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4 Inch Partial GaN / Sapphire LED pilot wafer fab line for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used 4 Inch Partial GaN / Sapphire LED pilot wafer fab line.
Please click on the "Send More Details" button at the end of the Partial description, if you'd like to get more details, photos and specifications of this GaN / Sapphire LED pilot wafer fab line, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This 4 Inch Partial GaN / Sapphire LED pilot wafer fab line is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


4 Inch Partial Equipment Details

SDI ID: 96387
Manufacturer: 4 Inch
Model: Partial
Description: GaN / Sapphire LED pilot wafer fab line
Version: 100 mm and 150 mm
Vintage: 01.05.2011
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Complete pilot fab line for sale (89 items).

-Average tool vintage: Around May 2011

-For GaN on Sapphire.

-Was shut-down in  2018.

-The tools are all still installed, mothballed in the fab.

-The equipment is still installed, and can be inspected by appointment.

-The wafer size run was 4 inch, but around 95% of the tools would also be capable of working with 6 inch sized wafers.

-See a video of the fab:

 

-See attached list in excel for details.

Equipment list:-

Lot no.

SDI ID

Manufacturer

Model

Description

Qty

Available

1

96633

AIXTRON

AIX2800G4 HT

GaN MOCVD

1

SOLD

1

96634

AIXTRON

AIX2800G4 HT

GaN MOCVD

1

SOLD

1

96632

AIXTRON

AIX2800G4 HT

GaN MOCVD

1

SOLD

1

96631

AIXTRON

AIX2800G4 HT

GaN MOCVD

1

Yes

1

96562

AIXTRON

AIX2800G4 HT

GaN MOCVD

1

Yes

2

96621

TERATECH

TPAM-CA-040N

NH3 Purifier (Regen Type)

1

SOLD

3

96623

TERATECH

TPH-CA-100N

H2 Purifier (Regen Type)

1

SOLD

4

96625

TERATECH

TPN-CA-100N

N2 Purifier (Regen Type)

1

SOLD

5

96626

TERATECH

TPN-LP-500S (100S)

N2 Purifier (IN LINE Type)

4

SOLD

6

96624

TERATECH

TPH-LP-500S (100S)

H2 Purifier (IN LINE Type)

4

SOLD

7

96622

TERATECH

TPAM-LP-500S (50S)

NH3 Purifier (IN LINE Type)

5

SOLD

8

96599

NTC

DVC-1300-N1

Instantaneous power failure prevention device (VSP) dip free

5

SOLD

9

96571

ETAMAX

PLATO

PL Mapper

1

SOLD

10

96609

Panalytical

X-PERT PRO MRD

XRD

1

SOLD

11

96588

KOCAT

KC-903

Scrubber

1

Yes

11

96641

KOCAT

KC-903

Scrubber

1

SOLD

11

96640

KOCAT

KC-903

Scrubber

1

Yes

11

96642

KOCAT

KC-903

Scrubber

1

SOLD

11

96643

KOCAT

KC-903

Scrubber

1

SOLD

11

96644

KOCAT

KC-903

Scrubber

1

SOLD

12

96582

JEIL

JC-1100-S01

GAS CABINET (SiH4, SiH4 / H2, SiH4 / H2)

1

SOLD

13

96579

JEIL

JC-1100-S01

GAS CABINET (BCl3, CL2, NF3)

1

SOLD

14

96581

JEIL

JV-800-S01

VMB: SiH4 (AUTO)

1

SOLD

15

96580

JEIL

JV-800-S01

VMB: NH3 (AUTO)

1

SOLD

16

96560

ADIXEN

ASM182TD +

Helium Leak Detector

1

SOLD

17

96561

ADIXEN

ASM192T2D +

Helium Leak Detector

1

SOLD

18

96567

EBARA

ESA70W-D

Dry Pump

1

SOLD

19

96617

Soritech

TNP

Prober station

1

SOLD

20

96569

Ellipso technology

Elli-SE-aM6

Ellipsometer

1

SOLD

21

96565

CLEAN AIR TECH

CPF-300

Aseptic Working Table (Bag Filter Dust Collector)

1

Yes

22

96591

MAXIS

300L

ICP Etcher

1

Yes

23

96620

TAINICS

TE3100

ICP Etching Equipment (for GaN Etching)

1

Yes

24

96614

SCINCO

S-3100

UV-Visible Spectrophotometer

1

On-Hold

25

96619

TAINICS

TC2300

PECVD

1

Yes

26

96628

ULVAC

EI-5K

Batch Type High Vacuum Evaporation System for ITO

1

SOLD

27

96629

Ulvac

EI-5K

Batch Type High Vacuum Evaporation System for Metal

1

SOLD

28

96586

KLA-Tencor

P6

Alpha Step Profileometer

1

SOLD

29

96616

SNTEK

PSA5000

Asher

1

Yes

30

96598

NPS

RHP 440

RTP Equipment

1

Yes

30

96670

NPS

RHP440

RTP Equipment

1

Yes

31

96573

FCI SYSTEM

Acid Auto

Wet Station

1

Yes

32

96575

FCI SYSTEM

Solvent Auto

Wet Station

1

Yes

33

96615

Semitronix

SD1500S

Spin Rinse Dryer

1

SOLD

33

96639

Semitronix

SD1500S

Spin Rinse Dryer

1

SOLD

34

96587

KOCAT

KC-601

Scrubber (for ICP)

1

Yes

35

96589

KOCAT

KSI-701

Scrubber (for PECVD)

1

Yes

36

96592

MIDAS

MDA-60FA

Mask Aligner

1

SOLD

37

96618

SVS

MSX1000

Spin Coater & Developer

1

SOLD

38

96596

NIKON

NSR-1755i7A

i-line Stepper

1

SOLD

39

96574

FCI SYSTEM

Solvent Manual

Solvent Manual Wet Station

1

Yes

40

96602

NTS

S610T-AFCLOM

Lapping Machine

1

SOLD

41

96600

NTS

GV320 / PC-VDM

Grinding Machine

1

SOLD

42

96601

NTS

NBM-SE3-4

Wafer Bonding Machine

1

SOLD

43

96563

ASM

AB339 Eagle

Wire Bonder

1

Yes

44

96564

ASM

AD809

Die Bonder

1

Yes

45

96630

Wangsan Engineering

WS-CO-500-2

PKG LINE N2 Cure Oven (Up to 220C)

1

Yes

46

96566

DONGBU ROBOT

DTR3-3310-T-SG

PKG LINE Dispenser Robot System

1

SOLD

47

96611

QMC

DPS-600

LED Die Probing System

1

Yes

47

96635

QMC

DPS-600

LED Die Probing System

1

Yes

47

96636

QMC

DPS-600

LED Die Probing System

1

Yes

47

96637

QMC

DPS-600

LED Die Probing System

1

Yes

47

96638

QMC

DPS-600

LED Die Probing System

1

Yes

48

96577

IMS Nanotech

LVIS-3 +

LED Visual Inspection

1

Yes

49

96578

IMS NANOTECH

LVIS-V

LED Visual Inspection Equipment

1

Yes

50

96594

Neontech

NEX-8

Wafer Expander

1

SOLD

51

96593

Neontech

NBK-107

LED Wafer Breaker

1

Yes

52

96595

Neontech

NTM-80A

LED Tape Mounter

1

SOLD

53

96612

QMC

PLS-600

Pellucid Laser Scribing System

1

SOLD

54

96572

ETAMAX

Quick Check

LED Prober in Dark Box

1

SOLD

55

96559

CUSTOM

CUSTOM

Wafer Transfer Machine

1

SOLD

56

96610

Photondays

LED Accelerated Aging System

LED Aging & Tester

1

SOLD

57

96585

JEIO TECH

OF-22GW

Dry Oven

1

Yes

58

96584

JEIO TECH

OF-12GW

Dry Oven for Curing after Encap - D / A for PKG

1

Yes

59

96608

Optoelectronic Precision Co., Ltd.

LEOS-OPI-110

Characteristic Measuring Equipment / Multi-channel

1

Yes

60

96576

Hitachi

S-3400N-Type

Scanning Electron Microscope

1

SOLD

61

96590

K&S

1488L TURBO

Wire Bonder

1

Yes

62

96613

ROYCE

ROYCE 650

Bond Pull Tester

1

SOLD

63

96583

JEIL

JR-500-S03

GAS RACK (N2O, Ar, O2, He)

1

Yes

64

96568

ECOPIA

HMS-5000

Hall effect measurement system

1

SOLD

65

96627

THINKY

ARE 260

PKG Line Agitated Deaerator

1

SOLD

66

96603

NTS

NPD-100

Thickness Gauge unit

1

SOLD

67

96570

ENMET

SPECTRUM SP

Hydrogen Portable Detector (Suction)

1

SOLD

68a and 68b

96606

OLYMPUS

MX51F

High Magnification Optical Microscope

2

SOLD

69

96604

OLYMPUS

BX51M

Optical Microscope

3

SOLD

70

96607

OLYMPUS

SZ61TR

Low Magnification Microscope

4

SOLD

71

96605

OLYMPUS

BX60M

Low Magnification Optical Microscope (400x350)

1

SOLD

74

96597

NIKON

SZM-645

Microscope

1

SOLD

75

96650

GENSYS

Wet Station

Acid / Alkali Wet Station

1

SOLD

76

96661

Lead Engineering

LDF-8300

3 tube Horizontal Diffusion Furnace

1

Yes

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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