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VARIAN EHPi500 Medium Current Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used VARIAN EHPi500 Medium Current Ion Implanter.
Please click on the "Get Quote" button at the end of the EHPi500 description, if you'd like to get a quotation, photos and specifications of this Medium Current Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This VARIAN EHPi500 Medium Current Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


VARIAN EHPi500 Equipment Details

SDI ID: 110763
Manufacturer: VARIAN
Model: EHPi500
Description: Medium Current Ion Implanter
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-still installed
-operational
-see attached photos showing the current condition of the machine
-can be inspected by appointment
1. Model: EHPi
2. HP Gasbox 3 bottle ( BF3, AsH2, PH3)
3. Turbopumps : Edwards / Seiko STP1003 C qty 2 and STP301C qty 1
4. Dry Roughing Pumps:
STG1/STG2 = IQDP40/IQDM250
TERM = IQDP80
ES = IQDP80
5. Target Chamber CTI Cryopump
6. 3 Phase 208V, 50 Hz Operation
7. Wafer Size: 200 mm
8. Facilities: From Bottom
9. 4 Pole GFI breaker in Main PD
10. ROPLAT, 200MM Si ( with Electro-static platen upgrade )
11. Gigahertz PC with SW Version 13
12. High Voltage Probe
13. 60 KV Mirror
14. CE Compliance
16. Simplified 15m Remote PD Kit
17. PP+ Upgrade
18. Host Communications ( SECSII / GEM )


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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