
101269    TECHNOS    TREX630    TXRF    1    01.12.2000    Still installed and running in the cleanroom.
101270    TECHNOS    TVD900    VD – ICP MS    1    01.05.2003    Still installed and running in the cleanroom.
101271    TEL Tokyo Electron    Alpha-808SC    VERTICAL FURNACE    1    01.08.1996    Still installed and running in the cleanroom, Batch of 150wfr
101272    TEL Tokyo Electron    Alpha-8SE    LPCVD SiN    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101273    TEL Tokyo Electron    Alpha-8SE    LPCVD SiN    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101274    TEL Tokyo Electron    Alpha-8SE    LPCVD CoSi-Nitride    1    01.04.2001    In the warehouse, wrapped in storage. Furnace (Batch of 100wfr)
101275    TEL Tokyo Electron    Alpha-8SE-Z    Vertical Furnace    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101276    TEL Tokyo Electron    Alpha-8SE-ZAAFS    Diffusion Oxide    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101277    TEL Tokyo Electron    Alpha-8SE-ZAFS    Anneal    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101278    TEL Tokyo Electron    Alpha-8SE-ZAFS    Diffusion Oxide    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101279    TEL Tokyo Electron    Alpha-8SE-ZANRS    Anneal H2    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101280    TEL Tokyo Electron    Alpha-8SE-ZANRS    Anneal H2    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101281    TEL Tokyo Electron    Alpha-8SE-ZANRS    Anneal Cu    1    01.01.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101282    TEL Tokyo Electron    Alpha-8SE-ZANRS    Anneal Cu    1    01.01.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101283    TEL Tokyo Electron    Alpha-8SE-ZANRS    Anneal Cu    1        Still installed and running in the cleanroom.
101284    TEL Tokyo Electron    Alpha-8SE-ZAR    Vertical Furnace    1        Still installed and running in the cleanroom, Batch of 150wfr
101285    TEL Tokyo Electron    Alpha-8SE-ZAS    Anneal Oxide    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 125wfr)
101286    TEL Tokyo Electron    Alpha-8SE-ZAS    Anneal Argon    1    01.03.2001    Still installed and running in the cleanroom, Furnace (Batch of 125wfr)
101287    TEL Tokyo Electron    Alpha-8SE-ZVANS    LPCVD TEOS    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 100wfr)
101288    TEL Tokyo Electron    Alpha-8SE-ZVANS    LPCVD W-SiN    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101289    TEL Tokyo Electron    Alpha-8SE-ZVNS    LPCVD SiN    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101290    TEL Tokyo Electron    Alpha-8SE-ZVS    LPCVD TEOS    1    01.04.2001    Still installed and running in the cleanroom, Furnace (Batch of 150wfr)
101291    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.01.2001    Still installed and running in the cleanroom.
101292    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.01.2001    Still installed and running in the cleanroom.
101293    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.02.2001    Still installed and running in the cleanroom.
101294    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101295    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101296    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.04.2001    Still installed and running in the cleanroom.
101297    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.04.2001    Still installed and running in the cleanroom.
101298    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.04.2001    Still installed and running in the cleanroom.
101299    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.10.2002    Still installed and running in the cleanroom.
101300    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.12.2000    Still installed and running in the cleanroom.
101301    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.12.2000    Still installed and running in the cleanroom.
101302    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.01.2001    Still installed and running in the cleanroom.
101303    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.01.2001    Still installed and running in the cleanroom.
101304    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101305    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101306    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101307    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.03.2001    Still installed and running in the cleanroom.
101308    TEL Tokyo Electron    ACT 8    Photoresist coater and Developer    1    01.05.2001    Still installed and running in the cleanroom.
101309    TEL Tokyo Electron    MB2-720    W-Si - CVD    1    01.07.2015    Still installed and running in the cleanroom, 3ch
101310    TEL Tokyo Electron    P-8XL    Prober    1    01.10.2002    Still installed and running in the cleanroom.
101311    TEL Tokyo Electron    PR200Z    WET Etch Poly    1    01.04.2001    Still installed and running in the cleanroom, 1ch
101312    TEL Tokyo Electron    PR200Z    WET Etch Poly    1    01.12.2002    Still installed and running in the cleanroom, 1ch
101313    TEL Tokyo Electron    PR200Z    WET Etch Poly    1    01.12.2002    Still installed and running in the cleanroom, 1ch
101314    TEL Tokyo Electron    TE8500    Dry Etch TiN    1    01.12.1996    Still installed and running in the cleanroom, 1ch:REB
101315    TEL Tokyo Electron    TE8500    Dry Etch    1    01.05.1997    De-installed from working condition, crated, in the warehouse, 1ch:EB
101316    TEL Tokyo Electron    TE8500    Dry Etch    1    01.05.1997    De-installed from working condition, crated, in the warehouse, 1ch:EB
101317    TEL Tokyo Electron    Trias-SPA    Plasma Nitride    1    01.01.2003    Still installed and running in the cleanroom, 1ch
101318    TEL Tokyo Electron    Unity II e855DD    Dry Etch SiO2    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101319    TEL Tokyo Electron    Unity II e855DD    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101320    TEL Tokyo Electron    Unity II e855DD    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101321    TEL Tokyo Electron    Unity II e855DD    Dry Etch Asher \ Photo Resist Strip    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101322    TEL Tokyo Electron    Unity II e855DD    Dry Etch Tantal Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch DRM:
101323    TEL Tokyo Electron    Unity II e855DD    Dry Etch SiN    1    01.03.2001    Still installed and running in the cleanroom, 2ch DRM:
101324    TEL Tokyo Electron    Unity II e855DD    Dry Etch SiO2    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101325    TEL Tokyo Electron    Unity II e855DD    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101326    TEL Tokyo Electron    UNITY SCCM    Dry Etch Metal AL    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101327    TEL Tokyo Electron    UNITY SCCM    Dry Etch Oxide    1    01.03.2001    Still installed and running in the cleanroom, 2ch SCCM:
101119    Varian    spectrAA-880z    Flame atomic absorption spectrometer (AAS)    1    01.12.2000    Still installed and running in the cleanroom.

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