SDI fabsurplus.com is pleased to announce the availability of the following listed used AKT New Aristo G4.5 NAR 1200L Vertical In-line Sputtering Machine for LCD / TFT panel G4.5 for Mo-Al-Mo.
Please click on the "Get Quote" button at the end of the New Aristo G4.5 NAR 1200L description, if you'd like to get a quotation, photos and specifications of this Vertical In-line Sputtering Machine for LCD / TFT panel G4.5 for Mo-Al-Mo, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This AKT New Aristo G4.5 NAR 1200L Vertical In-line Sputtering Machine for LCD / TFT panel G4.5 for Mo-Al-Mo is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||New Aristo G4.5 NAR 1200L|
|Description:||Vertical In-line Sputtering Machine for LCD / TFT panel G4.5 for Mo-Al-Mo|
|Version:||730mm x 920 mm|
|Sales Condition:||as is where is|
Technical Specification Vertical In-Line Sputtering Machine
All data are based on glass
All data are based on glass
NOTE: max. Mo thickness: 500A
Target Material see Attachment 13.10
Glass specification Corning E2K Display Grade or equal
Throughput: 180 Substrates/h (2 Substrates / carrier) Target utilization: ≥ 40% in average over all targets
All mechanical operations, move of carriers, pump down, venting and process speed are optimized to meet a cycle time of 40sec.
The process data described in chapter 4.2 and 4.3 have to be achieved under a cycle time of 40sec.
for vacuum chamber:
Range: 103 hPa to 1*10-3 hPa
Range: 10-2 hPa to 1*10-9 hPa
in addition for each cathode :
AMAT S400 plus WSU 2001
*Max power of cathode will be limited to 40kW via Software limit.
(3 AC, N, PE)
be kept constant within: ± 2 °C (for TMP’s only)
concentration: max. 10/cm3
Pressure min/max.: 6/8 bar absolute
machine control room: 20 - 30°C
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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