SDI fabsurplus.com is pleased to announce the availability of the following listed used AKT / Applied Materials G5 15K PECVD system for FPD Amorphous Si Process. This AKT / Applied Materials G5 15K PECVD system for FPD Amorphous Si Process is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this PECVD system for FPD Amorphous Si Process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Manufacturer:||AKT / Applied Materials|
|Description:||PECVD system for FPD Amorphous Si Process|
|Version:||G5 (1100 mm x 1300 mm)|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
-Still installed , available immediately, aSi chambers.
-The tool was running up until 8 months ago, when it was shut down.
-Prior to shut down, the tool was working without problems.
-Deposits insulating film on large-area glass substrates
-The 15K system is used for the deposition of silicon-based films on Generation 5 Amorphous Silicon Flat Panel Display and Solar Cell substrates approximately 1.1m x 1.3m in size.
G5 AKT-15K PECVD
PECVD - Plasma Enhanced Chemical Vapor Deposition
Min Maintenance area: 8,317mmX9,281mm
System height: 2,582mm
Min Crane area: 7,659X9,846mm
Min Crane service height: 3,350mm
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