SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Trias W MOCVD - Deposition Equipment.
Please click on the "Get Quote" button at the end of the Trias W description, if you'd like to get a quotation, photos and specifications of this MOCVD - Deposition Equipment, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Trias W MOCVD - Deposition Equipment is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Description:||MOCVD - Deposition Equipment|
|Sales Condition:||as is where is|
Current Condition: Installed - In Production - Tool is operating in clean room. - [Chamber A] Process: W Hard: SFD Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000) - [Chamber B] Process: W Hard: SFD Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000) - [Chamber C] Process: W Hard: SFD Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000) -
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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