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ACCENT (Nanometrix, BioRad) QS2200M FTIR Spectrometer for Epi, SiN, BPSG & CO Measurement, up to 200mm Wafers for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ACCENT (Nanometrix, BioRad) QS2200M FTIR Spectrometer for Epi, SiN, BPSG & CO Measurement, up to 200mm Wafers.
Please click on the "Get Quote" button at the end of the QS2200M description, if you'd like to get a quotation, photos and specifications of this FTIR Spectrometer for Epi, SiN, BPSG & CO Measurement, up to 200mm Wafers, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ACCENT (Nanometrix, BioRad) QS2200M FTIR Spectrometer for Epi, SiN, BPSG & CO Measurement, up to 200mm Wafers is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ACCENT (Nanometrix, BioRad) QS2200M Equipment Details

SDI ID: 106952
Manufacturer: ACCENT (Nanometrix, BioRad)
Model: QS2200M
Description: FTIR Spectrometer for Epi, SiN, BPSG & CO Measurement, up to 200mm Wafers
Version: 100-200 MM
Vintage: 01.11.2000
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Was complete and operational before removal.
-Included:
-Cal wafer
-PC with UPS
-Biorad Stage Controller
-Power Box QS-POWER-BOX 013-4758-2
120V 50/60 Hz 1200 VA

-Deinstalled from working condition
-Crated and plastic wrapped
-Crated weight and dimensions: 56 in x 50 in x 61 in 915 lbs
-Configured for 4, 5, 6 and 8 inch wafers
-An FTIR Specifically designed for semiconductor characterization, the system includes a 60 degrees Michelson inteferometric
optical unit, XYZ stage.

This particular system is fitted with a manual wafer loading system , with jigs for 100mm, 125 mm and 150 mm wafers. See attached photos.


-Applications can include EPI Film thickness, Dielectric film thickness,Boron And Phosphorus in Dielectrics,Oxygen and Carbon in Si,Hydrogen in SiN, Hydroxide in Amorphous Si, Trench depth monitoring in memory applications.
-Features high throughput, non-destructive testing,transmission and reflection measurement,sorting on thickness and concentration levels,pattern measurement and 2D/3D mapping.
Spectral range 4800-220 cm-1
Selectable spectral resolution 0.5 cm-1
Beam diameter variable between 1.5,2.3.5 and 6 mm
Incident angle 30 degrees precision +/- 0.5 mm on wafer sizes
Footprint 47.5 x 41 x 45.5
Optional measurement capabilities which can be included with the tool:
EPI 0.3-200 um, precision 0.01 um
Bulk Impurities
Oi 3-40 ppma , precision 0.1 ppma, accuracy 0.2 ppma
Cs 0.1-10 ppma, precision 0.1 ppma, accuracy 0.1 ppma
Dopant Composition
B 1-7 Wt%, precision 0.05 Wt%, Accuracy 0.15 Wt%
P 2-12 Wt%, precision 0.05 Wt%, Accuracy 0.25 Wt%
F 1-10 Wt%, precision 0.05 Wt%, Accuracy 0.15 Wt%
Hydrogen in Passivation
SiH 3-30 Atom%, Precision 0.3Atom%, Accuracy 0.5Atom%
NH 3-30 Atom%, Precision 0.3Atom%, Accuracy 0.5Atom%
- QS Win-EPI software p/n 099-WNEPI for measurement of Si thickness (EPI and SOI), Si Membranes and can also be used for group III-V and Group II-VI thickness. 2 modes of operation-normal (2-320 u) and Thin ( for epi thickness less than 2u).
- QS Win-SiN and SiNO Software p/n 099-WNSiN for measurement of Hydrogen in Silicon Nitride or Oxynitride on Silicon, based on Lanford and Rand calibration.
- QS Win-C/O Software p/n 099-WNCO for measurement of interstitial Oxygen and substitutional Carbon in hi-resistivity Silicon
- SECS/GEM Software part number 099-WNSC
-Boron and Phosphorus content in BPSG films
-Fluor content in SFG films
-Trench depth in DRAM process
-Hydrogen content in HSQ films
-Hydroxyl composition in SOG films


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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