SDI fabsurplus.com is pleased to announce the availability of the following listed used Aviza RVP-300 Vertical Furnace Atmospheric Oxide Anneal Process.
Please click on the "Get Quote" button at the end of the RVP-300 description, if you'd like to get a quotation, photos and specifications of this Vertical Furnace Atmospheric Oxide Anneal Process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Aviza RVP-300 Vertical Furnace Atmospheric Oxide Anneal Process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Vertical Furnace Atmospheric Oxide Anneal Process|
|Sales Condition:||as is where is|
System, General SpecificationHeater element Model: FURNACE,ATM –APLProcess Condition: APMaximum Operating Temperature: 1200cN2 Load Lock: YesWafer Type: 300 SEMI STD-NotchQty. of Production Wafers: 120 slots LadderBoat Operation: 2 Boat TypeSoftware Version: AVP 2.7.1 VSystem, FurnaceLoading Area Light: WhiteForce Air Cooling system: installedSide Maintenance: NoneO2 Density control: 0-100ppmN2 Boat shower wafer cooling: NoneFurnace Temperature Controller: SSPC controlSystem, Wafer/Carrier HandlingCarrier Type: 12" FOUPCarrier Stage Capacity: 16 FOUPWTU Type: GenMarkWTU alignment: GenMarkWTU Teaching method: Pre-aligner / dual beamSystem, Gas DistributionIGS Maker / Type: Fujikin- NoneIGS MFC Maker / Type: AERA- NoneIGS Press Transducer Maker / Type: Mykrolis- NoneSystem, Exhaust SpecificationVacuum Gage - 2 torr: AP tool - NoneVacuum Gage - 10 torr: AP tool - NoneVacuum Gage - 100 torr: AP tool – NoneVacuum Gage - 1000 torr: AP tool – NoneMain Valve: AP tool – NonePump Maker/Model: AP tool – NoneLow vacuum valve: AP tool – NoneTrap: AP tool – NoneVacuum Pressure Controller: AP tool – NoneSystem, ReactorProcess Tube (LP): NoneOuter/Inner Tube Material (LP): NoneInner Tube Type (AP): Quartz SingleInner T/C: 12FT/HONEYWELLBoat Materail/Type: SicBoat Rotation: NonePedestal Materail/Type: QuartzAuto Shutter: installedSystem, Power DistributionVoltage 3phase: 480VACVoltage Single-phase: NoneFrequency: 60HzSystem, User Interface:Operation Panel: Keyboard & ScreenIndicator Type: MouseOperation software type: LinuxGas Leak DetectorGas Leak Detector Materail/Type: GasTechSystem, Fixture List, GasIGS maintenance Fixture: NoneVacuum Gauge: oneMissing/Damaged Parts List
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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