SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELFORMULA Nitride Vertical LPCVD Furnace.
Please click on the "Get Quote" button at the end of the TELFORMULA Nitride description, if you'd like to get a quotation, photos and specifications of this Vertical LPCVD Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELFORMULA Nitride Vertical LPCVD Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 87287 |
|---|---|
| Manufacturer: | TEL Tokyo Electron |
| Model: | TELFORMULA Nitride |
| Description: | Vertical LPCVD Furnace |
| Version: | 300 mm |
| Vintage: | 31.05.2004 |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | Inquire |
| Comments: | EQUIPMENT DETAILS: Tube Material:Quartz Boat Material:Quartz Production wafes:50 Pressure control:APC Valve Process Gas:DCS(F.S:200sccm),NH3(F.S:2slm),N2O(F.S:1slm),HF(F.S:5slm),20%F2/N2(F.S:20slm ),N2 MFC Maker:HITACHI-Metals MFC Model:PAR78series Process Temp:600-700deg Missing or damaged parts: Not reported. Inspection is recommended to confirm. |
Get Quote |
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