DNS / SOKUDO RF3 Photoresist Coater and Developer Track for Sale

Configuration:-
-See attached the block diagram of the tool
1. Main Body Frame (Left to Right wafer flow)
2. Indexer with 2 load ports
3. B2 3 Resist cups, 1 Develop cup
Coat module B2-SC#1- pumped dispense for: -
- B2-SC#1, Nozzle #1 = 1 x PDS-105 pump (ArF resist - filtered)
- B2-SC#1, Nozzle #2 = 1 x PDS-107 pump (no filter, by-pass filter housing only)
- B2-SC#1, Nozzles #3 - #10 = future use nozzles and dispense lines (pumps not included)
- Pre wet nozzle required
- Top EBR - Solvent
- Back EBR - Solvent
Coat module B2-SC#2- pumped dispense for: -
- B2-SC#2, Nozzle #1 = 1 x PDS-105 pump (no filter, by-pass filter housing only)
- B2-SC#2, Nozzles #2 - #10 = future use nozzles and dispense lines (pumps not included)
- Pre wet nozzle required
- Top EBR - Acetone
- Back EBR - Acetone
Coat module B2-SC#3- pumped dispense for: -
- Nozzle #1 - Acetone (semiconductor grade)
- Nozzle #2 - IPA (99% semiconductor grade)
- Nozzle #3 - DI Water
- Nozzle #4 - #10 - future use nozzles and dispense lines (pumps not included)
- Pre wet nozzle required
- Top EBR - Acetone
- Back EBR - Acetone
B2-SD#1 - standard develop module with ECO nozzle as dispense system
Thermal Modules:
- RHP 1 unit
- CP 4 units
- HP 4 units

5.B3 4 Resist cup
Coat module B3-SC#1- pumped dispense for: -
- B3-SC#1, Nozzles #1 - #10 = PDS-105 pumps (no filter, by-pass filter housing only)
- Pre wet nozzle required
- Top EBR - not required
- Back EBR - not required
Coat module B3-SC#2- pumped dispense for: -
- B3-SC#2, Nozzles #1 - #10 = PDS-105 pumps (no filter, by-pass filter housing only)
- Pre wet nozzle required
- Top EBR - not required
- Back EBR - not required
Coat module B3-SC#3- pumped dispense for: -
- Nozzle #1 - Acetone (semiconductor grade)
- Nozzle #2 - IPA (99% semiconductor grade)
- Nozzle #3 - DI Water
- Nozzle #4 - #10 - future use nozzles and dispense lines (pumps not included)
- Pre wet nozzle required
- Top EBR - Acetone
- Back EBR - Acetone

Coat module B3-SC#4- pumped dispense for: -
- Nozzle #1 - Acetone (semiconductor grade)
- Nozzle #2 - IPA (99% semiconductor grade)
- Nozzle #3 - DI Water
- Nozzle #4 - #10 - future use nozzles and dispense lines (pumps not included)
- Pre wet nozzle required
- Top EBR - Acetone
- Back EBR - Acetone
Oven
- F-RHP 3 units
- CP 3 units
- HP 2 units

6. Software
Flex Flow Software
GEM

7. Supporting Units
ACU cabinet -Support B2-SC#1 only 1 unit
SC cabinet 2 units
SC cabinet#1
- Supporting B2-SC#3, B3-SC#3, B3-SC#4 for IPA pressurized dispense via nozzles
- Supporting B2-SC#3, B3-SC#3, B3-SC#4 for Acetone pressurized dispense via nozzles
SC cabinet#2
- Supporting B2-SC#2, B2-SC#3, B3-SC#3, B3-SC#4 for Top & Bottom Acetone EBR
- Supporting B2-SC#1 for solvent Top EBR and Bottom EBR
SD cabinet -Support B2-SD#1 module only- 1 unit
Canister cabinets -Feeding SC cabinets, SD cabinet and supporting pre wet nozzles
ETU cabinet -Supporting B2-SC#1 Nozzle #1 and B2-SD#1 Nozzle #1 1 unit
Power box 1 unit

8. Others
Tower Lamp -SOKUDO standard spec
Third Party Electrical Site Inspection
Installation
Compliance to mutually agreeable Performance Specification (details TBD)
Training Credits for 4 Engineers

9. Special requirements
Water jacket control for B3-SC#1 and 2
- Will support all 10 dispense lines at 65C for a minimum time of 10 minutes (5ml dispenses)
Waste fluid cabinet for B2 SC#1-3 and B3 SC#1-4
- Will support waste containment for SC modules- includes auto switching function
between qty 2 waste containers (~5G each)