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TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace.
Please click on the "Send More Details" button at the end of the TELFORMULA ALD High-K description, if you'd like to get more details, photos and specifications of this Vertical Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron TELFORMULA ALD High-K Equipment Details

SDI ID: 102813
Manufacturer: TEL Tokyo Electron
Model: TELFORMULA ALD High-K
Description: Vertical Furnace
Version: 300 mm
Vintage: 01.06.2015
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Installed - In Production 2.2- General SpecificationSafety Specification - S2-0703 - PartQty1Heater Model - Mid-Temp. VCM-50-012L - PartQty1Compatible with Atmoshpheric Process - None - PartQty0Maximum Operating Temperature (C) - 300 - PartQty1ART Control - Yes - PartQty1"N2 Load Lock - Yes - PartQty1"Wafer Type - 300mm-Si SEMI STD-Notch - PartQty1"Qty. of Production Wafers - 50 - PartQty1"Software Version (WAVES) - Ver.2.12 R006 - PartQty1"Seismic Isolation Configuration - None - PartQty0"3.1.1- Furnace Spec, FurnaceDewpoint Meter for N2 LL - None - PartQty0"Loading Area Light - White (LED) - PartQty1"RCU Duct Length FNC - RCU - 20m - PartQty0"Ionizer (maker/model) - None - PartQty0"Chemical PreFilter-Acid - None - PartQty0"Chemical PreFilter-Alkali - None - PartQty0"Chemical PreFilter-Hydrocarbon - Yes - PartQty0"Chemical PreFilter-Location - FNC Top - PartQty0"Side Maintenance - None - PartQty0"3.1.2- Furnace Spec, Wafer/Carrier HandlingCarrier Type - FOUP/25slots, SEMI STD - PartQty1"FOUP Maker/Model - Entegris / A300 - PartQty1"Carrier Stage Capacity - 10 - PartQty1"Info Pad A,B - Pin - PartQty0"Info Pad C,D - Pin - PartQty0"Fork Material - Al2O3 - PartQty1"3.1.3- Furnace Spec, Furnace FacilitiesFurnace Exhaust Connection Point - Top Connection - PartQty1"Cooling Water Connection Point - Bottom Connection - PartQty1"Electric Fan Exhaust Facility Connection - Not Installed - PartQty0"Air Intake Point - Top - PartQty1"3.2.1- Gas Spec, �Gas Distribution SystemIGS Type - IGS 1.5""W-Seal rail-mount - PartQty1"IGS Maker - Fujikin - PartQty1"Tubing Bends - Bend (Less than 90deg) - PartQty1"IGS Final Filter - N2 50L line:Entegris(Ni), The other N2 line and Process gas line:PALL(SUS) - PartQty1"IGS Regulator - CKD - PartQty1"IGS MFC (Maker/Type) - HORIBA STEC / Digital - PartQty1"IGS MFC for low flow N2 purge when cleaning - HORIBA STEC / SEC-G111 - PartQty1"IGS Press. Transducer - Nagano - PartQty1"Liquid Source Vapor System Maker / Model - For TMA HORIBA STEC / LSC-F530For ZAC(OCTANE) �STEC / TL-2013 - PartQty1"Auto-Refill System- TMA - Air Liquid / CANDI - PartQty1 - Model : CALEN - Japan Air Gases"Auto Refill System- ZAC - Air Liquid / CANDI - PartQty1 - Model : AQUARIUS - Japan Air Gases"Ozone Delivery System - Toshiba Mitsubishi / OP-500H-RE1 - PartQty1"Water Vapor Generator (WVG) - None - PartQty0"3.2.2- Gas Spec, �Gas FacilitiesIncoming Gas Connection Point - Bottom Connection - PartQty1"Gas VENT Connection Point - Bottom Connection - PartQty1"Exhaust VENT Connection Point - Bottom Connection - PartQty1"Gas Unit Exh Connection Point - Bottom Connection - PartQty1"3.3.1- Exhaust SpecificationbutionVacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - PartQty1"Vacuum Gage - Press Monitor (133kPa) - MKS (Hot) Capacitance Manometer - PartQty1"Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - PartQty1"Main Valve - CKD-VEC 3"" - PartQty1"Pump Maker/Model - EDWARDS / iXH1820 - PartQty1"Abatement System Type - Burning Type - PartQty1"Abatement System (Maker/Model) - EDWARDS / Atlas-TPU2 - PartQty1"N2 Dilution Unit Provided by - No NDU - PartQty0"Pump Control Unit Setting Location - None - PartQty1"3.3.1- Exhaust SpecificationExhaust Pressure Control (AP) - N/A - PartQty0"Exhaust Pressure Controller (AP) Maker / Model - N/A - PartQty0"Exhaust Box - Wide Type (1200mmW) - PartQty1"3.4.1- Reactor SpecificationQuartz Material Requirement - Electric Fused - PartQty0"Quartz Vendor Requirement - None - PartQty0"Quartz Stamp - None - PartQty0"Boat Type - 61 slots Ladder - PartQty0"Cap Type - Quartz - PartQty1"Cap Heater - Yes - PartQty1"Switch Valve for Cap Cooling Water - None - PartQty1"Cooling Water for Cap Rotation - Yes - PartQty1"Heat Shield Type - HS Plate - PartQty1"Heat Shield Plate Provided by - TEL - PartQty0"3.5.1- Power Specification, Power dist SystemVoltage 3phase - 480VAC - 200VAC is Ozonizer power - PartQty1"3phase connection type - Star Connection - PartQty1"Voltage Single-phase - 200VAC - 200VAC is Ozonizer power - PartQty0"Single-phase connection type - N/A - PartQty0"Frequency - 60Hz - PartQty1"Wattmeter - None - PartQty0"Control Power UPS provided by - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Control Power UPS type - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"UPS Input/Output Voltage - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"3.5.2- Power Specification, Cable LengthPower Cable Input Entrance Loc - Power Box Top - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Other power requirement - None - PartQty0"FNC - Power Box - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"FNC - RCU - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Power Box - Pump Unit - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Power Box - Refill System - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Power Box - WVG CTRL Unit (if used) - N/A - PartQty0"Power Box - Abatement System (if used) - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"Gas Detector Box - FNC (if used) - N/A - PartQty0"Gas Detector Box - Power Box (if used) - N/A - PartQty0"Option Box - FNC (if used) - N/A - PartQty0"Option Box - Power Box (if used) - N/A - PartQty0"Power Box - Ozonizer - 20m - PartQty1"Ozonizer control rack - Ozonizer - 20m - PartQty1"Ozonizer control rack - Power Box - 20m - PartQty1"Ozonizer conrol rack - RCU - 20m - PartQty1"Ozonizer control rack - Floor Box - 20m - PartQty1"3.6.1- Interface Specification, Factory Automation SystemHost Communications - Comply with GJG - PartQty1"Equipment Host I/F Connection - Power Box Top HSMS (10Base-T/100Base-TX) - OPT: Ordering Fab to verify �connection point as follows: �QTY=1 is Top connection, QTY=2 is Bottom connection, �Default = 1, and note any special requirements within the PO. - PartQty1"Ingenio - Yes - OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded - PartQty1"OHT Capability - Yes - PartQty1"AGV Capability - None - PartQty1"RGV Capability - None - PartQty0"PGV Capability - None - PartQty0"Load Port Operation - Lower + Upper - PartQty1"PIO I/F Location - FNC Top - PartQty1"3.6.1- Interface Specification, FactoryPIO Provided by - TEL - PartQty0"PIO Maker/Model - Hokuyo / DMS-HB1-Z - PartQty0"Carrier ID Reader Writer Type - RF - PartQty1"CIDRW Lower L/P - Read - PartQty1"CIDRW Upper L/P - Read - PartQty1"CIDRW FIMS - Read/Write - PartQty1"CIDRW Maker/Model - HOKUYO DMS-HB1-Z series (Head-On) - OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.Read/Write QTY= 2.�Default = 1 . Note any special requirements within the PO. - PartQty0"CIDRW Provided by - TEL - PartQty0"CIDRW Tag Orientation - Vertical - PartQty0"EEC (Equipment Engineering Cap - Interface A - OPT: Ordering Fab must specify if FDC is included or not, Include = QTY=1, �Set QTY= 0 if excluded.Default = 1 - PartQty0"Customized Management Signals - PT / WATER - PartQty0"3.6.2- Interface Specification, User InterfaceSignal Tower Model - LCE Series - PartQty1"Signal Tower Colors - RED / BLUE / YELLOW GREEN - OPT: Ordering Fab to verify signal tower as follows: �QTY=1 is Red/Yellow/Green Defualt = 1 and note any special requirements within the PO. - PartQty1"Signal Tower Location - Front for 10 Stocker (Left) - PartQty1"Front Operation Panel - Yes - PartQty1"MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - PartQty1"Light Curtain - None - PartQty1"Indicator Type - Selete - PartQty1"Operator Switch - Operator Access / White Cover with Orange Light - PartQty1"Pressure Display Unit - MPa / Torr - PartQty1"Cabinet Exh Pressure Display - Pa - PartQty1"Warning Label - Traditional Chinese / English(first priority) - PartQty1"3.7.1- Other Specification, Unit LocationFurnace (Exh/Box,Gas/Box inclu - Main-Fab - PartQty1"Power Box - Sub-Fab - PartQty1"Pump - Sub-Fab - PartQty1"RCU - Sub-Fab - PartQty0"Step Up Transformer - N/A - PartQty0"Step Down Transformer - N/A - PartQty0"Ozone Delivery System - Sub-Fab - PartQty1"WVG Controller - N/A - PartQty0"Auto-Refill System - Sub-Fab - PartQty1"UPS - None - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"Gas Detector Box - G/Box and Scaverger- PartQty0"Other Unit Location - N/A - PartQty0"3.7.2 - �Other Specification, Gas Leak DetectorGas Leak Detector - YES - PartQty1"Gas Leak Detector Provided By - TEL - OPT: Ordering Fab must verify if Supplier is to provide, �if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO. - PartQty0"Gas Leak Detector Maker - Maker: RikenUse gas/Detector type:�O3 / GD-K77D-A O3 ZAC / GD-K7D-A (C2H5)2NH OCTANE / GD-K77D-A OCTANE - OPT: Ordering Fab must verify if Supplier is to provide, �if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO. - PartQty0"Detected Gas 1 / Location - Detected Gas 1 / Location - Gas box - PartQty1"Detected Gas 2 / Location - Detected Gas 2 / Location - Gas box - PartQty1"Detected Gas 3 / Location - Detected Gas 3 / Location - N/A - PartQty0"Detected Gas 4 / Location - Detected Gas 4 / Location - Gas box - PartQty1"Detected Gas 5 / Location - Detected Gas 5 / Location - N/A - PartQty0"Detected Gas 6 / Location - Detected Gas 6 / Location - N/A - PartQty0"Detected Gas 7 / Location - Detected Gas 7 / Location - N/A - PartQty0"Gas Box Detection Port - 8 point (4pairs) - OPT: Ordering Fab must verify Port number,8 Port (4 Pair) = 1, 10 Port (5 Pair ) = 2, Default = 1 note any special requirements within the PO. - PartQty2"4.0.1- Fixture List, FurnaceTUBE CART - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"TEMPLATE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1"MAINTENANCE PLATFORM - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"HEATRE JACK UP BOLT - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"4.0.3 - Fixture List, GasCKD VEC MAINTENANCE FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"IGS MAINTENANCE JIG - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"VACUUM GAUGE (HANDY PIRANI) - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"4.04 - Fixture List ReactorTHERMOPROBE T/C - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"QUARTS CAP SET FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"B/E ROTATION ALIGNMENT FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"QUARTZ TABLE CLEANING FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"B/E CAP PROTECTION COVER - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"BOTTOM T CLEANING FIXTURE - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"INJECTOR SET FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"CLEARANCE CHECK FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"4.04 - Fixture List Interface ToolHCT - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"HANDY MMI - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"4.0.4 - Fixture List, Interface ToolINTERCOM (INTERPHONE) - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"COMPACT FLASH MEMORY - 2 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"COMPACT FLASH READER - 2 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"RF RADIATION METER FIXTURE - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"7.0- Attached ListFacility List - Rev.1 - PartQty1"191. 7.0- Attached List - System layout drawing - 3892-128274-11 - PartQty1 - 3892-128274011"192. 7.0- Attached List - Electrical System Diagram - Design in progress - PartQty1 - 3892-128213-11"193. 7.0- Attached List - Cooling Water System Diagram - Design in progress - PartQty1 - 3893-C20822-13"Conducting (Wire-Way) Work Among Boxes - Design in progress - PartQty1"195. 7.0- Attached List - Gas System Diagram - 3892-226546-11 - GFC - PartQty1 - 3892-226398-11"196. 7.0- Attached List - Gas Parts List - 3898-B22513-12 - GPL - PartQty1 - 3898-B22513-12"Valve Interlock - Design in progress - PartQty1"Safety Interlock - Rev.1 - PartQty1"External Input / Output Table - Rev.1 - PartQty1"Signal Tower Special Sequence - Rev.1 - PartQty1"Quartzware List - Rev.1 - PartQty1"7.11.1- Quartz List, Process FixturQUARTZ TUBE - QUARTZ TUBE - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120034-B4"QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320109-B1 - L-84-45 (TMA)"QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-321496-B1 - L-82-748 (ZAC/OCTANE)"QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-321497-B1 - L-82-748 (O3)"QUARTZ SOFT BACKFILL - 3805-321488-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320013-11 - L-92-50"QUARTZ PLUG - 3805-320013-92 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty4 - 3805-320072-B1"7.11.1- Quartz List, Loading FixturQUARTZ BOAT - 3805-120042-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120042-B1"QUARTZ HOUSING - 3805-120179-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120179-B1"QUARTZ COVER,SCREW - 3805-320066-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty2 - 3805-320066-B1"QUARTZ TABLE - 3805-320165-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320165-B1"QUARTZ GUIDE - 3805-420016-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420016-B1"QUARTZ PLUG, PRO T/C - 3805-420027-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420027-B2"QUARTZ PIN, CTR - 3805-420031-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420031-B2"QUARTZ PIN, ROT - 3805-420030-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420030-B1"QUARTZ CAP - 3805-120137-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120137-B2"QUARTZ PLATE,HEAT SHIELD - 3805-221222-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-221222-B1"QUARTZ PLATE(2) - 3805-320107-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320107-11"QUARTZ PLUG, TP POWER - 3805-421093-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-421093-B1"Gas Layout Drawing Parts ListHAND VALVE - NX1,KE11,FB11 - PartQty3 - FDDFL-21-6. 35UGF-APD - FUJIKIN"HAND VALVE - XZ11 - PartQty1 - FUNDL-21G-6.35UGF-ST-PA - FUJIKIN"NX1 - PartQty1 - BF-1.5U-DF(1MICRON) 1/4""VCR - NIPPON SEISEN"FILTER - NX2 - PartQty1 - WG3SS2WW2 - ENTERIS"FILTER - N12,N22,N32,N42,N62,N82 - PartQty6 - GTMF3201F4A - PALL"FILTER - XZ14 - PartQty1 - CNF1004USG4 - PALL"REGULATOR - NX - PartQty1 - PGM-H-60-4-1 - CKD"REGULATOR - NY - PartQty1 - PGM-50-4-1 �- CKD"PRESSURE TRANSMITTER - NX,NY,N1,XZ4, N5,N7,N8 - PartQty6 - ZT15-Z20-17110(-0.1-0.5MPA) - NAGANO KEIKI"MASS FLOW CONTROLLER - NX - PartQty1 - Z522MGXC-24W2 N2 50SLM - STEC"MASS FLOW CONTROLLER - NY,N1 - PartQty2 - Z512MGXC-24W2 N2 500SCCM - STEC"MASS FLOW CONTROLLER - N2,N4,N7 - PartQty3 - Z512MGXC-24W2 N2 5SLM - STEC"MASS FLOW CONTROLLER - N3,N6 - PartQty2 - Z522MGXC-24W2 N2 20SLM - STEC"MASS FLOW CONTROLLER - N5,N8 - PartQty2 - Z522MGXC-24W2 N2 3SLM - STEC"MASS FLOW CONTROLLER - NXZ2 - PartQty1 - Z522MGXC-24W2 N2 30SLM - STEC"MASS FLOW CONTROLLER - NXZ1 - PartQty1 - G111AMC-4CR-SUC N2 500SCCM - STEC"AIR OPERATE VALVE - NX1,NXZ21 - PartQty2 - FPR-UDDFA-21-6.35UGF-APD#B - FUJIKIN"AIR OPERATE VALVE - NXZ11 - PartQty1 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#A - FUJIKIN"AIR OPERATE VALVE - NY1,N11,N21,N31,N41,N51,N61,NXZ11 - PartQty8 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#A - FUJIKIN"AIR OPERATE VALVE - N82 - PartQty1 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#B - FUJIKIN"AIR OPERATE VALVE - N72 - PartQty1 - FPR-UDDFA-21RS-6.35UGF-ST-PA-APD#B - FUJIKIN"AIR OPERATE VALVE - XZ12-14 - PartQty1 - FBSDAL-RS20-6.35UGF-2B3-ST-PA-DVD - FUJIKIN"AIR OPERATE VALVE - XZ11 - PartQty - FPR-UDDFA-21-6.35UGF-ST-PA-APD#B - FUJIKIN"AIR OPERATE VALVE - FB19 - PartQty1 - FBSDAL-6.35UGF-1B3-DVD#B - FUJIKIN"AIR OPERATE VALVE - XZ13,15 - PartQty2 - FBSDAL-6.35UGF-1B3-ST-PA-DVD - FUJIKIN"AIR OPERATE VALVE - KE11-13,FB11-13 - PartQty2 - FBSDAL-RS22-6.35UGF-2B3-DVD#A - FUJIKIN"AIR OPERATE VALVE - FB1B-FB1C - PartQty1 - FBSDAL-6.35UGF-2B3-DVD#B - FUJIKIN"AIR OPERATE VALVEAIR OPERATE VALVECHECK VALVE - XZ14 - PartQty1 - FUCL-21-6.35UGF6.35JR-0.023-KA-APD - FUJIKIN"CHECK VALVE - NXZ13,NXZ23 - PartQty2 - FUCL-21-6.35UGF6.35JR-0.023-KA-APD - FUJIKIN"CHECK VALVEBAKING UNIT - FSC-F730 - PartQty1 - FSC-F730 - STEC"PRESSURE GAUGE - FB1 - PartQty1 - EMD7D3P1D100 - YAMAMOTO"SPEED CONTROLLER - FB1 - PartQty1 - AS1002F-06 - SMC"OZONIZER - OZONIZER - PartQty1 - OP-500H-RE1 - TMEIC"OZONIZER DESTRUCTOR - OZONIZER DESTRUCTOR - PartQty1 - G-03T - SUD-CHEMIE"AIR OPERATE VALVE - NG1-IP1-NP1 - PartQty1 - FBNHDL-FS202-9.52X6.35-3B4-PA-NFQ - FUJIKIN"AIR OPERATE VALVE - NG2 - PartQty1 - FPR-UDDF-81-9.52X6.35-2-NL-PA-DYL#A-UP - FUJIKIN"AIR OPERATE VALVE - NG3-IP3 - PartQty1 - FBDV-6.35-2B3-ST-PA-LUA-UP - FUJIKIN"AIR OPERATE VALVE - NG4-IP4 - PartQty1 - FBDV-9.52X6.35-2B3-PA-LDT#AUP - FUJIKIN"AIR OPERATE VALVE - NP3 - PartQty1 - FPR-SDT-71RSB2-6.35-3-ST-PA-DZH - FUJIKIN"AIR OPERATE VALVE - NP4 - PartQty1 - FPR-SDT-71RSB2-9.52X6.35-3-PA-DZH#A - FUJIKIN"AIR OPERATE VALVE - Z19 - PartQty1 - HBV-8VF-NC-BA-R-PEEK - IHARA"AIR OPERATE VALVE - KE19 - PartQty1 - FPR-SD-71-6.35UG-PA - FUJIKIN"AIR OPERATE VALVE - KE1A - PartQty1 - FPR-SDT-71-6.35UGSX6.35-3-PA-LHD - FUJIKIN"AIR OPERATE VALVE - Z16,Z26 - PartQty2 - FPR-SDT-71RSB2-6.35UGSX6.35-3-PA-LHD - FUJIKIN"AIR OPERATE VALVE - N83 - PartQty1 - FPR-SD-71RSB2-6.35-2-PA - FUJIKIN"HAND VALVE - NG2 - PartQty1 - FUDDFL-71-6.35-UP - FUJIKIN"HAND VALVE - NG3 - PartQty1 - FUDDFL-71-6.35-ST-PA-UP - FUJIKIN"HAND VALVE - NG4 - PartQty1 - FUDDFL-71-9.52-NL-PA-UP - FUJIKIN"FILTER - Z11,12 - PartQty2 - CNF1004UPSG6 - PALL"VAPORIZER SYSTEM - TL-2013 - PartQty1 - TL-2013L-06U-00-E - STEC"MASS FLOW CONTROLLER - NR1,2 - PartQty2 - G111AMC-4CR-SUC N2 500SCCM - STEC"FILTER - NR1,2 - PartQty2 - GSG-V4-1-N - MOTT"AIR OPERATE VALVE - NR11,12-1,12-2 - PartQty3 - FPR-SD-71-6.35#A - FUJIKIN"HAND VALVE - HV1 - PartQty1 - FUBFL-71-9.52-2-PA-BR - FUJIKIN"HAND VALVE - HV2 - PartQty1 - HBV-8VF-BA-R-PEEK - IHARA"HAND VALVE - HV3,4 - PartQty2 - FUBFL-71-9.52-PA - FUJIKIN"AIR OPERATE VALVE - IV1 - PartQty1 - FPR-71RS1-9.52-PA#A - FUJIKIN"AIR OPERATE VALVE - IV7 - PartQty1 - FPR-71RS1-9.52-2-PA-BR#A - FUJIKIN"AIR OPERATE VALVE - IV8 - PartQty1 - HBV-8VF-NC-BA-R-PEEK - IHARA"AIR OPERATE VALVE - IV2 - PartQty1 - FP-71RS1-9.52-2-PA-BR#A - FUJIKIN"AIR OPERATE VALVE - VV1,VV2 - PartQty2 - FPR-71-9.52-2-PA-BR#A - FUJIKIN"AIR OPERATE VALVE - SSV1 - PartQty1 - FPR-71-6.35-2-PA-BR#A - FUJIKIN"NEEDLE VALVE - NV1 - PartQty1 - FUBFN-71-6.35-DFZ - FUJIKIN"CHECK VALVE - CV1 - PartQty1 - IC8-1/3-VUA-48 - KITZ"CYLINDER VALVE - MV - PartQty1 - VEC-VH8-X0110/VEC-CA9-X0302 - CKD"CAPACITANCE MANOMETER - VG1 - PartQty1 - 631D02T8FHBB - MKS"CAPACITANCE MANOMETER - VG2,P.SW21 - PartQty2 - 631D13T8FHBB - MKS"CAPACITANCE MANOMETER - VG3 - PartQty1 - 631D11T8FHBB - MKS"CAPACITANCE MANOMETER - VG4 - PartQty1 - 631D11T8FHBB - MKS"PRESSURE SWITCH - ATM-P.SW11-1,2 - PartQty2 - 223B-22809 - MKS"DRY PUMP UNIT - M.B.P/D.P - PartQty1 - IXH1820 - EDWARDS"BALL VALVE - BV21,22 - PartQty2 - G-353011 - IHARA"FILTER - F21,F22 - PartQty2 - GF-D50L - NIPPON SEISEN"REGULATOR - RG21,22 - PartQty2 - RC2000-X0005 - CKD"PRESSURE GAUGE - PG21,22 - PartQty2 - G49D-6-P10-P9 - CKD"FLOW CONTROL SYSTEM - FCNL1-LA1,LA2 - PartQty1 - KHT-X0038-FL326735 - CKD"FLOW METER - NFA,NFB - PartQty2 - KHT-X0033-FL326730 - CKD"AIR OPERATE VALVE - PB1-NVNFAPB2-NVNFB - PartQty2 - AGD21V-6RJ-FC - CKD"FILTER - FNL12 - PartQty1 - N-400 PTFE 1/2""VCR L74 - NIPPON SEISEN"STOP VALVE - BV23,24,25 - PartQty3 - 3QV-06-06 - CKD"REGULATOR - RG23-24-25 - PartQty1 - MNRB500B-SLC6-3-D - CKD"PRESSURE SWITCH - P.SW1,P.SW2 - PartQty2 - PPX-R10P-6M - CKD"FLOW METER - NFZ - PartQty1 - XP-G5-U0 - TOKYO KEISO"Missing/Damaged Parts ListNone report, �
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