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ASM A600 LPCVD FURNACE BRAND NEW for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM A600 LPCVD FURNACE BRAND NEW.
Please click on the "Send More Details" button at the end of the A600 description, if you'd like to get more details, photos and specifications of this LPCVD FURNACE BRAND NEW, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM A600 LPCVD FURNACE BRAND NEW is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASM A600 Equipment Details

SDI ID: 34471
Manufacturer: ASM
Model: A600
Description: LPCVD FURNACE BRAND NEW
Version: 200mm
Vintage: 01.01.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Crated as 'NEW' in 2001 never used, sold as surplus 'NEW' but without any warranty crated, in warehouse

Cluster tool controller

Touch screen monitor

Keyboard with trackball

User interface

Operating system: Windows NT

 

Hardware system:

Cluster platform module

Cluster platform pump module

CTC Computer cabinet

Process module

Process module pump cabinet

 

Reactor:

Reaction tube

Method: Single tube

Material: High-purity quartz 

 

Heater element:

Heater wire material: Cantor wire, Ø 8 mm

Normal operating temperature: 500°C to 700°C

Maximum temperature: 800°C

Equal heat length: 300 mm

Temperature control: 500°C to 700°C ± 0.50°C

Control circuit: Cascade

 

Thermocouple: 

 

HF/vapor etching module

(4) Zones

Inside: K-Type

Outside: K-Type with ceramic protective tube

 

Cooling method: Water-cooling, 2 l/min

 

Wafer boat:

Wafer size: Ø 200 mm

Wafer quantity: 52 Wafer charges

Material: High-purity quartz. 

Categories:
Attachments: 6 Files
Send Me More Details about this item.



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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