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Rena Etcher In-Line Etching System for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Rena Etcher In-Line Etching System . This Rena Etcher In-Line Etching System is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this In-Line Etching System and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Rena Etcher Equipment Details

SDI ID: 57773
Manufacturer: Rena
Model: Etcher
Description: In-Line Etching System
Version: Solar
Vintage: 01.06.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 125,000 USD
Comments:
Machine number:050119/10582
De-installed, warehoused, located in San Antonio, TX.
The equipment is designed using the principle of cascade to minimize the DI-water consumption by using the overflow water in parts. Wafers are processed in this system to be rinsed, dried, etched, dried and automatically removed from this modern and precise RENA system. The machine consists of:-
a process bath including the input station
-two water rinse baths -an alkaline clean bath (KOH)
-an acidic clean bath (HF/HCl)
-an air dryer including the output station
-an electrical controller
-Base frame constructed of white Poly-Propylene
-Length 5336 mm
-Depth 1100 mm
-Height 2055 mm
This tool has been deinstalled, and currently located in our Boerne, TX Warehouse.

RENA
Machine Type:
Laboratory Etching System: Inline Etching Machine
 
2.4 Connection Data
2.4.1 Electrical Energy
Electrical operating voltage: 480V 3Ph+N+PE
Frequency: 60Hz
Control Voltage: 24V DC
Full power vurrent: 19 A
Add. suply-voltage: 110V/6A 60Hz 1PH+N+PE
 
2.4.2 Medias
DI-Water supply - cold
 - From Central Supply System
 - Connection: 32DN25, PP grey led to the back of the machine
 - Pressure: 4 bar
 - Temperature: 20 deg C
 - Max Flow: 0.7 Nm3/h
 - Aver Flow: 0.6 Nm3/h
 
 HF Supply
 - From central supply system into pump tank of the machine
 - Connection: 1/2" / 40DN32, PPgrey led to the back of the machine
 - Temperature: 20 deg C
 
 HNO3 supply
  - From central supply system into pump tank of the machine
  - Connection: 1/2" / 40DN32, PFA / PPgrey led to the back of the machine
  - Temperature: 20 deg C
  
  H2SO4 supply
  - From central supply system into pump tank of the machine
  - Connection: 1/2" / 40DN32, PFA /PPgrey led to the back of the machine
  - Temperature: 20 deg C
  
  2.4.3 Cooling water supply/return
  City water supply to Alkaline Clean (cooling water)
  - Connection: 20DN15, Pgrey led to the back of the machine
  - Temperature: 10 deg C
  - Max Flow: 0.6 Nm3/h
  
  City water return from Alkaline Clean (cooling water)
  - Connection: 20DN15, PPgrey led to the back of the machine
  - Temperature: >10 deg C
  
  2.4.4 Chiller supply/return
  City water supply for chiller (Cooling water)
  - Connection: 1/2" PVC, fabric tube led to the back side of chiller
  - Temperature: 10 deg C
  - Max Flow: 0.3 NM3/h
  
  City Water return for chiller (Cooling water)
  - Connection: 1/2" PVC, fabric tube led to the back side of the chiller
  - Temperature: approx. 35 deg C
  - Max Flow: 0.3 Nm3/h
  
  2.4.5 CDA (Clean Dry Air)
  Clean dry air for air knife and air pipes
  - Connection: 25DN20, PPgrey led to the back of the machine
  - Pressure: 6 bar
  - Temperature: 20 deg C
  - Max Flow: 108 Nm3/h
  - Aver. Flow: 81 NM3/h
  
  Clean Dry Air for valves and diaphgarm pumps
  - Connection: 1/2" SS Swagelok led to the back of the machine
  - Pressure: 6 bar
  - Temperature: 20 deg C
  - Max Flow: 50 NM3/h
  
  2.4.6 Exhaust
  Lead Exhause acidic from process area (NOx)
  - Connection: 3x ~90mm, PP grey
                1x ~63mm, PP grey
                led to the top of the machine
  - Max Flow: 390 Nm3/h
  
  Lead Exhause caustic from alkaline area (KOH)
  - Connection: 1 x ~90mm, PP grey
  led to the top of the machine
  - Max Flow: 178 Nm3/h
  
  Lead Exhaust acidic from HF/HCI area
  - Connection: 1x ~90mm, PPgrey led to the top of the machine
  - Max Flow: 189 NM3/h
  
  2.4.7 Drain
  Drain Acidic
  - Connection: 2x 1/2" / 40DN32, PFA / PP grey
    1 X from process bach (HF/HNO3/H2SO4)
    1 X from acidic bath (HF/HCL)
    each led to the back side of the machine
Drain Alkaline
- Connection: 1/2" / 40DN32, PFA /PPgrey
              From alkaline bath (KOH)
              led to the back side of the machine
              
Drain Rinse Water
- Connection: 32DN25, PPgrey
              from process bath (HF/HNO3/H2SO4 bath; diluted)
              from acidic bath (HF/HCL; diluted)
              from alkaline bath (KOH; diluted)
              led to the back side of the machine
              
2.5 Wafers and roller transport
Designed for square silicon wafers with the following dimensions:
- 210 mm X 210 mm +/- 0,5mm
2 transport lanes
- Working direction from the left to the right from the operator's point of view
- Transport rollers transport the wafers
- Downholder rollers hold down the wafers to avoid buoying upwards
- Distance between 2 rollers: 48mm
- With a gap of 15 mm between two wafers in transport direction
- transport velocity adjustable between 0.2 and 1.5 m/min
- Nominal speed 0.8 m/min for isotexturing and 0.4 m/min for edge isolation
 
2.6 Main measurement and weight
Dimensions (W x D x H)
Machine:
- Approx. 4752 mm x 1100 mm x 1800 mm (2055 mm including electrical cabinet)
- overall length with input and output station approx. 5336 mm
- transport height: 1000 mm +/- 15 mm
- grab height: approx 1120 mm
Electrical cabinet: 800 mm x 800 mm x 210 mm
- Integrated in the machine
Chiller UC060Tw-H: 550 mm x 1100 mm x 1265 mm
 
Weight
Machine(empty): approx. 1200 kg
Chiller: approx 180 kg net
 
2.7 availability
According to Semi E10,92
Up Time: >92%
MTBF: > 700h
MTTR: < 3 h
Telephone support:
Phone support < 12h 365 d/a
Service on site < 24h 365 d/a
Spare parts ex works <24h 365 d/a
 
2.8 Noise Level
Noise emission on working place: max 70DB (A)
Attachments: 45 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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